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| Number | Title | Issue Date |
| 8172197 | Fast-acting pneumatic diaphragm valve A fast-acting, pneumatic diaphragm valve includes a diaphragm valve closure member, a pneumatic piston that provides a closure force on the closure member, and a solenoid pilot valve that controls pressurized air to the piston to cause the piston to move in a recipr... | 05/08/2012 |
| 8150553 | Apparatus and method for pressure fluctuation insensitive mass flow control A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals t... | 04/03/2012 |
| 8124906 | Method and apparatus for processing metal bearing gases A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the meta... | 02/28/2012 |
| 8110991 | Phase and frequency control of a radio frequency generator from an external source Controlling a phase and/or a frequency of a RF generator. The RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit c... | 02/07/2012 |
| 8108174 | Versatile semiconductor manufacturing controller with statistically repeatable response times The present invention relates to process I/O controllers for semiconductor manufacturing to which a tool host can delegate data collection, monitoring and control tasks. In particular, it relates to process I/O controllers that can perform more than one of data coll... | 01/31/2012 |
| 8102954 | Frequency interference detection and correction A system for detecting and correcting for spurious frequencies that may coincide in a bandwidth of interest in an RF metrology system. The system can (1) utilize a deterministic scheme to detect an interference by a spurious frequency and correct the distortion effe... | 01/24/2012 |
| 8089026 | Methods for control of plasma transitions in sputter processing systems using a resonant circuit Methods and apparatus for controlling a plasma used for materials processing feature cooperative action of a resonant circuit and a switch unit coupled to a plasma vessel and a power supply. A sensor for acquiring a signal associated with a state of a plasma in the ... | 01/03/2012 |
| 8086327 | Methods and apparatus for automated predictive design space estimation Described are computer-based methods and apparatuses, including computer program products, for automated predictive design space estimation. A design space of input factors and output responses is estimated for a physical process. Data is received for one or more in... | 12/27/2011 |
| 8085401 | Ozone concentration sensor An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially... | 12/27/2011 |
| 8083359 | Corner cube retroreflector mount A retroreflector adapted to be mounted to a motor including a first, second, and third petal having a mutually perpendicular first, second, and third reflective surface that form a retroreflective surface. A base is directly connected to at least one of the first, s... | 12/27/2011 |
| 8079383 | Controller gain scheduling for mass flow controllers A mass flow controller having a feedback controller gain, comprises: a sensor configured so as to sense the flow of fluid through controller; a valve arranged so as to adjust the flow of fluid through the controller; and a processor configured so as to control the v... | 12/20/2011 |
| 8055203 | Multipoint voltage and current probe system A metrology system monitors radio frequency (RF) power at a plurality of locations in a circuit. The system includes a plurality of RF sensors that generate respective analog signals based on electrical properties of the RF power, a multiplexing module that generate... | 11/08/2011 |
| 8053700 | Applicators and cooling systems for a plasma device An improved plasma vessel (i.e., plasma applicator) that provides effective cooling includes a plurality of generally linear tubes having a dielectric interior fluidly connected together by dielectric connectors. The tubes and connectors are joined together to form ... | 11/08/2011 |
| 8040141 | Orthogonal radio frequency voltage/current sensor with high dynamic range A radio frequency (RF) sensor that measures RF current includes a substrate that has an inner perimeter that defines an aperture. A conductor extends through the aperture. Sensor pads are arranged on the aperture and are connected to form two sensor loops. The loops... | 10/18/2011 |
| 8040068 | Radio frequency power control system A radio frequency (RF) system includes a control module that allocates M predetermined frequency intervals. The system also includes N RF sources that each applies first RF power to electrodes within a plasma chamber at frequencies within an assigned respective one ... | 10/18/2011 |
| 8037896 | Pressure regulation in remote zones A pressure control system remotely controls pressure within one or more remote zones, each respectively connected to an enclosure through a conduit, by controlling flow of a fluid into and out of each enclosure. The pressure of the fluid is measured within each encl... | 10/18/2011 |
| 8003936 | Chemical ionization reaction or proton transfer reaction mass spectrometry with a time-of-flight mass spectrometer A system, components thereof, and methods are described for time-of-flight mass spectrometry. A microwave or high-frequency RF energy source is used to ionize a reagent vapor to form reagent ions. The reagent ions enter a chamber and interact with a fluid sample to ... | 08/23/2011 |
| 8003935 | Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole mass spectrometer A system and methods are described for generating reagent ions and product ions for use in a quadruple mass spectrometry system. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chambe... | 08/23/2011 |
| 7996102 | Process control using process data and yield data A method for monitoring a manufacturing process features acquiring metrology data for semiconductor wafers at the conclusion of a final process step for the manufacturing process (“Step a”). Data is acquired for a plurality of process variables for a first proce... | 08/09/2011 |
| 7982513 | Signal oversampling for improved S:N in reflector movement system Eight or more transition points are generated during a given period, and are used in tracking movement of an interferometer reflector. Duty cycles of generated square waves are used to establish precise intervals between the transition points, and precise wave-phase... | 07/19/2011 |
