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| Number | Title | Issue Date |
| 8161772 | Method for the production of an optical component made from quartz glass In a conventional method for the production of an optical component made from quartz glass, a coaxial arrangement with a core rod, surrounded by a quartz glass envelope tube comprising an evacuable inner drilling, is introduced in the vertical direction into a heati... | 04/24/2012 |
| 8158542 | SiOslurry for the production of quartz glass as well as the application of the slurry A known SiO2 slurry for the production of quartz glass contains a dispersion liquid and amorphous SiO2 particles with particle sizes to a maximum of 500 μm, wherein the largest volume fraction is composed of SiO2 particles with part... | 04/17/2012 |
| 8156761 | Method for producing quartz glass using a mixed powder A mixed quartz powder contains quartz powder and two or more types of doping element in an amount of from 0.1 to 20 mass %. The aforementioned doped elements include a first dope element selected from the group consisting of N, C and F, and a second dope element sel... | 04/17/2012 |
| 8061162 | Method for producing a tube of quartz glass by elongating a hollow cylinder of quartz glass In a known method for producing a tube of quartz glass by elongating a hollow cylinder of quartz glass having an outer diameter AD, said cylinder is continuously supplied to a heating zone with a vertically oriented heating tube having an inner diameter d, with the ... | 11/22/2011 |
| 8017536 | Component of quartz glass for use in semiconductor manufacture and method for producing the same The invention starts from a known component of quartz glass for use in semiconductor manufacture, which component at least in a near-surface region shows a co-doping of a first dopant and of a second oxidic dopant, said second dopant containing one or more rare-eart... | 09/13/2011 |
| 8015846 | Elongation method for producing an optical component of quartz glass and preliminary product suited for performing the method This method for drawing a quartz glass optical component shortens the pulling process and minimizes loss of material. An end face of a quartz glass hollow cylinder forms a tapered end portion to an attachment piece of quartz glass having a bore. The inner bore of th... | 09/13/2011 |
| 7981824 | Quartz glass blank and method for producing said blank The present invention relates to a quartz glass blank for an optical component for transmitting radiation of a wavelength of 15 nm and shorter, the blank consisting of highly pure quartz glass, doped with titanium and/or fluorine, which is distinguished by an extrem... | 07/19/2011 |
| 7980098 | Method for producing an optical component of synthetic quartz glass with enhanced radiation resistance, and blank for producing the component To optimize an optical component of synthetic quartz glass, in the case of which a quartz glass blank is subjected to a multistage annealing treatment, with respect to compaction and central birefringence, the present invention suggests a method comprising the follo... | 07/19/2011 |
| 7955715 | Method for coating a component for use in a crucible drawing method for quartz glass, and coated component obtained according to the method In a known method for coating a crucible for use at a high working temperature in a crucible drawing method for quartz glass, a base body wall of tungsten has applied thereto a protective layer containing a coating metal consisting of the group selected from iridium... | 06/07/2011 |
| 7954341 | Method for making a blank from material, particularly for an optical component for use in microlithography The invention is concerned with a material which shows low absorption for UV radiation having a wavelength below 250 nm, low birefringence, high chemical resistance and high radiation resistance and which is therefore particularly usable for making optical component... | 06/07/2011 |
| 7947335 | Quartz glass component with reflector layer and method for producing the same Methods for producing a quartz glass component with reflector layer are known in which a reflector layer composed of quartz glass acting as a diffuse reflector is produced on at least part of the surface of a substrate body composed of quartz glass. In order, taking... | 05/24/2011 |
| 7937968 | Method for bonding components made of material with a high silicic acid content In a known method for bonding components made of material with a high silicic acid content by means of a substance to substance bond, a SiO2-containing bonding mass is formed between connecting surfaces of the components. In order to provide for cost-effi... | 05/10/2011 |
| 7905932 | Mixed powder and a method for producing quartz glass using the powder A mixed quartz powder contains quartz powder and two or more types of doping element in an amount of from 0.1 to 20 mass %. The aforementioned doped elements include a first dope element selected from the group consisting of N, C and F, and a second dope element sel... | 03/15/2011 |
| 7891213 | Vertical drawing method for producing a cylindrical glass body and device for carrying out said method According to a known vertical drawing method for producing a cylindrical glass body, the cylinder longitudinal axis of the glass cylinder is adjusted by hand in relation to the longitudinal axis of a heating tube. The aim of the invention is to optimize the stabilit... | 02/22/2011 |
| 7854147 | Method for producing a semifinished product for an optical component of high homogeneity Known methods for producing a semifinished product for an optical component of synthetic quartz glass of high homogeneity require a great number of forming or shaping steps for homogenization, which is troublesome in terms of energy and time and entails the risk tha... | 12/21/2010 |
| 7854146 | Method for production of an optical component from quartz glass The production of an optical component from quartz glass by elongation of a coaxial arrangement of a core rod and a hollow cylinder is known. The arrangement is thus introduced into a heating zone, such that the lower end begins to partly soften and the component dr... | 12/21/2010 |
| 7797965 | Method for producing tubes of quartz glass In a known method for producing tubes of quartz glass, a hollow cylinder (2) of quartz glass is continuously supplied to a heating zone (1) and is softened therein in regions, and a tube strand (21) is drawn off at a drawing speed from the softe... | 09/21/2010 |
