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| Number | Title | Issue Date |
| 8012314 | Manufacturing method and apparatus of phase shift mask blank There is disclosed a manufacturing method of a phase shift mask blank in which dispersions of phase angle and transmittance among blanks can be reduced as much as possible and yield is satisfactory. In the manufacturing method of the phase shift mask blank, a proces... | 09/06/2011 |
| 7745842 | Graytone mask and method thereof A transmissivity controlled film 12 (CrO or the like), a transmissivity reduced film 13 (Cr or the like), and a resist film 14, for instance, are sequentially formed on, e.g., a transparent substrate 11. A resist is removed from an area (... | 06/29/2010 |
| 7690969 | Polishing method, polishing device, glass substrate for magnetic recording medium, and magnetic recording medium There are disclosed a polishing method and a polishing device in which cleaning of a glass substrate surface can be achieved to a high level. A glass substrate (MD substrate 1) in the shape of a circular disc having a circular hole in a center portion is poli... | 04/06/2010 |
| 7494401 | Polishing method, polishing device, glass substrate for magnetic recording medium, and magnetic recording medium There are disclosed a polishing method and a polishing device in which cleaning of a glass substrate surface can be achieved to a high level. A glass substrate (MD substrate 1) in the shape of a circular disc having a circular hole in a center portion is poli... | 02/24/2009 |
| 7465523 | Method for manufacturing transfer mask substrate, transfer mask substrate, and transfer mask To reduce a stress change generated in the production processes of a transfer mask to improve a position accuracy of a mask pattern. A production method of a transfer mask characterized by further including, in the production processes of the transfer mask, a... | 12/16/2008 |
| 7438630 | Polishing method, polishing device, glass substrate for magnetic recording medium, and magnetic recording medium There are disclosed a polishing method and a polishing device in which cleaning of a glass substrate surface can be achieved to a high level. A glass substrate (MD substrate 1) in the shape of a circular disc having a circular hole in a center portion is poli... | 10/21/2008 |
| 7420886 | Magnetic recording medium, and thermal stability measuring method and apparatus of magnetic recording medium There is disclosed a magnetic recording medium in which a seed layer, under layer, intermediate layer, first magnetic layer, nonmagnetic layer, second magnetic layer, protective layer, and lubricant layer are successively laminated on a glass substrate, the nonmagne... | 09/02/2008 |
| 7402228 | Manufacturing method and apparatus of phase shift mask blank There is disclosed a manufacturing method of a phase shift mask blank in which dispersions of phase angle and transmittance among blanks can be reduced as much as possible and yield is satisfactory. In the manufacturing method of the phase shift mask blank, a proces... | 07/22/2008 |
| 7384870 | Method for manufacturing glass substrate A method for providing a high quality glass substrate that if free of residual polishing particles. The method includes polishing the surface of the glass plate with a polishing agent containing cerium oxide particles, washing the glass plate with washing agent cont... | 06/10/2008 |
| 7355213 | Electrode material and semiconductor element As a p-type ohmic contact electrode formation technique in a Group II-VI compound semiconductor, there is provided a material for forming an electrode that is low in resistance, stable, and not toxic, and is excellent in productivity, thereby providing an excellent ... | 04/08/2008 |
| 7282121 | Manufacturing method and apparatus of phase shift mask blank There is disclosed a manufacturing method of a phase shift mask blank in which dispersions of phase angle and transmittance among blanks can be reduced as much as possible and yield is satisfactory. In the manufacturing method of the phase shift mask blank, a proces... | 10/16/2007 |
| 7261980 | X-ray mask blank and x-ray mask An x-ray mask blank and an x-ray mask wherein, assuming that Ramax and Ramin are defined as a maximum value of Ra and a minimum value of Ra of a surface roughness (Ra: center-line average roughness) on a plurality of points within a predetermin... | 08/28/2007 |
| 7261845 | Plastic lens and process for preparing the lens A plastic lens which absorbs ultraviolet light having wavelength of about 400 nm and suppresses coloring and a process for producing the lens. A plastic lens may be made from a composition which comprises (A) a lens material monomer comprising diethylene glycol bisa... | 08/28/2007 |
