Assignee: Hitachi Electronics Engineering Co., Ltd.

Location: Tokyo, JP
No. of patents: 74

Number	Title	Issue Date
8072597	Method and its apparatus for inspecting particles or defects of a semiconductor device Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are ...	12/06/2011
7035039	Magnetic head positioning control device, magnetic head certifier, magnetic disk certifier and head cartridge A piezo actuator is provided between a suspension spring and a head carriage. When a predetermined track of a magnetic disk is accessed by positioning a magnetic head in the predetermined track, the piezo actuator maintains the magnetic head in an ON track state by ...	04/25/2006
6815198	Apparatus for automated preparation of DNA samples and reactor for preparing DNA samples An apparatus for automated preparation of DNA samples which comprises a reactor for preparing DNA samples and adjacent thereto an enzyme supply section, a plate holding section, a nozzle sealing section and a cleaning tank section, and wherein plates are loaded onto...	11/09/2004
6790300	Method and apparatus for bonding substrate plates together through gap-forming sealer material Method and apparatus for registering and bonding upper and lower substrate plates together through a sealer material and in such a way as to form a gap of a predetermined width between the two substrate plates. Registered substrate plates are provisionally pressed t...	09/14/2004
6731384	Apparatus for detecting foreign particle and defect and the same method An apparatus and method for detecting foreign particle and defect on an object in detection by means of a laser beam, in which the laser beams of different wavelengths are irradiated onto the surface of the object in detection from different angles and the state of ...	05/04/2004
6661912	Inspecting method and apparatus for repeated micro-miniature patterns An apparatus for inspecting foreign matter in repeated micro-miniature patterns formed upon a surface of an object to be inspected, comprising: an inspection light illuminating device for irradiating an inspection light directed upon the surface of the ob...	12/09/2003
6642734	Method and apparatus to generate a ground level of a semiconductor IC tester having a plurality of substrates When performing supply and measurement of various signals on n=8 semiconductor IC devices under test DUT1-DUT8 using m=3 substrates 10-30, reference voltages of the devices under test DUT1-DUT3 are input to the substrate 10, reference voltages of the devi...	11/04/2003
6631726	Apparatus and method for processing a substrate A lamp house is located face to face with a substrate which is transferred by a conveyer means. A dielectric barrier discharge lamp is provided in the lamp house to irradiate the substrate with ultraviolet light, while a moistened inert gas, consisting of...	10/14/2003
6628402	Phase interference detecting method and system in interferometer, and light detector therefor In a phase interference detecting system with use of an interferometer, a height from a reference surface on a measurement surface is detected by receiving interference components of reflection lights from the reference surface and a measurement surface, ...	09/30/2003
6617603	Surface defect tester An image of a scanning position on a faceplate on a light receiving region defined by an arrangement of n light receiving elements such that an amount of light received by the light receiving region becomes a peak at a center of the light receiving region...	09/09/2003
6600561	Apparatus and method for measuring pattern alignment error For measurement of an error of alignment between first and second patterns overlappingly formed on a same substrate, first and second alignment reference marks of predetermined symmetric shapes are formed at a predetermined position of the substrate durin...	07/29/2003
6597448	Apparatus and method of inspecting foreign particle or defect on a sample A system and method of inspecting a foreign particle or a defect on a sample are provided. Such a method comprises irradiating light to an object to be inspected; detecting reflected light or scattered light from the object to be inspected irradiated with...	07/22/2003
6552535	Defect detector circuit with a signal synthesizer and magnet disk certifier using the same defect detector circuit A magnetic disk certifier includes a defect detector circuit comprising a low-pass filter for extracting a low frequency component of the read-out signal, the low frequency component containing a signal component of the error, a signal generator circuit f...	04/22/2003
6515945	Recording media library apparatus with a function to detect a position of a recording medium transferred in the library Locking claw engages a recording medium to be transferred, and a determination is made as to which of a plurality of predetermined points a current position of the locking member corresponds to. Current position of the recording medium can be determined i...	02/04/2003
6515470	Method and apparatus for testing IC device For testing electrical properties of packaged IC devices, there is provided an apparatus which includes a test board which is located at a testing station and provided with a plural number of contacting sockets for connecting individual IC devices to an I...	02/04/2003
6509966	Optical system for detecting surface defect and surface defect tester using the same A defect detection optical system includes a light receiving system including n light receiving elements arranged in a direction perpendicular to a main scan direction, for focusing an image thereon such that the image becomes in the arranging direction o...	01/21/2003
6480971	Media library apparatus and method of controlling the media library apparatus For each of a plurality of media that are to be simultaneously subjected to a data striping process, a management region is provided where data can be saved separately from an existing substitute sector. When some defect or trouble is found in any one of ...	11/12/2002
6473258	Magnetic disk read/write circuit having core coils of opposite phase A magnetic disk read/write circuit comprises a core having a pair of coils wound such that signals supplied to the coils becomes opposite in phase and a read circuit having a first input terminal connected to one of terminals of a read head through one of...	10/29/2002
6452894	Recording media library apparatus having a medium inversion unit separated from a transport mechanism The present invention provides a recording media library apparatus that includes an inversion unit for inverting a desired or designated recording medium of the double-side recording type so as to correspond to a predetermined driving direction of a drive...	09/17/2002
6448799	Timing adjustment method and apparatus for semiconductor IC tester A comparator (30) is connected through switches (13, 14 and 15) with two or more drive-only pins, and the comparator 30 is shared by two or more drive-only pins by changing the switches (13, 14 and 15). The switches are changed one by one and the signal j...	09/10/2002
