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Assignee: Hitachi Kokusai Electric, Inc.


Location: Tokyo, JP
No. of patents: 46

1    
NumberTitleIssue Date
8168549Method of manufacturing semiconductor device and substrate processing apparatus
There are provided a method of manufacturing a semiconductor device and a substrate processing apparatus by which the quality of a silicon nitride film can be improved. The method comprises: (a) supplying a silicon-containing gas into a process chamber accommodating...
05/01/2012
8112183Substrate processing apparatus and substrate processing method
A substrate processing apparatus detects malfunction of mechanisms in MFC. An inert gas supply line, a first shut-off valve shutting off the inert gas supply, a process gas supply line, and a second shut-off valve shutting off the process gas supply are installed up...
02/07/2012
8094642Polling method and vehicle search method in digital radio communication system
The present invention provides a polling method in a radio digital communication system making it possible to shorten time required for polling without causing increase in an error rate and to efficiently manage and administrate communications. In a digital radio co...
01/10/2012
8093159Manufacturing method of semiconductor device, and semiconductor device
Provided is a manufacturing method of a semiconductor device, which is capable of realizing fine-pitch patterns and thus improving stabilization of patterning precision. The manufacturing method of the semiconductor device comprises forming a first photoresist patte...
01/10/2012
8093158Semiconductor device manufacturing method and substrate processing apparatus
Provided are a semiconductor device manufacturing method and a substrate processing apparatus. The method comprise: a first process of forming a film containing a predetermined element on a substrate by supplying a source gas containing the predetermined element to ...
01/10/2012
8084369Producing method of semiconductor device and substrate processing apparatus
Disclosed is a producing method of a semiconductor device produced by transferring a plurality of substrates into a processing chamber, supplying oxygen-containing gas and hydrogen-containing gas into the processing chamber to process the plurality of substrates by ...
12/27/2011
8076615Substrate processing apparatus and method of manufacturing semiconductor device
A substrate processing apparatus comprises: an outer tube; a manifold connected to the outer tube and made of a non-metal material; an inner tube disposed in the manifold at a more inner side than the outer tube and configured to process a substrate therein; a heati...
12/13/2011
8076251Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus
Provided is a method of manufacturing a semiconductor device. The method includes: loading a substrate into a process vessel; performing a process to form an oxide, nitride, or oxynitride film on the substrate by alternately repeating: (a) forming a layer containing...
12/13/2011
8070880Substrate processing apparatus
Provided is a substrate processing apparatus. The substrate processing apparatus includes a reaction tube, a substrate holder, a gas nozzle, a heating unit, a temperature detector, and an exhaust unit. The reaction tube accommodates and processes substrates. The sub...
12/06/2011
8030599Substrate processing apparatus, heating device, and semiconductor device manufacturing method
Provided are a substrate processing apparatus, a heating device, and a semiconductor device manufacturing method. The substrate processing apparatus comprises a process chamber configured to process a substrate. A heating element is installed at a peripheral side of...
10/04/2011
8025739Method of manufacturing semiconductor device
In a dry cleaning process, breakage of a gas supply pipe can be prevented, and maintenance efficiency can be increased. There is provided a method of manufacturing a semiconductor device, comprising: (a) loading a substrate into a process chamber; (b) forming a sili...
09/27/2011
8012259Substrate processing apparatus
A substrate processing apparatus having a support for holding a wafer, a processing chamber for accommodating the wafer, a gas supply hole for supplying desired processing gas in a parallel direction to the surface to be processed of the wafer to be accommodated in ...
09/06/2011
8003547Method of manufacturing semiconductor device
A substrate processing apparatus, a method of manufacturing a semiconductor device, and a method of confirming an operation of a liquid flowrate control device are provided. The substrate processing apparatus comprises: a process chamber accommodating a substrate; a...
08/23/2011
8002947Plasma treatment system and cleaning method of the same
A plasma treatment apparatus has a reaction vessel (11) provided with a top electrode (13) and a bottom electrode (14), and the first electrode is supplied with a VHF band high frequency power from a VHF band high frequency power source (32
08/23/2011
7999640RF module
In a radio-frequency wave module including a transmission path based on a distributed parameter element, the transmission path being part of an input/output terminal, a plurality of cavity-structured concave portions for containing semiconductor-including mounted co...
08/16/2011
7983326Digital transmission system and its transmission status recognition method
A digital transmission system of a type in which a digitally-modulated transmission signal is mapped to two-dimensional data and transmitted from at least one relay point, and at a reception side, the two-dimensional data is identified and reproduced into the transm...
07/19/2011
7974581Transmitter
A transmitter suppresses a peak level of a multi-carrier signal produced by synthesizing a plurality of carrier signals. Specifically, a peak level suppression signal for a multi-carrier signal is generated. The generated peak level suppression signal is adjusted in...
07/05/2011
7972979Substrate processing method and substrate processing apparatus
Provided is a substrate processing method comprising: loading a substrate, on which polysilazane is applied, into a substrate process chamber; maintaining an inside of the substrate process chamber, into which the substrate is loaded, in water vapor atmosphere and d...
07/05/2011
7970055Method and apparatus for compressing image data
There is provided an image data compression apparatus capable of effectively suppressing an image data volume after compression processing. A bit rate value is detected according to the image data volume after the compression processing. According to the bit rate si...
