Did You Know...
...that the x-ray was discovered purely by accident? When German physicist Wilhelm Konrad von Roentgen was experimenting with cathode rays in 1895, he put an activated Crookes tube in a book and went out to lunch. When he returned, he discovered that a key that had also been placed in the book showed up as an image on the developed film!
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| Number | Title | Issue Date |
| 8178445 | Substrate processing apparatus and manufacturing method of semiconductor device using plasma generation A manufacturing method for a semiconductor device, that loads a substrate on which a film containing oxygen atoms, chlorine atoms, and metal atoms is formed into a processing chamber so as to be supported by a substrate support part. The substrate is heated by the s... | 05/15/2012 |
| 8178428 | Manufacturing method of semiconductor device and substrate processing apparatus A manufacturing method of a semiconductor device is provided, comprising: loading a substrate into a processing chamber; forming a first film on the substrate by supplying silicon atom-containing gas, boron atom-containing gas, and germanium atom-containing gas into... | 05/15/2012 |
| 8176871 | Substrate processing apparatus Disclosed is a substrate processing apparatus, including: a processing space to provide a space in which a substrate is to be processed; a heating member to heat the processing space; a gas supply member to supply at least first and second processing gases to the pr... | 05/15/2012 |
| 8173214 | Substrate processing method A substrate processing method for use in a substrate processing apparatus having a stocker therein which stores a multiplicity of dummy substrates; a reaction chamber for producing semiconductor products; and a transferring unit for transferring into the reaction ch... | 05/08/2012 |
| 8172950 | Substrate processing apparatus and semiconductor device producing method Disclosed is a substrate processing apparatus, including: a chamber, made of a metal, to form a processing space for processing a substrate; at least one rod-like heating body to heat the substrate; and a tube body, made of a material different from that of the cham... | 05/08/2012 |
| 8172947 | Substrate processing apparatus and attaching/detaching method of reaction vessel To provide a substrate processing apparatus, comprising: a reaction vessel having a processing chamber inside that processes a substrate; a heating device that heats said substrate from an outer peripheral side of the reaction vessel; a lid member that closes the pr... | 05/08/2012 |
| 8172946 | Semiconductor device manufacturing apparatus and manufacturing method of semiconductor device Stagnation of gas used for substrate processing in an exhaust trap is prevented, and localized precipitation of components in the gas used for substrate processing is reduced. The proposed apparatus includes a substrate processing chamber (cylindrical space 250 | 05/08/2012 |
| 8158911 | Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and extending member A heating apparatus comprises heating elements arranged of a sheet form and having notches or through holes provided therein, a side wall member made of an electrically conductive material and arranged to surround and define the heating space, and holding members di... | 04/17/2012 |
| 8148271 | Substrate processing apparatus, coolant gas supply nozzle and semiconductor device manufacturing method A substrate processing apparatus comprises a processing chamber for storing a boat supporting multiple substrates and for processing the multiple substrates, a heater unit installed around the processing chamber for heating the substrates, and a coolant gas supply n... | 04/03/2012 |
| 8144929 | Human pursuit system, human pursuit apparatus and human pursuit program A human pursuit system includes a plurality of cameras, shooting directions of which are directed toward a floor, are installed on a ceiling, a parallax of an object reflected in an overlapping image domain is calculated on the basis of at least a portion of the ove... | 03/27/2012 |
| 8135336 | Repeater and follow-up notification method after broadcast communication thereof A repeater including a first wireless unit that performs transmission and reception using a frequency for communicating with a base station and a second wireless unit that performs transmission and reception using a frequency for communicating with a mobile station ... | 03/13/2012 |
| 8135089 | Digital transmission apparatus A digital transmission apparatus having a base unit constructed in such a manner that n-bit digital signals transmitted from a plurality of (N) remote units are extended into (n+log2N) bits in corresponding bit extending units, with respect to an addition... | 03/13/2012 |
| 8134614 | Image processing apparatus for detecting an image using object recognition In an image processing apparatus, minimum width and height and maximum width and height of an object to be detected are calculated on the basis of photographing conditions, an object detection range and a size of the object to be detected and an image reduction coef... | 03/13/2012 |
| 8133820 | Substrate processing method and substrate processing apparatus Substrate contamination from tungsten is prevented. A substrate processing method comprises a main treatment process for oxidizing a substrate containing tungsten with a gas containing oxygen, and a cleaning process for removing tungsten oxides with a gas containing... | 03/13/2012 |
| D655682 | Boat of wafer processing apparatus | 03/13/2012 |
| 8130690 | Communication system and gateway There is provided a communication system in which semi-duplex many-to-many multicasting service can be performed to both a mobile station and a base station by using a unified call control protocol such as SIP on an IP network, and can contain mobile stations and ba... | 03/06/2012 |
| 8128333 | Substrate processing apparatus and manufacturing method for semiconductor devices A substrate processing apparatus comprises a storage container for storing multiple substrates and whose substrate loading and unloading opening is shut by a lid, a loading and unloading port for carrying the storage container into and out of the case, a placement u... | 03/06/2012 |
| D655255 | Boat of wafer processing apparatus | 03/06/2012 |
| 8126511 | Radio communications system for detecting and monitoring an event of a disaster A radio communications system that shows the full effect for responding to the event of a disaster is provided. In a terminal station device, an imaging means captures an image; a composition information management means manages information about a composition for i... | 02/28/2012 |
