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| Number | Title | Issue Date |
| 7044521 | Chuck and suction board for plates An apparatus for transferring a plate member such as a wafer by supporting the plate member with a plurality of support pins, and vacuum-sucking the plate member with a suction disk without allowing the suction disk to make contact with the plate member. Vacuum gene... | 05/16/2006 |
| 6318141 | Roller leveller A roller leveller has an upper roller assembly 1 made of a plurality of taper rollers 7 each having a small diameter end with a collar 14 and a large diameter end, with the large diameter ends being set on a same side, and a lower assembly 2 made of a plu... | 11/20/2001 |
