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| Number | Title | Issue Date |
| 7323221 | Coating of objects The present invention relates to a process for the coating of objects made of valve metals or their alloys with a thin barrier layer consisting of the metal and an oxide ceramic layer provided thereon whose surface has been coated with fluoropolymers, characterized ... | 01/29/2008 |
| 7156922 | Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor A multi-chamber installation (1) treats objects under vacuum. An evacuation system (5) is connected to a plurality of chambers (2, 3, 4). To reduce the complexity of the evacuation process, a forepump (5) has several stages (11, 12, 13... | 01/02/2007 |
| 7097431 | Mechanical kinetic vacuum pump A mechanical vacuum pump includes a rotor made of a light metal alloy by powder metallurgy. The powder metallurgy increases the resistance of the rotor to heat and creep. ... | 08/29/2006 |
| 7090460 | Pump embodied as a side channel pump A side channel pump, preferably a vacuum pump, includes a driven rotor (16) and a fixed stator (14). The rotor (16) and the stator (14) define a pump channel circulating in a peripheral direction. Blades are fixed onto the rotor, protrudi... | 08/15/2006 |
| 7090469 | Turbomolecular pump A turbomolecular pump (10) comprises a stator (12, 18), a pump rotor (20) a motor (28) for driving the pump rotor and a control device (42). The control device (42) controls the motor output power such that the motor output ... | 08/15/2006 |
| 7074026 | Multi-stage helical screw rotor A vacuum pump includes an inlet port (14) and an exhaust port (86, 88). Gas from an enclosure connected to the inlet port is pumped to the exhaust port by first and second rotors (18, 52, 254) which are mounted on first and second shafts (30,... | 07/11/2006 |
| 7056108 | Cooled screw-type vacuum pump A screw-type vacuum pump (1) includes a pump housing (2, 6) with rotors (3, 4). A liquid cooling system cools the rotors and a drive motor (9). In order to improve the cooling of said pump, an external air-flow impelled cooling system is ... | 06/06/2006 |
| 7011491 | Friction vacuum pump A friction vacuum pump (1) comprises a fixed element (7) bearing rows of stator blades (3) and a rotating element (6) bearing rows of rotor blades (2). The rows of stator blades and rotor blades are arranged concentrically with res... | 03/14/2006 |
| 6999840 | Vacuum pump A vacuum pump (10) includes a control device (20) for processing operational data and operational instructions. Further, the vacuum pump (10) includes a touch screen (40) serving as display for displaying the operational data callable fro... | 02/14/2006 |
| 6964559 | Two shaft vacuum pump with cantilevered rotors A vacuum pump (1) comprising a pump chamber casing (5) accommodating two co-operating rotors (2, 3) which are respectively arranged on a shaft (8, 9). A bearing/gear chamber (6) is disposed adjacent to the pump chamber casing (5... | 11/15/2005 |
| 6955076 | Foil leak detection chamber The invention relates to a chamber for the detection of leaks on foils (1). Said chamber comprises two frames (2, 3) which are connected together in an articulated manner, foils (4, 5) which are mounted on said frames, a test chamber (8) ... | 10/18/2005 |
| 6948921 | Vacuum pump comprising an outlet A vacuum pump (1, 30) has an inlet (5) and an outlet (6). Plug-in screw fittings (9) are connected with the inlet and the outlet. The plug-in screw fittings include a bore with an internal bevel (22) that receives a flexible connec... | 09/27/2005 |
| 6914361 | Magnetic bearing The invention relates to a magnetic bearing having a fixed first bearing portion and a movable second bearing portion which is contactlessly supported on the first bearing portion. The first bearing portion (12) comprises a magnetic coil (42) generatin... | 07/05/2005 |
| 6910861 | Turbomolecular vacuum pump with the rotor and stator vanes A turbomolecular vacuum pump (1) has an inlet (3) and an outlet (4) and rotor and stator vanes (5 and 6), situated between the inlet and outlet. The rotor vanes (6) have front sides (11) and rear sides (12) in ... | 06/28/2005 |
