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Assignee: Hitachi Instruments Service Co., Ltd.

Location: Tokyo, JP
No. of patents: 1

Number	Title	Issue Date
5874735	Scanning electron microscope A scanning electron microscope having a unit for reducing image obstacle in an scanning electron microscope which is capable of inexpensively and readily reducing image obstacle caused by any external disturbance such as alternative magnetic field and mec...	02/23/1999