| 7779652 | Method and apparatus for producing a glass body The invention starts from a known method for producing a glass body, comprising forming a cylindrical blank by successive deposition of a plurality of material layers on the outer surface of a substrate body which is rotating about its longitudinal axis, by using an... | 08/24/2010 |
| 7749930 | Holder made from quartz glass for the processing of semiconductor wafers and method for production of the holder An ideal quartz glass for a wafer jig for use in an environment having an etching effect is distinguished by both high purity and high resistance to dry etching. To indicate a quartz glass that substantially fulfills these requirements, it is suggested according to ... | 07/06/2010 |
| 7746478 | Method for interferometrically measuring an optical property of a test piece and a device suited for carrying out this method The invention relates to a method for interferometrically measuring large optics. A combination of a method known as stitching technique, during which the sub-interferograms are determined on partial surfaces of measuring area and are joined in a software-controlled... | 06/29/2010 |
| 7716952 | Method for the production of a blank mold for optical fibers In a known method for the production of a blank mold for optical fibers, a fluorine-doped SiO2 enveloping glass is produced on a core glass cylinder that rotates about its longitudinal axis, wherein a silicon-containing starting substance is fed to a plas... | 05/18/2010 |
| 7712335 | Quartz glass cylinder for production of an optical component and method for production thereof The aim of the invention is to improve a known quartz glass cylinder for the production of an optical component, comprising an inner drilling, which is mechanically machined to size and provided with an etched structure by means of an etching treatment, subsequent t... | 05/11/2010 |
| 7707855 | Method for producing synthetic quartz glass with predetermined hydroxyl group content A known method for producing synthetic quartz glass with a predetermined hydroxyl group content comprises the following steps: a porous SiO2 soot body is produced by flame hydrolysis or oxidation of a silicon-containing start compound and by layerwise dep... | 05/04/2010 |
| RE41249 | Quartz glass body having improved resistance against plasma corrosion, and method for production thereof An object of the present invention is to provide a quartz glass body, especially a quartz glass jig for plasma reaction in producing semiconductors having excellent resistance against plasma corrosion, particularly, excellent corrosion resistance against F-based gas... | 04/20/2010 |
| 7691766 | Material, particularly for an optical component for use in microlithography, and method for making a blank from the material The invention is concerned with a material which shows low absorption for UV radiation having a wavelength below 250 nm, low birefringence, high chemical resistance and high radiation resistance and which is therefore particularly usable for making optical component... | 04/06/2010 |
| 7686887 | Quartz glass crucible for pulling up silicon single crystal and method for producing the same An object of the invention is to provide a quartz glass crucible reduced in the generation of vibration occurring on the surface of a silicon melt and free from the generation of rough surface and cristobalite spots, yet capable of pulling up single crystal silicon ... | 03/30/2010 |
| 7681416 | Method for production of an optical component made from quartz glass The production of an optical component from quartz glass, by elongation of a coaxial arrangement of a core rod and a hollow cylinder of a given length, is known. The arrangement is thus introduced into a heating zone with a vertical orientation, such that the lower ... | 03/23/2010 |
| 7637126 | Method for the production of laser-active quartz glass and use thereof The invention relates to a method for the economic production of a blank for a component made from laser-active quartz glass in any form or dimension. The method comprises the following method steps: a) preparation of a dispersion with a solids content of at least 4... | 12/29/2009 |
| 7600399 | Method and device for producing a cylindrical glass body In a known method for producing a cylindrical glass body in a vertical drawing process, a glass blank is softened in a heating zone and drawn off as a glass strand by means of a draw-off device at a controlled drawing speed, the draw-off device comprising a first dr... | 10/13/2009 |
| 7587912 | Method for producing quartz glass crucible for use in pulling silicon single crystal and quartz glass crucible produced by said method The present invention refers to a method for producing a quartz glass crucible for use in pulling silicon single crystal, said crucible having at least a double-layer structure comprising a pore-free transparent inner layer and an opaque base body or outer layer hav... | 09/15/2009 |
| 7563512 | Component with a reflector layer and method for producing the same In a known component having a reflector layer, the surface of a base body of quartz glass is covered at least in part with a reflector layer. Starting from this, to provide a component, particularly for use in lamp and reflector manufacture, which is equipped with a... | 07/21/2009 |
| 7552601 | Optical component of quartz glass, method for producing the optical component, and use thereof Starting from an optical component of quartz glass for transmitting ultraviolet radiation of a wavelength between 190 nm and 250 nm, with a glass structure essentially without oxygen defects, a hydrogen content ranging from 0.1×1016 molecules/cm3 | 06/30/2009 |
| 7501367 | Optical component of quartz glass, method for producing said component, and method for exposing a substrate To provide an optical component of quartz glass for use in a projection lens system for immersion lithography with an operating wavelength below 250 nm, which is optimized for use with linearly polarized UV laser radiation and particularly with respect to compaction... | 03/10/2009 |
| 7497095 | Method for producing quartz glass jig and quartz glass jig The invention provides a method for producing a quartz glass jig for use in semiconductor industries, which enables increasing the surface layer cleanliness simply and surely at low cost; it also provides a quartz glass jig improved in surface layer cleanliness. The... | 03/03/2009 |