| 7220446 | Management technique of friction coefficient based on surface roughness, substrate for information recording medium, information recording medium and manufacture method thereof There are disclosed an information recording medium substrate having a surface roughness of Rmax 15 nm or less, and an information recording medium, particularly an information recording medium substrate and information recording medium in which for surfaces of the ... | 05/22/2007 |
| 7220500 | Magnetic recording medium, and thermal stability measuring method and apparatus of magnetic recording medium There is disclosed a magnetic recording medium in which a seed layer, under layer, intermediate layer, first magnetic layer, nonmagnetic layer, second magnetic layer, protective layer, and lubricant layer are successively laminated on a glass substrate, the nonmagne... | 05/22/2007 |
| 7155767 | Scrub cleaning device, scrub cleaning method, and manufacturing method of information recording medium There is disclosed a scrub cleaning device which can reduce cleaning time and which requires no large-scaled device for transferring a substrate to the next cleaning process. The scrub cleaning device comprises: a scrub pad 10 provided with two annular plate ... | 01/02/2007 |
| 7070481 | Polishing method, polishing device, glass substrate for magnetic recording medium, and magnetic recording medium There are disclosed a polishing method and a polishing device in which cleaning of a glass substrate surface can be achieved to a high level. A glass substrate (MD substrate 1) in the shape of a circular disc having a circular hole in a center portion is poli... | 07/04/2006 |
| 6861659 | Method of inspecting ununiformity of transparent material, apparatus therefor, and method of selecting transparent substrate A laser beam L from a laser 2 is introduced from an introducing surface into a transparent substrate 1 by using mirrors 31 and 32. The laser beam introduced through the transparent substrate 1 repeats a total reflection on the surf... | 03/01/2005 |
| 6855467 | Transfer mask, method of dividing pattern or transfer mask, and method of manufacturing transfer mask A pattern of a transfer mask to transfer, by the use of energy beams, a transfer pattern to a substrate is disclosed, the transfer mask made by forming an aperture pattern in a thin film portion supported by a supporting frame portion. When the transfer pattern incl... | 02/15/2005 |
| 6852003 | Method of manufacturing glass substrate for data recording medium A glass substrate for a data recording medium is manufactured by using a tabular carrier with circular holes formed therein, housing disk-shaped glass workpieces in the circular holes of this carrier, sliding polishing pads over the surface of the carrier and the pr... | 02/08/2005 |
| 6783634 | Manufacturing method and apparatus of phase shift mask blank There is disclosed a manufacturing method of a phase shift mask blank in which dispersions of phase angle and transmittance among blanks can be reduced as much as possible and yield is satisfactory. In the manufacturing method of the phase shift mask blank, a proces... | 08/31/2004 |
| 6762000 | Phase shift mask blank, photo mask blank and manufacturing apparatus and method of blanks There is provided a manufacturing apparatus and method able to manufacture a phase shift mask blank in which a total number of particles and pinholes having a diameter larger than about a half of an exposure wavelength in a light semi-transmission film is 0.1 or les... | 07/13/2004 |
| 6706427 | Management technique of friction coefficient based on surface roughness, substrate for information recording medium, information recording medium and manufacture method thereof There are disclosed an information recording medium substrate having a surface roughness of Rmax 15 nm or less, and an information recording medium, particularly an information recording medium substrate and information recording medium in which for surfaces of the ... | 03/16/2004 |
| 6534120 | Chemically reinforced glass manufacture method, information recording medium glass substrate manufacture method, information recording medium manufacture method, and chemical reinforcement device In order to prevent particles generated in the preparation of a chemically reinforcing molten salt from getting into an operation atmosphere for performing a chemical reinforcement, a chemical reinforcement tank 2 and a dissolution tank 10 for preparing t... | 03/18/2003 |
| 6517201 | Method and apparatus for indicating spectacle lens performance A method and an apparatus for evaluating and indicating the image forming performance of a spectacle lens. A performance index indicating the performance of the spectacle lens to all object points within a visual field when the outside world is observed t... | 02/11/2003 |
| 6492599 | Multilayer wiring board, manufacturing method thereof, and wafer block contact board In a multilayer wiring board comprising: an insulating board (for example, a glass board 1); and a wiring layer (for example, wiring patterns 2a, 5a and 8a) superimposed on the insulating board through an insulating film (for example, insulating films 3 a... | 12/10/2002 |
