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| Number | Title | Issue Date |
| 8185968 | Magnetic head inspection method and magnetic head manufacturing method A magnetic head inspection method is provided with the step that an area smaller than a half of a scanning and measurement area of a magnetic probe in a cantilever unit of the MFM is set as a scanning and measurement area on a surface of a recording portion of the m... | 05/22/2012 |
| 8184283 | Optical defect inspection apparatus A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quan... | 05/22/2012 |
| 8183549 | Substrate holding apparatus, and inspection or processing apparatus In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the... | 05/22/2012 |
| 8182745 | Automatic analyzer An automatic analyzer having a positioning member connected to a nozzle support jig used to install a rinse nozzle having a suction member. The positioning member is present at a lower position than that of the suction member, has a vertically movable construction, ... | 05/22/2012 |
| 8182610 | Cleaning equipment and cleaning method of deposition mask Equipment is realized which is capable of increasing the frequency of use of a deposition mask of an organic EL element and the recycle of an adhesive agent by efficiently cleaning the deposition mask with little damage and efficiently collecting the adhesive agent.... | 05/22/2012 |
| D660335 | Fixation device for a sample case for an electron microscope | 05/22/2012 |
| 8180589 | System for managing recipes for operating a measurement device A semiconductor wafer inspection device which identifies an operator when an operation is performed and checks if the requested operation is permitted is provided. In a device that has already performed an operator authentication, the operator identification is furt... | 05/15/2012 |
| 8180140 | Template creation method and image processor therefor To create a template for use in image recognition based on design data, luminance information is set for each area in the template based on the information regarding the region defined by the template. The luminance information may be set based on material informati... | 05/15/2012 |
| 8179134 | Handling robot of magnetic head assembly, magnetic head test method and magnetic head tester An upward warp of a terminal pad of a flexible cable which is kept horizontal by a suction head is prevented by a pressing arm which contacts with an upper surface of a rear portion of the flexible cable. ... | 05/15/2012 |
| 8178840 | Specimen inspection equipment and how to make the electron beam absorbed current images An object of the present invention is to obtain a clear absorbed current image without involving the difference in gain of amplifier between inputs, from absorbed currents detected by using a plurality of probes and to improve measurement efficiency. In the p... | 05/15/2012 |
| 8178837 | Logical CAD navigation for device characteristics evaluation system A navigation system for easily determining defective positions is provided. In the case of CAD navigation to defective positions, logical information for indicating defective positions is created in a CAD format, instead of CAD data of physical information indicatin... | 05/15/2012 |
| 8178836 | Electrostatic charge measurement method, focus adjustment method, and scanning electron microscope A method and a device are disclosed for suppressing error in electrostatic charge amount or defocus on the basis of electrostatic charge storage due to electron beam scanning when measuring the electrostatic charge amount of the sample or a focus adjustment amount b... | 05/15/2012 |
| 8177951 | Electrophoresis apparatus and pump mechanism used in the same To obtain a stable pressure to inject polymer into a capillary array in order to shorten the injection time and raise the processing capacity of the apparatus. Disclosed herein is an electrophoresis apparatus comprising one or more capillaries to be filled wi... | 05/15/2012 |
| 8175809 | Fluorescence analyzing method, fluorescence analyzing apparatus and image detecting method A fluorescence analyzing method includes the steps of irradiating a board, to which oligonucleotide is fixed, with light for fluorescence measurement; focusing produced fluorescence to form an image; and detecting the fluorescence with a two-dimensional sensor. Here... | 05/08/2012 |
| 8174229 | Sample stage apparatus and method of controlling the same The present invention provides a stage apparatus capable of reducing a positioning time without increasing a positional deviation. A positioning control method of a sample stage apparatus includes: a high-speed movement step of moving a table to a high-speed movemen... | 05/08/2012 |
| 8173971 | Sample transfer unit and sample transferring method There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stoc... | 05/08/2012 |
| 8173962 | Pattern displacement measuring method and pattern measuring device An evaluation method and apparatus is provided for evaluating a displacement between patterns of a pattern image by using design data representative of a plurality of patterns superimposed ideally. A first distance is measured for an upper layer pattern between a li... | 05/08/2012 |
| 8169868 | Method for detecting surface defects in patterned media An optical defect detection method for patterned media includes: irradiating a laser beam onto a patterned medium and obtaining reflected light by reflection very close to a sample; outputting the reflected light as an analog electrical signal from an optical receiv... | 05/01/2012 |
| 8169606 | Appearance inspection apparatus An appearance inspection apparatus analyzes a difference in detection characteristics of detection signals obtained by detectors to flexibly meet various inspection purposes without changing a circuit or software. The apparatus includes a signal synthesizing section... | 05/01/2012 |
| 8168951 | Charged particle beam apparatus A charged particle beam apparatus having an aberration correction capability at high acceleration voltages. The charged particle beam apparatus comprises a charged particle beam source; an extraction electrode to extract charged particles from the charged particle b... | 05/01/2012 |
