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| Number | Title | Issue Date |
| 7332040 | Semiconductor manufacturing system having a vaporizer which efficiently vaporizes a liquid material A vaporizer can efficiently vaporize a liquid material under a depressurized atmosphere. The liquid material is temporarily stored in a liquid storing chamber, and is supplied to a vaporizing chamber set in the depressurized atmosphere via a small aperture. An inlet... | 02/19/2008 |
| 5865421 | Valve structure for use in a vaporizer A valve structure for use in a vaporizer is provided including: a valve seat 16 confronting a vaporization area Y in which a liquid feedstock 106 is to be vaporized and having a liquid feedstock feeding port 15a for introducing the liquid feedstock 106 in... | 02/02/1999 |
| 5372754 | Liquid vaporizer/feeder In a liquid vaporizing/feeding method of the present invention, carrier gas is forced out at a very high speed against a mass flow controlled liquid feedstock to change the liquid feedstock into a mist; after that, the mist of the feedstock is vaporized a... | 12/13/1994 |
| 5159951 | Mass flow controller A mass flow controller having a bypass portion provided in a body through which a large amount of gas is passed and a sensor portion, laid between a primary chamber which is an inlet of the bypass portion and a secondary chamber which is an outlet of the ... | 11/03/1992 |
| 5080131 | Mass flow controller A mass flow controller having a bypass portion provided in a body through which a large amount of gas is passed and a sensor portion, laid between a primary chamber which is an inlet of the bypass portion and a secondary chamber which is an outlet of the ... | 01/14/1992 |
| 4984460 | Mass flowmeter A mass flowmeter comprising heat sensitive coils mounted at an upstream position and a downstream position of a conduit through which a fluid flows. The heat sensitive coils have a resistance variable with the fluid temperature, and are each included in a... | 01/15/1991 |