6448800	Load current output circuit for electronic device and IC tester using the same load current output circuit An IC tester includes a detection circuit for detecting a voltage level on a portion of a transmission line on a side thereof, which receives the output signal from an electronic device under test through the transmission line. A predetermined current is ...	09/10/2002
6442127	Mount for recording media and recording media library apparatus using the mount Tray supporting a recording medium is transferred horizontally to a designated destination component and stored in the destination component along with the recording medium. The tray has one end facing the destination component and this one end has a surf...	08/27/2002
6421932	Method and apparatus for drying substrate plates While being transferred in substantially horizontal state along a predetermined path of transfer by a conveyer means, a substrate plate is dried by a jet of compressed air which is spurted out from a slit-like mouth of an air knife nozzle crosswise of the...	07/23/2002
6424201	Diode element circuit and switch circuit using the same A diode element circuit uses a junction between the base and collector of a vertical type PNP transistor as a diode, and is further designed that a reverse bias voltage is applied between base and emitter of a parasitic PNP transistor in the vertical type...	07/23/2002
6418640	Drying apparatus for a substrate and drying method thereof Thin substrate plates are transferred in a horizontal or tilted posture on and by a substrate transfer means. Provided by a substrate transfer path is an air knife nozzle for scraping and drying off a liquid successively from surfaces of the substrates on...	07/16/2002
6414510	Testing apparatus and method of IC devices A testing apparatus of IC devices, comprising: a loader portion (10) for mounting a predetermined number of the IC devices (5) on each of test boards (1) transferred on a horizontal reference plane (H); a pre-heat portion (11) for receiving the test board...	07/02/2002
6411377	Optical apparatus for defect and particle size inspection The present invention provides a defect inspecting apparatus and a defect inspection method for inspecting an object of inspection for a defect such as a foreign particle existing on the object wherein, by using a high-efficiency illumination optical syst...	06/25/2002
6376231	Sample loading sheet The improved sample loading sheet for loading an assay sample in specified lane positions in a gel electrolyte layer in an electrophoresis plate to be used in a gel electrophoretic apparatus is formed of cation-exchange chromatographic paper and has part ...	04/23/2002
6365425	Method of manufacturing semiconductor device A method of manufacturing a semiconductor device includes fetching inspection chip information including information of a dust-particle/fault on an inspection chip by irradiating the inspection chip of a semiconductor wafer with an optical beam and by det...	04/02/2002
6353473	Wafer thickness measuring apparatus and detection method thereof In a wafer thickness measuring apparatus and a method thereof, detection values are obtained from a sample piece (for example, a wafer chip) at a plurality of measurement points thereon by first and second detectors for absolute measurement of distances, ...	03/05/2002
6284119	DNA base sequencer A DNA base sequencer including a gel electrophoretic means having tracks for electrophoresing fluorophore-labelled DNA fragments, a laser diode as a light source for illuminating said tracks with exciting laser light and a CCD sensor for detecting the flu...	09/04/2001
6275023	Semiconductor device tester and method for testing semiconductor device A semiconductor device according to the present invention comprises a first switch circuit connected between a transmission line and an input terminal of a comparator and adapted to be turned ON according to a change of a response waveform from High level...	08/14/2001
6204681	IC device contactor An IC device contactor for electrically connecting IC devices each having a large number of spherical electrodes on one side of a substrate to an IC tester head for a test of electrical properties or characteristics. The IC device contactor includes: a so...	03/20/2001
6132578	Method and apparatus for electrophoresis separation and detection An electrophoresis separation and detection apparatus for separating and detecting fluorophore-labeled samples by electrophoresis, which comprises a migrating and separating means for electrophoresis separation of the samples labeled with two or more kind...	10/17/2000
6057926	Magnetic disk testing method and surface defect testing device A magnetic disk testing method is provided, which comprises a surface defect test step of detecting, as defect data, the size of surface defect of a magnetic disk, the continuity thereof, the number thereof and the position thereof by testing magnetic dis...	05/02/2000
6039925	Fluorescence detector The improved fluorescence detector comprises a tubular electrophoretic device through which a sample labelled with four kinds of fluorescent dye is caused to migrate, illumination optics for illuminating the tubular electrophoretic device with exciting li...	03/21/2000
6004487	Method and apparatus for laser-texturing disk surfaces Method and apparatus for a disk texturing operation in which laser pulses are successively bombarded against a delimited surface area on the face of a rotating disk, from an optical laser pulse irradiating means which is put in movement in a radial direct...	12/21/1999
6002989	System for quality control where inspection frequency of inspection apparatus is reset to minimize expected total loss based on derived frequency function and loss value Inspection apparatuses of an inspection apparatus group are connected to a network and transfer inspected result to a data collection system. The same wafer selected from a specific process is inspected by the different inspection apparatuses and the insp...	12/14/1999
5998994	MR head offset correction method and magnetic disk certifier A test data is written in an arbitrary point p on a non-linear characteristics portion of a hysteresis characteristics of a piezo actuator by a write head and the written test data is read out by an MR head using the point p as a reference to detect a max...	12/07/1999
5999366	Adjustable disk chucking mechanism for handling different sized disks A mechanism for chucking a disk with a first and a second roller includes a base plate provided substantially at a right angle to a surface of the disk, and a first and a second rod that are spaced apart and which move along the base plate either toward o...	12/07/1999

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Assignee: Hitachi Electronics Engineering Co., Ltd.