| 6475456 | Silicon carbide film and method for manufacturing the same There is disclosed a method for manufacturing a silicon carbide film in which a crystal orientation is continued on a single crystal substrate surface and silicon carbide is allowed to epitaxially grow, the method comprising the steps of: entirely or part... | 11/05/2002 |
| 6475681 | Phase shift mask and phase shift mask blank A half tone type phase shift mask as well as a phase shift mask blank for the mask is formed with a thin film light translucent portion made of essentially, nitrogen, metal, and silicon. The containing rate of each element and ratio in the thin film is sp... | 11/05/2002 |
| 6434976 | Method for manufacturing glass product A manufacturing method for a glass product not having a rotatively symmetric body like an optical fiber fixing member but having a fine structure as of optical fiber engagement portions, to transfer the fine structure with a high precision without creatin... | 08/20/2002 |
| 6416578 | Silicon carbide film and method for manufacturing the same There is disclosed a method for manufacturing a silicon carbide film in which a crystal orientation continued on a single crystal substrate surface and silicon carbide is allowed to epitaxially grow, the method comprising the steps of: entirely or partial... | 07/09/2002 |
| 6412677 | Cutting method for plate glass mother material There is disclosed a method of cutting a plate glass mother material in which a plurality of grooves are scribed/processed beforehand on one main surface, and appropriate pressing is constantly performed, so that more preferable materials to be pressed ca... | 07/02/2002 |
| 6402004 | Cutting method for plate glass mother material The present invention is directed to a method of cutting glass mother material involving preparing the plate glass mother material in which a plurality of grooves are scribed, disposing the plate glass mother material with the grooves turned inward; and p... | 06/11/2002 |
| 6395434 | Phase shift mask and phase shift mask blank There is disclosed a halftone phase shift mask blank, in which, for example, a semitransparent film (halftone phase shifter film) 2 contains silicon, palladium, and at least one selected from nitrogen, oxygen and hydrogen, and silicon and palladium contai... | 05/28/2002 |
| 6387574 | Substrate for transfer mask and method for manufacturing transfer mask by use of substrate A substrate for transfer masks and a method of manufacture for transfer masks are provided with which short manufacturing time, and shorter TAT can be realized. Alignment marks 5, a rear surface concavity 6, a dry etching stopper layer, and a slit 7 for c... | 05/14/2002 |
| 6370915 | Method for supplying glass molding material to molds, and method for manufacturing glass optical elements A method for supplying a glass molding material by dropping it from a higher level onto a molding surface of a lower mold of a mold constituted of an upper mold and the lower mold, in which a guide means is used for dropping the glass molding material and... | 04/16/2002 |
| 6366640 | X-ray mask blank, X-ray mask and method for manufacturing the same There is disclosed an X-ray mask comprising, on a support substrate 11a, an X-ray transmission film 12 for transmitting X-rays and an X-ray absorber pattern 13a formed on the X-ray transmission film 12 for absorbing the X-rays. The X-ray absorber pattern ... | 04/02/2002 |
| 6294490 | Crystallized glass for information recording medium, crystallized glass substrate, and information recording medium using the crystallized glass substrate Enclosed are crystallized glasses suitable for a substrate for an information recording medium such as a magnetic disc, optical disc, or optomagnetic disc, a substrate for information recording medium using such a crystallized glass substrate, and an info... | 09/25/2001 |
| 6280294 | Polishing method, polishing device, glass substrate for magnetic recording medium, and magnetic recording medium There are disclosed a polishing method and a polishing device in which cleaning of a glass substrate surface can be achieved to a high level. A glass substrate (MD substrate 1) in the shape of a circular disc having a circular hole in a center portion is ... | 08/28/2001 |
| 6231243 | Preform and process for the production thereof A preform used for producing an optical fiber fixing member having an optical fiber fixing part and a lower-staged part by a mold shaping method, is formed so as to be composed of a large-thickness portion having an upper surface or a peak portion to whic... | 05/15/2001 |
| 6156684 | Light polarization control element using stress-optical coefficient glass and method of producing the stress-optical coefficient glass In a light polarization control element using a stress-optical coefficient glass, the stress-optical coefficient glass is substantially composed of a phosphorous acid glass containing 20 to 60 percent by weight of P2 O5 and 40 to 73 ... | 12/05/2000 |