06/28/2011
7891975Heat treatment apparatus and method of manufacturing substrate
Heat treatment apparatus and a method of manufacturing a substrate are provided, in which drop of particles produced by a rubbing action between a support strip and a support member can be prevented. Heat treatment apparatus 10 has a reactor 40 for tre...
02/22/2011
7884034Method of manufacturing semiconductor device and substrate processing apparatus
A silicon nitride film including stoichiometrically excessive silicon with respect to nitrogen is formed. The silicon nitride film may be formed by supplying dichlorosilane to a substrate under a condition where CVD (chemical vapor deposition) reaction is caused to ...
02/08/2011
7883581Substrate processing apparatus and method of manufacturing semiconductor device
Provided are a substrate processing apparatus and a method of manufacturing a semiconductor device. The substrate processing apparatus includes a reaction vessel configured to process a substrate, a heater configured to heat an inside of the reaction vessel, a gas s...
02/08/2011
7848405Communication system
Forward and backward equalization processes are effectively used in a communication system for equalizing a received signal of a frame including a known symbol part. The known symbol part is provided in a position other than both ends of the frame. An equalization f...
12/07/2010
7865166Software radio transceiver
Security performance is improved by a software radio transceiver which can exchange software which is used for demodulation. A radio communication unit receives a radio signal. A conversion unit converts the radio signal received by the radio communication unit into...
01/04/2011
7851379Substrate processing method and substrate processing apparatus
There are provided a substrate processing method and apparatus adapted to prevent deterioration of film thickness uniformity while maintaining the film forming rate. The substrate processing method comprises: (a) accommodating a plurality of substrates in a process ...
12/14/2010
7831130Circulating recording apparatus, recording method and recording medium storing program of the recording method
A recording apparatus employs a circulating recording scheme for overwriting the oldest recorded data in a recording area having a limited storage capacity with the latest recorded data. The recording apparatus includes a memory device and a data recovery unit. The ...
11/09/2010
7808396Substrate processing apparatus
It is intended to provide a substrate processing apparatus capable of reliably informing a running state of the apparatus. The substrate processing apparatus 100 having a signal indicator for indicating the running state, including a signal indicator 306
10/05/2010
7795157Substrate treatment device and manufacturing method of semiconductor device
An object of the invention is to provide a substrate treatment device that can lengthen the maintenance cycle, and prevent any by-product from falling on substrates even if it is accumulated, and a manufacturing method of such a substrate treatment device, and an em...
09/14/2010
7755687Imaging device and method of compensating sensitivity of the imaging device
In an image pickup device and its sensitivity compensation method, the image pickup device includes an electron multiplying image pickup device for converting an image into an electrical signal, a temperature detection unit for detecting temperature of the electron ...
07/13/2010
7751693Method and apparatus for recording/reproducing image information on/from removable medium
In an image recording/reproduction method for recording image information on a recording medium by using a computer, a verify mode is set into the OFF state when recording image information on said recording medium. In addition, use as a write or read region a speci...
07/06/2010
D618638Reaction tube
06/29/2010
7724695Radio communication system
A radio communication system includes a line controller, a plurality of base stations connected to the line controller and a plurality of mobile stations connected to each of the plurality of base stations by radio communication line having control channel and commu...
05/25/2010
7715468QoS control method for transmission data for radio transmitter and radio receiver using the method
A radio transmitter/receiver having a QoS control unit for outputting the transmission data in order taking the quality of service (QoS) into consideration. In the case where the information transmission rate for a radio section is not lower than a threshold value, ...
05/11/2010
7697816Circulating memory apparatus and image storage distribution system
A circulating memory apparatus and a data storage and distribution system using a circulating recording area effectively and having an improved access efficiency to the circulating recording area are disclosed. A memory area secured in a disk unit is used in circula...
04/13/2010
7696761Spectrum analyzing method, distortion detector and distortion compensation amplifying device
The invention provides a spectrum analyzing method, a distortion detector and a distortion compensation amplifying device for performing time/frequency conversion processing at high speed, and reducing a convergent time of a compensation coefficient. The distortion ...
04/13/2010
7668314System and method for communicating encrypted data
An encrypted data communication system for communicating an encrypted stream as an encrypted data stream from a device at transmitting end to a device at receiving end to suppress the effect of an erroneous detection of a dummy code is disclosed. A device at transmi...
02/23/2010
7667748Method and apparatus of defective pixel correction for a solid-state imaging device
A defective pixel correction method and a defective pixel correction apparatus usable with an imaging device of the one-chip type including one color CCD. A video signal level of a pixel under consideration of a solid-state imaging device in which pixels respectivel...
02/23/2010
D610559Reaction tube
02/23/2010
7636439Encryption method, encryption apparatus, data storage distribution apparatus and data delivery system
Data to be encrypted is effectively encrypted by a data delivery system for encrypting the data to be encrypted with a transmitting apparatus and decrypting a cipher thereof with a receiving apparatus. In a configuration for encrypting and decrypting the data to be ...
12/22/2009
7626455Distortion compensation apparatus
A distortion compensation apparatus includes distortion generating means for generating distortions to compensate for a distortion generated in an amplifier 2. The distortion generating means includes a nonlinear circuit 13 having an input/output expan...
12/01/2009
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