| 8168950 | Charged particle beam apparatus, and image generation method with charged particle beam apparatus The present invention has a subject to provide an apparatus that optimizes scanning in accordance with circumstances or purposes, reduces distortion of images, and improves throughput, image quality, and defect detection rate by controlling deflection of a charged p... | 05/01/2012 |
| D658776 | Sample tube holder stocker for clinical laboratory automation system | 05/01/2012 |
| 8164058 | Specimen observation method It is an object of the present invention to provide a specimen observation method, an image processing device, and a charged-particle beam device which are preferable for selecting, based on an image acquired by an optical microscope, an image area that should be ac... | 04/24/2012 |
| 8163652 | Plasma processing method and plasma processing device A plasma processing method using plasma includes steps of applying current to a coil and introducing gas into a processing chamber, applying a bias power that does not generate plasma, applying a source power to generate plasma so that a plasma density distribution ... | 04/24/2012 |
| 8160352 | Surface inspection method and surface inspection apparatus A surface inspection apparatus capable of acquiring scattered light intensity distribution information for each scattering azimuth angle, and detecting foreign matters and defects with high sensitivity. A concave mirror for condensation and another concave mirror fo... | 04/17/2012 |
| 8158955 | Charged particle beam application apparatus An apparatus capable of improving image quality by making it possible to suck specimens of different sizes electrostatically, and uniformalizing an electric field of a specimen edge portion, while suppressing increase in prime cost is provided. Specimen holding mean... | 04/17/2012 |
| 8158938 | Scanning electron microscope and a method for imaging a specimen using the same (1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated automatically from CAD data, (2) a combination of input information and... | 04/17/2012 |
| 8158209 | Method and apparatus for coating resin Method and apparatus for coating a surface of a work with a thin resin or plastic film suitable for use in imprinting a pattern by impressing a master pattern on a transfer surface of a mold on the coated resin film. A curable resin liquid is coated on a work by the... | 04/17/2012 |
| 8158058 | Automatic analyzer An automatic analyzer is disclosed that includes a supplementary reagent storage section and reagent bottle transfer mechanism besides an analysis reagent storage section, and that, by managing information on reagents stored in these two reagent storage sections, is... | 04/17/2012 |
| 8154821 | Magnetic head-positioning servo system, magnetic head test system and magnetic disk test system A magnetic head-positioning servo system is provided to accurately test a magnetic disk with a track written in advance, by providing two fine actuators. The second fine actuator, to which a magnetic head is attached, is mounted on the first fine actuator. The secon... | 04/10/2012 |
| 8154717 | Optical apparatus for defect inspection An optical apparatus for defect inspection having an illuminating optical system for irradiating illumination light beams on the surface of a specimen to form a beam spot and a detection optical system for detecting a reflection light ray originating from the beam s... | 04/10/2012 |
| 8153970 | Scanning electron microscope A scanning electron microscope for digitally processing an image signal to secure the largest focal depth and the best resolution in accordance with the magnification for observation is disclosed. The angle of aperture of an optical system having a plurality of conv... | 04/10/2012 |
| 8153969 | Inspection method and inspection system using charged particle beam In an electric immersion lens having high resolution capability, secondary electrons generated from a specimen are accelerated to suppress the dependency of rotational action of the secondary electrons applied thereto by an objective lens upon energy levels of the s... | 04/10/2012 |
| 8153966 | Electrode unit and charged particle beam device A high-resolution sample image is acquired by eliminating both of charge over an entire sample (global charge) and charge in a local region irradiated with a primary charged particle beam (local charge). An electrode unit (50) according to the present inventi... | 04/10/2012 |
| 8153060 | Automatic analyzer An automatic analyzer includes a B/F separator including a reaction vessel holding unit provided with magnets disposed around a reaction vessel held on the reaction vessel holding unit and a rotating device for rotating the reaction vessel holding unit holding the r... | 04/10/2012 |
| 8151190 | Analysis device An analysis device allowing any person to utilize job guidance for setting and assignment operations with high efficiency regardless of a level of skill in an automatic analysis device which has a complicated screen configuration with an increase of functions. A sto... | 04/03/2012 |
| 8150645 | Automatic analzyer Measurement of the uncertainty used for quality control typically involves a plurality of factors. When the uncertainty exceeds a clinical permissible value, time is required for a medical technologist to investigate and to determine the factor causing the uncertain... | 04/03/2012 |
| 8150141 | Defect classifier using classification recipe based on connection between rule-based and example-based classifiers In apparatuses for automatically acquiring and also for automatically classifying images of defects present on a sample such as a semiconductor wafer, a classifying system is provided which are capable of readily accepting even such a case that a large number of cla... | 04/03/2012 |
| 8149396 | Defect inspection apparatus and its method A defect inspection apparatus for inspecting defects on an inspecting object includes an illuminator which irradiates a beam of light on the inspecting object, a photo-detector which detects rays of light from the inspecting object due to the irradiation of the ligh... | 04/03/2012 |
| 8148268 | Plasma treatment apparatus and plasma treatment method The invention provides a plasma treatment apparatus or a plasma treatment method having a high productivity while maintaining a stable treatment performance. In a plasma treatment apparatus feeding a plurality of gases fed into the treatment chamber and treating a s... | 04/03/2012 |