| 7969096 | Inductively-coupled plasma source A method and apparatus for exciting gas that involves generating an alternating magnetic field unidirectionally through a magnetic core defining a gap, across the gap and through a plasma vessel that includes dielectric material. The magnetic field induces an electr... | 06/28/2011 |
| 7950294 | Preventive maintenance diagnostics for valve systems A valve system includes a valve and a controller that controls the valve. The valve includes a valve body, and a motor configured to deliver a torque to the valve body to cause the valve body to move between an open position and a closed position. The controller is ... | 05/31/2011 |
| 7932480 | Multiple heater control system with expandable modular functionality A multiple heater control system includes cables, connectors, and junction boxes for user-friendly daisy chain connections of heater controllers and heaters in various configurations or combinations of individually controlled heater series and/or master and slave he... | 04/26/2011 |
| 7914603 | Particle trap for a plasma source A particle trap for a remote plasma source includes a body structure having an inlet for coupling to a chamber of a remote plasma source and an outlet for coupling to a process chamber inlet. The particle trap for a remote plasma source also includes a gas channel f... | 03/29/2011 |
| 7892502 | Ozone system for multi-chamber tools An improved system and method for controlling ozone concentration in connection with a multi-chamber tool. The system and method involve a first and a second concentration controller in combination with an ozone generator. The first concentration controller detects ... | 02/22/2011 |
| 7891228 | Dual-mode mass flow verification and mass flow delivery system and method A system performs mass flow delivery of a fluid, and also performs mass flow verification of the fluid. The system includes an inlet valve that controls flow of the fluid into a chamber, an outlet valve that controls flow of the fluid out of the chamber, a pressure ... | 02/22/2011 |
| 7809473 | Apparatus and method for pressure fluctuation insensitive mass flow control A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals t... | 10/05/2010 |
| 7809450 | Self-correcting multivariate analysis for use in monitoring dynamic parameters in process environments A method and apparatus for process monitoring are provided. Process monitoring includes (i) generating a multivariate analysis reference model of a process environment from data corresponding to monitored parameters of the process environment; (ii) designating at le... | 10/05/2010 |
| 7787477 | Address-transparent device and method An address-transparent device is disclosed that couples two networks in a semiconductor fab and communicates packets between a host on a first network and a tool on a second network. Optionally, the address-transparent device intercepts packets for local use by a da... | 08/31/2010 |
| 7777567 | RF power amplifier stability network A radio frequency (RF) generator for applying RF power to a plasma chamber includes a DC power supply (B+). A radio frequency switch generates the RF power at a center frequency f0. A low-pass dissipative terminated network connects between the DC power s... | 08/17/2010 |
| 7764140 | Radio frequency power delivery system A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring... | 07/27/2010 |
| 7757563 | Capacitance manometers and methods of making same A capacitance manometer comprises: a flexible diaphragm including a first electrode structure; an electrode structure including second and third spaced-apart electrode structures secured relative to the diaphragm so as to establish a capacitance between the first el... | 07/20/2010 |
| 7757554 | High accuracy mass flow verifier with multiple inlets A high accuracy mass flow verifier (HAMFV) which provides high measurement accuracy over a wide flow verification range with low inlet pressures is disclosed for verifying flow measurement by a fluid delivery device. The HAMFV includes a chamber defining a plurality... | 07/20/2010 |
| 7755300 | Method and apparatus for preventing instabilities in radio-frequency plasma processing A method and apparatus for controlling a power supply to prevent instabilities due to dynamic loads in RF plasma processing systems, operating at frequencies of from 1 MHz and up 1 MHz and above. The apparatus includes a power source, a power converter receiving pow... | 07/13/2010 |
| 7731161 | Devices, systems, and methods for carbonation of deionized water Devices, systems, and methods employed in wet cleaning semiconductor devices are provided. In particular, systems that can deliver deionized water with the desired concentration of CO2 and methods of generating deionized water with a desired concentration of CO2 for... | 06/08/2010 |
| 7728602 | Harmonic derived arc detector An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the sign... | 06/01/2010 |
| 7725606 | Method and apparatus for two phase structured message to tagged message translation An aspect of the present invention includes a method and device for translating a structured message into a context tagged, XML message. A two step translation is described, first including translation from structured message to structure tagged message, and then fr... | 05/25/2010 |
| 7697258 | Air assist for AC ionizers At least one orifice is added to an AC ionizer with nozzles and ionizing electrodes that are used to remove static charge. The orifice is placed in a location where electrostatic forces are weak and where gas ions can be easily extracted from the ionizer. Ionizer ef... | 04/13/2010 |
| 7693687 | Controller and method to mediate data collection from smart sensors for fab applications The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or dist... | 04/06/2010 |
| 7685481 | Bitmap cluster analysis of defects in integrated circuits A system and method for defect analysis are disclosed wherein a defect data set is input into the system. A radius value is selected by a user, which is the maximum number of bits that bit failures can be separated from one another to be considered a bit cluster. Wh... | 03/23/2010 |
