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| Number | Title | Issue Date |
| 8178850 | Chromatic aberration corrector for charged-particle beam system and correction method therefor An aberration corrector has two stages of multipole elements each of which has a thickness along the optical axis. Each multipole element produces a static electric or magnetic field of 3-fold symmetry and a static electromagnetic field of 2- or 3-fold symmetry supe... | 05/15/2012 |
| 8168956 | Scanning transmission electron microscope and method of aberration correction therefor A scanning transmission electron microscope (STEM) and method of aberration correction have autocorrelation function calculation means, aberration coefficient calculation means, and feedback control. At least two images are obtained by varying a value at which one o... | 05/01/2012 |
| 8158940 | Magnetic domain imaging system A magnetic domain imaging system is offered which permits application of a strong magnetic field to a specimen. The imaging system includes a transmission electron microscope having an objective lens. The specimen that is magnetic in nature is placed in the upper po... | 04/17/2012 |
| 8148684 | Electron beam apparatus An electron beam apparatus has the electron optical column for releasing an electron beam from the front-end portion after the beam is emitted from an electron beam source located on a rear-end portion of the column, a specimen chamber connected to a front-end porti... | 04/03/2012 |
| 8119994 | Apparatus and method for inspecting sample Method and apparatus have a film including a first surface to hold the liquid sample thereon, a vacuum chamber for reducing the pressure of an ambient in contact with a second surface of the film, primary beam irradiation means connected with the vacuum chamber and ... | 02/21/2012 |
| 8101924 | Object-positioning device for charged-particle beam system An object-positioning device comprises a rod-like object holder inserted in the chamber of a charged-particle beam system for moving the object outside the chamber, a support for slideably supporting at least a part of the side surface of the object holder, thus mak... | 01/24/2012 |
| 8076642 | Electron beam apparatus and method of operating the same An electron beam apparatus is offered which can well detect backscattered electrons or both backscattered electrons and secondary electrons if an electron detector is disposed above an objective lens in the apparatus. The electron beam apparatus has an electron beam... | 12/13/2011 |
| 8049181 | Method of suppressing beam position drift, method of suppressing beam dimension drift, and charged particle beam lithography system A lithography method and system have means for determining a convergence value dc from a relation of beam current to beam position drift (or beam dimension drift) produced in the past; means for finding a beam current i(t) as a function of the convergence... | 11/01/2011 |
| 8030622 | Specimen holder, specimen inspection apparatus, and specimen inspection method A specimen holder is offered which can reduce the amount of chemical sprayed over a specimen consisting of cultured cells. The specimen holder has an open specimen-holding surface. At least a part of the specimen-holding surface is formed by a film and a tapering po... | 10/04/2011 |
| 8017918 | Charged-particle beam instrument A charged-particle beam instrument (such as a transmission electron microscope) which facilitates modifying the diameters of aperture stops installed above and below (on the beam entrance and exit sides) the specimen chamber and exchanging the aperture stops. The in... | 09/13/2011 |
| 7977630 | Electron microscope There is disclosed an electron microscope that achieves low-magnification imaging while the objective lens is kept at high excitation in the same way as during high-magnification imaging. An objective minilens located immediately behind the objective lens demagnifie... | 07/12/2011 |
| 7968843 | Method and apparatus for simultaneous SEM and optical examination Method and apparatus capable of observing a liquid sample. An optical image of the sample and an image using a primary beam, such as an electron beam or charged-particle beam, can be obtained at the same time. The apparatus has a film including a first surface on wh... | 06/28/2011 |
| 7928380 | Sample holder, method for observation and inspection, and apparatus for observation and inspection A sample holder used in SEM (scanning electron microscopy) or TEM (transmission electron microscopy) permitting observation and inspection at higher resolution. The holder has a frame-like member provided with an opening that is covered with a film. The film has a f... | 04/19/2011 |