| 6905306 | Mechanical kinetic vacuum pump with rotor and shaft A mechanical kinetic vacuum pump with a stator (1), a rotor (6, 7) made from an aluminum or magnesium alloy and a rotor (6, 7) and a bearing shaft (3). The shaft (3) and the rotor (6, 7) are connected by a shrink- or screw-f... | 06/14/2005 |
| 6890146 | Compound friction vacuum pump A friction vacuum pump (1) has at least one turbomolecular pump stage (6, 7) with a molecular pump stage (12, 13, 15) that is subsequently connected on the pressure side (3), and with a transition stage (23) mounted between the tur... | 05/10/2005 |
| 6877963 | Vacuum pump A rotor (12) is mounted in a stator (14) with radial magnetic bearings (16, 19) and with an axial magnetic bearing (40) in a contactless manner. The axial magnetic bearing (40) produces an axial magnetic field with a magnet coil ( | 04/12/2005 |
| 6867521 | Vacuum conduit A vacuum line (10) comprising a vacuum-tight flexible tube section (22) and a vibration damper (16) axially parallel to the flexible tube section (22) serves to connect tow vacuum devices (12, 14). The vibration damper (16) ... | 03/15/2005 |
| 6863511 | Two-shaft vacuum pump A vacuum pump has two shafts (3, 4) and two rotors (1, 2) which co-operate with each other and which are fixed to the shafts. The rotors are cantilevered on the shafts. The rotors are fixed to the shafts in a manner which is devoid of backlash, even du... | 03/08/2005 |
| 6814550 | Vacuum pump with vibration absorber A vacuum pump (1) includes a housing (2) in which a suction inlet opening (5) is defined. A vibration absorber (7) includes a suspension body (8) and an absorber jacket (9). The housing (2) of the vacuum pump (1 | 11/09/2004 |
| 6776588 | Dry compressing vacuum pump having a gas ballast device A dry compressing vacuum pump (1) has a continuous or graduated inner compression. A gas ballast device (8) selectively adds a ballast gas to a pumped gas. The gas ballast device has an isolating valve (11), a non-return valve (12) which ... | 08/17/2004 |
| 6758660 | Screw vacuum pump with a coolant circuit A screw vacuum pump (1) has shafts (7, 8) and rotors (3, 4) secured to the shafts. Each rotor has a central hollow chamber (31) which receives the shaft or contains in built-in components rotating along with the rotor to define a relative... | 07/06/2004 |
| 6736614 | Rotary piston drive mechanism A reciprocating piston drive mechanism, especially for a reciprocating piston vacuum pump, includes a cylinder (3) embodied in a housing (12). A piston (4) is moved back and forth in the cylinder by an electromagnetic drive that has an electroma... | 05/18/2004 |
| 6709236 | High-speed turbo pump A ball bearing (18) that carries a rotor side portion of a rotor shaft (16) includes an inner race (23), an outer race (24), and a plurality of balls (25). The inner race has an enlarged end face (S1) which supports a suppor... | 03/23/2004 |
| 6705844 | Dynamic seal A seal is disposed between a rotating part and a stationary part. At least one of the parts is provided with projections which protrude into the seal gap. The seal gap (5) extends approximately radially so that both parts are provided with projections which e... | 03/16/2004 |
| 6702544 | Friction vacuum pump for use in a system for regulating pressure and pressure regulating system comprising a friction vacuum pump of this type A friction vacuum pump for use in a system for regulating the pressure in a vacuum chamber includes a multistage turbomolecular vacuum pump section (6) whose stages each consist of a row of stator vanes and rotor vanes (14 or 13). The pump regulates the p... | 03/09/2004 |
| 6682324 | Radial turbo-blower The radial turbo-blower comprises a stator (35) that is housed in a stator housing (10) and a rotor (13) that rotates within a pump housing (11). The rotor (13) comprises a cavity (23) with a bearing arrangement (26) that is received by a protruding beari... | 01/27/2004 |
