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Assignee: Leybold Vacuum GmbH


Location: Colonge, DE
No. of patents: 2

NumberTitleIssue Date
7153093Vacuum pump
A vacuum pump (10) comprises at least one rotor shaft (12) having a rotor section (14) with a rotor (16), a bearing section (18) with a bearing (20), and a shaft sealing system (22) that is axially situated between th...
12/26/2006
5944049Apparatus and method for regulating a pressure in a chamber
A pressure for a chamber is regulated by controlling either the exhaust pressure at the exhaust side of a first vacuum pump or the internal pressure at a compression stage of the first vacuum pump, where the first vacuum pump is directly communicating wit...
08/31/1999
 
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