| 7923700 | Sample inspection apparatus, sample inspection method and sample inspection system Sample inspection apparatus, sample inspection method, and sample inspection system are offered which can give a stimulus to a sample held on a film when the sample is inspected by irradiating it with a primary beam (e.g., an electron beam or other charged-particle ... | 04/12/2011 |
| 7923686 | Transmission electron microscope An apparatus which permits high-angle annular dark-field (HAADF) imaging comprises an electron gun, a specimen chamber in which a specimen is set, a gas cylinder for supplying environmental gas around the surface of the specimen through both a gas flow rate controll... | 04/12/2011 |
| 7910879 | Method and apparatus for time-of-flight mass spectrometry A method and apparatus for time-of-flight (TOF) mass spectrometry. The apparatus improves the ion focusing properties in an orthogonal direction and permits connection with an orthogonal-acceleration ion source for improvement of sensitivity. The apparatus comprises... | 03/22/2011 |
| 7906760 | Inspection method and reagent solution An electron microscope method for inspecting a liquid specimen and a reagent solution therefor. A culture medium and biological cells are put in the sample holder. A plugging agent is mixed into the liquid sample. The cells can be irradiated with a primary beam via ... | 03/15/2011 |
| 7872476 | NMR probe An NMR probe is offered which enables a 1H/19F compatibility mode having a sample coil, a hollow tubular body, and two rod electrodes disposed inside the tubular body substantially in a parallel relationship to each other. The tubular body is f... | 01/18/2011 |
| 7866278 | Thin-film deposition system A thin-film deposition system has a vacuum chamber and a plasma generator. The plasma generator includes a case, a cathode disposed in the case, an anode assembly disposed at an end of the case, a discharge power supply for applying a discharge voltage between the c... | 01/11/2011 |
| 7864922 | Wavelength-dispersive X-ray spectrometer An X-ray spectrometer which uses at least one curved analyzing crystal and which provides improved wavelength resolution of characteristic X-rays used for analysis and improved ratio of characteristic X-rays to background intensity by using only effective diffractiv... | 01/04/2011 |
| 7855359 | Mass spectrometer equipped with MALDI ion source and sample plate for MALDI ion source A mass spectrometer is equipped with a MAILDI ion source facilitating both individual management of sample plates and mass calibration based on information about distortion in the sample plates. Also, sample plates adapted to be used in the MALDI ion source are prov... | 12/21/2010 |
| 7851755 | Apparatus for detecting backscattered electrons in a beam apparatus A beam apparatus has a beam source producing a primary electron beam, an objective lens focusing the beam onto an observed sample, and at least one condenser lens mounted between the beam source and the objective lens. The condenser lens operates such that the beam ... | 12/14/2010 |
| 7836757 | Phase feedback AFM and control method therefor A phase feedback AFM (atomic force microscope) and method for the phase feedback AFM. A cantilever is driven to oscillate at a constant frequency close to the resonance frequency of the cantilever by a driving signal. The distance between the probe and the sample is... | 11/23/2010 |
| 7820978 | Charged-particle beam system A charged-particle beam system has a demagnifying lens for reducing the dimensions of an electron beam produced from an electron beam source, an objective lens for focusing the demagnified beam onto the surface of a target, a first deflector located before the demag... | 10/26/2010 |
| 7820362 | Method of pattern delineation A method of delineating a lithographic pattern on a material. A pattern to be delineated is divided according to first and second fields by first and second methods of division. Pattern segments contained in the first fields are divided in the X-direction, and data ... | 10/26/2010 |
| 7814775 | Apparatus for controlling Z-position of probe Apparatus of easily controlling the Z-position of the probe used in a microprobe analyzer. The apparatus has: (A) a holder, (B) a reference body having a reference surface that is at the same height as a surface of a sample, the reference body being placed on or in ... | 10/19/2010 |
