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| Number | Title | Issue Date |
| 7005117 | Method for removing harmful components in an exhaust gas A method of removing harmful components of a perfluorocarbon gas or a perfluorocompound including the step of mixing at least one of a hydrocarbon gas and NH3 gas with an exhaust gas containing a perfluorocarbon or a perfluorocompound discharged from manu... | 02/28/2006 |
| 6482367 | Method and apparatus for removing harmful components in an exhaust gas Apparatus for removing harmful components of a perfluorocarbon gas or a perfluorocompound. The apparatus includes a first water scrubber for washing an exhaust gas containing a perfluorocarbon or a perfluorocompound discharged from a manufacturing equipme... | 11/19/2002 |
| 6126906 | Apparatus for removing harmful components in a semiconductor exhaust gas An apparatus for removing harmful components in a semiconductor exhaust gas includes: a first water scrubber for washing with water a gas to be processed; a gas decomposer tower disposed downstream of the first water scrubber; a second water scrubber disp... | 10/03/2000 |
| 5716428 | Method for removing harmful substances of exhaust gas discharged from semiconductor manufacturing process A method for removing harmful substances of an exhaust gas discharged from a semiconductor manufacturing process. The method includes the steps of: removing at least one of a water-soluble component, a hydrolyzable component and dust contained in the exha... | 02/10/1998 |
| 5649985 | Apparatus for removing harmful substances of exhaust gas discharged from semiconductor manufacturing process Apparatus for removing harmful substances of an exhaust gas discharged from a semiconductor manufacturing process are provided. The apparatus includes a mechanism for: removing at least one of a water-soluble component, a hydrolyzable component and dust c... | 07/22/1997 |
