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| Number | Title | Issue Date |
| 7286234 | Copper foil inspection device copper foil inspection method defect inspection device and defeat inspection method A surface of copper foil wound onto a guide roller 26 is irradiated with light. Specular light from the copper foil surface is received by CCD cameras 14a, and scattered light from the copper foil surface is received by CCD cameras 14b... | 10/23/2007 |
| 6354724 | Line illuminating apparatus A line illuminating apparatus comprises a pair of irradiating units 12a, 12b of the same structure. The irradiating unit 12a. The light irradiating unit 12a includes a light source 14a, a first light guide 16a consisting of a large number of optical fiber... | 03/12/2002 |
| 5249142 | Indirect temperature-measurement of films formed on semiconductor wafers A method of measuring the temperature of a matter accurately, in non-contact fashion and without setting any emissivity comprising obtaining a spectral characteristics of absorbing electromagnetic waves inherent to a matter whose temperature is to be meas... | 09/28/1993 |
| 4286294 | Recording/reproducing system In the case that an analog signal is recorded or reproduced by using a sensor and recording medium relatively moving against the sensor, a sampling signal is generated which is adapted to have a frequency thereof deviated dependently upon an amount of wow... | 08/25/1981 |