| 8123858 | Manufacturing method of semiconductor device and substrate processing apparatus To provide a manufacturing method of a semiconductor device, comprising: loading a substrate, with a silicon surface exposed at a part of the substrate, into a processing chamber; heating an inside of said processing chamber; performing pre-processing of supplying a... | 02/28/2012 |
| 8116618 | Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devices A heating apparatus comprises a wall for surrounding and defining a heating space, a heating element mounted on the inner side of the wall, reflecting members for reflecting the heat emitted from the heating element. Also, a moving unit joined to one end of each of ... | 02/14/2012 |
| 8111778 | Method for suppressing peak power of orthogonally multiplex signal, peak power suppressing circuit, and transmitter To suppress the peak of the orthogonal multiplex transmission signal which is small in deterioration of the quality of the reception signal by generating the cancellation waveform in synchronization with the timing of the symbol of the transmission signal. There is ... | 02/07/2012 |
| 8110491 | Method of manufacturing semiconductor device and substrate processing apparatus A manufacturing method of a semiconductor device of the present invention includes the step of forming an insulating film on a substrate, and the step of forming a high dielectric constant insulating film on the insulating film, and the step of forming a titanium al... | 02/07/2012 |
| 8105957 | Method of producing semiconductor device Disclosed is a producing method of a semiconductor device comprising a first step of supplying a first reactant to a substrate to cause a ligand-exchange reaction between a ligand of the first reactant and a ligand as a reactive site existing on a surface of the sub... | 01/31/2012 |
| D652395 | Semiconductor manufacturing equipment | 01/17/2012 |
| 8092603 | Substrate processing apparatus A substrate processing apparatus includes a processing chamber, a substrate holding part that holds substrates of required numbers in the processing chamber, a gas supply/exhaust part that supplies or exhausts required gas into the processing chamber, a rotation par... | 01/10/2012 |
| D651990 | Semiconductor manufacturing equipment | 01/10/2012 |
| 8090036 | Transmitter and carrier leak detection method A carrier leak compensating device (2) for adding compensation values to a received transmission signal, an analog quadrature modulator (4), a feedback device (5-7) for receiving and quadrature-detecting part of an output signal of the an... | 01/03/2012 |
| 8085870 | Transmitter A transmitter suppresses peak power occurring in a transmission signal. The transmitter generates peak suppression signals for suppressing the peak power in the transmission signal respectively, synthesizes the peak suppression signals generated, and subtracts a sig... | 12/27/2011 |
| 8084315 | Method of fabricating non-volatile semiconductor memory device by using plasma film-forming method and plasma nitridation A technique capable of improving the memory retention characteristics of a non-volatile memory is provided. In particular, a technique of fabricating a non-volatile semiconductor memory device is provided capable of enhancing the film quality of a silicon oxide film... | 12/27/2011 |
| RE43023 | Dual loading port semiconductor processing equipment A substrate processing equipment comprises two pod supporting stages and two independently operable pod door openers. Each pod supporting stage is capable of placing thereon a pod for containing substrates therein. Each pod door openers having means for permitting a... | 12/13/2011 |
| 8071477 | Method of manufacturing semiconductor device and substrate processing apparatus Formation of a boron compound is suppressed on the inner wall of a nozzle disposed in a high-temperature region of a process chamber. A semiconductor device manufacturing method comprises forming a boron doped silicon film by simultaneously supplying at least a boro... | 12/06/2011 |
| 8071446 | Manufacturing method of semiconductor device and substrate processing apparatus A manufacturing method of a semiconductor device, including the steps of: loading into a processing chamber a substrate having a high dielectric gate insulating film and a metal electrode, with a side wall exposed by etching; applying oxidation processing to the sub... | 12/06/2011 |
| 8066894 | Substrate processing method and substrate processing apparatus A substrate can be appropriately oxidized, while oxidation of the substrate can be suppressed. The present invention includes a step of generating mixed plasma by causing a mixed gas of hydrogen (H2) gas and oxygen (O2) or oxygen-containing gas supplied to a ... | 11/29/2011 |
| 8058184 | Semiconductor device producing method Disclosed is a producing method of a semiconductor device, including: loading at least one substrate formed on a surface thereof with a tungsten film into a processing chamber; and forming a silicon oxide film on the surface of the substrate which includes the tungs... | 11/15/2011 |
| 8057599 | Substrate processing apparatus and method for manufacturing a semiconductor device A CVD device has a reaction furnace (39) for processing a wafer (1); a seal cap (20) for sealing the reaction furnace (39) hermetically; an isolation flange (42) opposite to the seal cap (20); a small chamber (43) for... | 11/15/2011 |
| 8054127 | Feedforward distortion compensation amplifier A feedforward distortion compensation amplifier includes an adjusting unit for adjusting a gain and a phase of an input signal, a first amplifier for amplifying a signal outputted from the adjusting unit, a delay unit for delaying the input signal, and a coupler for... | 11/08/2011 |
| 8051322 | Redundant failover system, redundancy managing apparatus and application processing apparatus In a communication system using an IP tunnel for communication between application processing apparatuses (hereinafter, processing apparatuses), an application can be moved to an arbitrary processing apparatus, update of tunnel tables included in the respective proc... | 11/01/2011 |
| 8047158 | Substrate processing apparatus and reaction container A substrate processing apparatus comprises a reaction chamber which is to accommodate stacked substrates, a gas introducing portion, and a buffer chamber, wherein the gas introducing portion is provided along a stacking direction of the substrates, and introduces su... | 11/01/2011 |
| 8043438 | Device for cleaning CVD device and method of cleaning CVD device An apparatus for cleaning a CVD apparatus that can efficiently remove a by-product such as SiO2 or Si3N4 stuck and deposited onto the surface of an internal wall, an electrode, or the like in a reaction chamber in a film forming proc... | 10/25/2011 |
