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Assignee: Interactive Video Systems, Inc.


Location: Concord, MA
No. of patents: 1

NumberTitleIssue Date
4938600Method and apparatus for measuring registration between layers of a semiconductor wafer
Method and apparatus for measuring displacement between layers of a semiconductor wafer wherein systematic errors associated with the measurement system are eliminated. An optical system, including a microscope and a camera, records an image of registrati...
07/03/1990
 
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