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| Number | Title | Issue Date |
| 5814381 | Pellicle assembly having a vented frame A pellicle for isolating a photomask pattern from particulate contaminants. The pellicle includes a peripheral frame having at least one vent for the passage of a gaseous substance between the interior of the frame and the atmosphere outside of the frame.... | 09/29/1998 |
| 5741576 | Optical pellicle with controlled transmission peaks and anti-reflective coatings An optical pellicle and method of forming an optical pellicle. The pellicle includes a membrane and an anti-reflective coating covering at least one of the membrane surfaces. The membrane has a wavelength transmission pattern with consecutive first and se... | 04/21/1998 |
| 5529819 | Pellicle assembly with vent structure A pellicle for isolating a photomask pattern from particulate contaminants. The pellicle includes a peripheral frame having at least one vent structure for the passage of a gaseous substance between the interior of the frame and the atmosphere outside of ... | 06/25/1996 |
| 4697701 | Dust free storage container for a membrane assembly such as a pellicle and its method of use A dust free container is disclosed herein for storing an optical membrane assembly such as a pellicle after the assembly is manufactured but before the latter is placed into use. The optical membrane assembly is one which includes a circumferential frame ... | 10/06/1987 |
