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| Number | Title | Issue Date |
| 7374335 | In situ optical surface temperature measuring techniques and devices A luminescent temperature sensor comprising (i) an object having a recess, (ii) a layer of luminescent material disposed in the recess, wherein the luminescent material emits electromagnetic radiation having a detectable optical characteristic that is functionally d... | 05/20/2008 |
| 7080940 | In situ optical surface temperature measuring techniques and devices A temperature sensor that has a thermally conducting contact with a surface that emits electromagnetic radiation in proportion to the temperature of the contact is disclosed. The sensor has a resilient member attached to the contact and configured to extend the cont... | 07/25/2006 |
| 7042581 | Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers A characteristic of a surface is measured by illuminating the surface with optical radiation over a wide angle and receiving radiation reflected from the surface over an angle that depends on the extend of the illumination angle. An emissivity measurement is made fo... | 05/09/2006 |
| 6934040 | Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers A characteristic of a surface is measured by illuminating the surface with optical radiation over a wide angle and receiving radiation reflected from the surface over an angle that depends on the extend of the illumination angle. An emissivity measurement is made fo... | 08/23/2005 |