| 6641376 | Friction vacuum pump A molecular vacuum pump (1) has a stator unit (9) and a rotor unit (8) disposed within a housing (2). A narrow gap is maintained during operation between the stator unit (9) and the rotor unit (8). The stator unit (9) and the rotor unit (8) are coupled to... | 11/04/2003 |
| 6619911 | Friction vacuum pump with a stator and a rotor A molecular vacuum pump (1) includes a stator unit (9) which has a stator blade package including one or more rows of stator blades (42), and a rotor unit (8) which has rotor blade package including one or more rows of rotor blades (41). The rotor blades ... | 09/16/2003 |
| 6599084 | Rotor fixture for a friction vacuum pump A friction pump (1), such as turbomolecular pump, includes a steel housing (2) in which a steel shaft (15) is supported by a bearing (16). A rotor (4) with a central bore (21) is mounted on the shaft. In order to reduce the risk of the joint area between ... | 07/29/2003 |
| 6591851 | Seal-gas valve device During the pumping of corrosive gases, it is advantageous to admit a seal gas to endangered pumping chambers at a lower flow rate and a higher pressure than the corrosive gases. Inert gas from a supply (3) has its pressure reduced by a pressure reducer (6... | 07/15/2003 |
| 6544020 | Cooled screw vacuum pump A cooled screw vacuum pump has a housing (4) two rotating systems (5, 6) consisting each of a screw rotor (5) and a shaft (6), a floating device supporting the rotors having, on each shaft, two mutually spaced bearings (7, 8) and an empty space (31) arran... | 04/08/2003 |
| 6382930 | Screw vacuum pump provided with rotors A screw vacuum pump (1) has rotors (5), bearings (7, 8), a casing (4), a suction side (15), and a delivery side (24). Each of the rotors includes at least two rotor sections, a suction side rotor section (17) and a delivery side rotor section (18). The tw... | 05/07/2002 |
| 6277177 | Gas passage with selectively acting penetration surface and process for producing the penetration surface A gas passage (1) with a selectively acting penetration surface consisting of quartz, quartz glass, Pyrex glass or the like; in order to provide penetration surfaces which are relatively thin on the one hand but will withstand relatively great pressure di... | 08/21/2001 |
| 6263677 | Multistage low-temperature refrigeration machine The invention relates to a multistage low-temperature refrigeration machine with a first stage in the form of a displacer refrigerator (1) as well as at least one further stage in the form of a pulse tube refrigerator (25); in order to suppress vibrations... | 07/24/2001 |
| 6168374 | Friction vacuum pump The present invention relates to a friction vacuum pump having at least one turbomolecular pump stage (2) joined at its pressure side to a screw pump stage (4). In order to improve the pump properties it is proposed that a filling stage (3) be arranged be... | 01/02/2001 |
| 6149414 | Oil-sealed vane-type rotary vacuum pump with an oil pump The invention concerns an oil-sealed vane-type rotary vacuum pump (1) with a rotor (3) and an oil pump (45, 46) whose suction chamber is fitted with feeds (64, 65) for gas and oil. In order to simplify the supply of a gas/oil mixture to the vacuum pump, t... | 11/21/2000 |
| 6149382 | Vacuum pump with shaft bearing A vacuum pump has a shaft bearing (6) supported in a bearing outer ring (8). In order to improve the damping properties a substantially cylindrical radial supporting ring (7) is provided between the outer ring (8) and an interior surface of a bore (9) in ... | 11/21/2000 |
| 6123516 | Vacuum pump A vacuum pump, comprising at least one pump chamber (7, 8, 23 to 26) and at least one chamber (3, 5, 27) adjoining the pump chamber. The vacuum pump is fitted with a gas ballast device to avoid damage being caused in the adjoining chambers by the gases be... | 09/26/2000 |
| 6119507 | Method and apparatus for recovering helium after testing for leaks in a sample holder A helium supply unit (1) supplies helium from a high pressure storage (21) to fill a test chamber (6) which encloses a sample holder (5) to be examined for leaks by measuring device (2) including a mass spectrometer (3) and a control unit (4). The test ga... | 09/19/2000 |