| 7800077 | Specimen holder for electron microscope The present invention provides a specimen holder for use with an electron microscope. The specimen holder has a retainer mounted at the front end of the body of the specimen holder. The retainer has a plate member provided with a hole around its front end. The hole ... | 09/21/2010 |
| 7763862 | Method of aberration correction and electron beam system There is disclosed an electron beam system in which the third-order aberration S3 with two-fold symmetry is corrected. If a Cs corrector is operated, parasitic aberration S3 (third-order aberration S3 with two-fold symmetr... | 07/27/2010 |
| 7755060 | Multipole lens and method of fabricating same There is disclosed a multipole lens that can be machined with improved accuracy. A method of fabricating this lens is also disclosed. The multipole lens has a blank material from which polar elements will be fabricated. The blank material is sandwiched vertically be... | 07/13/2010 |
| 7755036 | Instrument and method for tandem time-of-flight mass spectrometry A novel instrument and method for TOF/TOF mass spectrometry is offered. A spiral trajectory time-of-flight mass spectrometer satisfies the spatial focusing conditions for the direction of flight and a direction orthogonal to the direction of flight whenever ions mak... | 07/13/2010 |
| 7748052 | Scanning probe microscope and method of operating the same A scanning probe microscope capable of preventing contact between the probe and a sample and a method of operating this microscope. The scanning probe microscope measures the topography of a surface of the sample by scanning the probe relative to the surface of the ... | 06/29/2010 |
| 7745802 | Specimen holder, specimen inspection apparatus, specimen inspection method, and method of fabricating specimen holder A specimen holder, a specimen inspection apparatus, and a specimen inspection method permitting a specimen consisting of cultured cells to be observed or inspected. Also, a method of fabricating the holder is offered. The holder has an open specimen-holding surface.... | 06/29/2010 |
| 7745785 | Sample inspection method, sample inspection apparatus, and sample holder A sample holder is offered which is used when a sample is inspected by irradiating the sample with a primary beam consisting of a charged-particle beam (such as an electron beam) via a film. Furthermore, method and apparatus for preventing destruction of the film du... | 06/29/2010 |
| 7744822 | Microchip reactor There is disclosed a microchip reactor capable of being used in research on reaction kinetics. With this microchip reactor, the time (reaction time) elapsed until a measurement is made since mixing of two liquids is variable. The microchip reactor comprises a base p... | 06/29/2010 |
| 7742565 | Method and apparatus for analysis using X-ray spectra A method for precisely measuring and displaying the whole profile of an X-ray spectral waveform, which rises from a background level and finally returns to the background level after passing across a peak. X-rays are counted for a time interval of to at a spectral p... | 06/22/2010 |
| 7723683 | Aberration correction system An aberration correction system for use in an electron microscope and which produces a negative spherical aberration and corrects a higher-order aberration. The aberration correction system has three stages of multipole elements which, respectively, produce fields o... | 05/25/2010 |
| 7722818 | Apparatus and method for preparing samples Apparatus and method capable of preparing samples adapted for observations by electron microscopy. Each sample is ion-etched. During this process, the sample stage is tilted reciprocably left and right about a tilting axis. The sample is ion-etched together with a s... | 05/25/2010 |
| 7714579 | NMR probe An NMR probe permits measurements to be made with its inner coil without replacing the probe. The NMR probe has three coils disposed to surround a sample tube. An inner coil can resonate with the HF and LF. An intermediate coil can resonate with the HF and LF, and p... | 05/11/2010 |
| 7712354 | Method and apparatus for controlling Z-position of probe Method and apparatus of easily controlling the Z-position of the probe used in a microprobe analyzer. The apparatus has: (A) a holder, (B) a reference body having a reference surface that is at the same height as a surface of a sample, the reference body being place... | 05/11/2010 |
| 7683320 | Transmission electron microscope In a transmission electron microscope, an electron beam flux of a cross section constricted conically over a reference specimen is made to hit the reference specimen. The flux includes electron beams hitting the specimen at incident angles which spread conically in ... | 03/23/2010 |
