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Patent No. 6637447

Beerbrella

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Assignee: Helix Technology Corporation


Location: Waltham, MA
No. of patents: 81

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NumberTitleIssue Date
5060481Method and apparatus for controlling a cryogenic refrigeration system
A cryogenic refrigeration system has a control system that controls the operation of the refrigeration system and provides status information to the operator of the refrigeration system. The cryogenic refrigeration system includes one or more heater and a...
10/29/1991
5040372Linear drive motor with flexure bearing support
A linear drive motor of a cryogenic refrigerator, where a reciprocating armature (10) which alternately compresses and expands a gaseous fluid in a thermodynamic cycle, is supported at both ends by flexure supports (110, 130). The armature has a clearance...
08/20/1991
5036670Cryogenic refrigerator with corner seal
In a cryogenic refrigerator, a displacer 12 and its drive piston 28 are guided by a displacer guide 32 seated within an expander body 16. An expander cap 40 enclosing a spring volume 38 extends within the expander body 16 and abuts the displacer guide 32....
08/06/1991
5018357Temperature control system for a cryogenic refrigeration
In a cryogenic refrigeration utilizing a linear drive motor, a temperature control system controls the displacement of an armature reciprocating at a fixed frequency to adjust the operating temperature of a working fluid at the cold end of a cold finger. ...
05/28/1991
5001903Optimally staged cryopump
A cryopump having at least two temperature stages for pumping gases at their optimal temperatures. A first embodiment has a third temperature stage that is surrounded by and separated from the second temperature stage which is surrounded by and separated ...
03/26/1991
4956974Replacement method and apparatus for a cryogenic refrigeration unit
When a refrigerator unit is removed, inner surfaces of a refrigeration unit housing extending into a cryogenically cooled system are heated. The method is performed in such a way as to prevent the external atmosphere from coming in contact with the housin...
09/18/1990
4949546Compact heat exchanger for a cryogenic refrigerator
A heat exchanger has a set of tubes through which fluid pass. In thermal communication with these tubes are fins of high thermal conductivity material which disperse the heat contained within the fluid. Also useful in dispersing the heat contained within ...
08/21/1990
4932428Bypass relief poppet valve
The present invention discloses a relief valve containing a poppet valve which is designed to eliminate resonant chattering within the relief valve. The poppet valve contains a plurality of holes of sufficient size and number within the truncated portion ...
06/12/1990
4924675Linear motor compresser with stationary piston
A linear motor compressor within a cryogenic refrigerator wherein the compressor space, within which a gaseous fluid is alternately compressed and expanded, is formed by a stationary piston and a reciprocating armature that is concentric about the piston....
05/15/1990
4918930Electronically controlled cryopump
A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly res...
04/24/1990
4910965Means for periodic desorption of a cryopump
The invention discloses a cryopump comprising a primary cryopanel 67 associated with a low temperature heat sink 60 having means for adsorbing a first low boiling point gas and a secondary cryopanel 80 associated with heat sink 60 and a higher temperature...
03/27/1990
4906266Replacement method and apparatus for a cryogenic refrigeration unit
When a refrigerator unit is removed, inner surfaces of a refrigeration unit housing extending into a cryogenically cooled system are heated. The method is performed in such a way as to prevent the external atmosphere from coming in contact with the housin...
03/06/1990
4884410Purge/charge manifold and method for cryogenic systems
A T-shaped manifold employs a single multiway control valve for purging and charging a cryogenic system of interest. The single multiway control valve is positioned at the intersection of a crossbar and perpendicular elongate member. One end of the crossb...
12/05/1989
4873913Dry roughing pump having a gas film bearing
The present invention relates to a cryopump having a gas bearing formed in a clearance seal between a piston and a cylinder. The gas bearing is formed by forcing pressurized gas from a gas plenum through orifices to the clearance seal....
10/17/1989
4862697Cryopump with vibration isolation
A vibration isolator particularly suited to isolating a closed cycle refrigerator in a cryopump includes two bellows covered with vibration damping material and separated by an intermediate mass. The damping material fills the spaces between corrugations ...
09/05/1989
4860546Vacuum system with molecular flow line
In a vacuum system having a load lock cooperating with a work chamber, a flow line is connected between the cryopump of the load lock and the work chamber. The flow line passes noncondensible gases which are not absorbed by the cryopump of the load lock t...
08/29/1989
4860543Vibration isolation system for a linear reciprocating machine
A two mass vibration isolator particularly suited to a linear reciprocating machine. Vibration into and out of the machine is attenuated by an isolator placed between the machine and its mounting frame. The isolator is an elastomer with a damping ratio of...
08/29/1989
4842287Helium pressure seal for a cryogenic refrigerator
A pressure seal used for containing helium within a cryogenic refrigerator, which utilizes a linear drive assembly. A deformable gasket is used to seal the enclosing elements of the linear drive assembly to reduce helium leakage. Concentrically serrated m...
06/27/1989
4835972Flex-line vibration isolator and cryopump with vibration isolation
A vibration isolator particularly suited to isolating a closed cycle refrigerator in a cryopump includes a bellows having o-rings made of vibration damping material secured between the corragations of the bellows. A soft damping material maintains a low s...
06/06/1989
4833899Cryopump with vibration isolation
A vibration isolator particularly suited to isolating a closed cycle refrigerator in a cryopump includes two bellows covered with vibration damping material and separated by an intermediate mass. The damping material fills the spaces between corrugations ...
05/30/1989
4834136Pressure relief filter and valve and cryopump utilizing the same
A pressure relief valve in a cryopump is preceded by a filter element in a filter housing. The filter element is springloaded so that the filter element itself provides pressure relief with clogging of the filter. The housing may have a removable end cap....
05/30/1989
4831828Cryogenic refrigerator having a convection system to cool a hermetic compressor
In accordance with the invention, a hermetic refrigerant compressor pump which is used to compress helium is cooled by fins which are press fitted to the compressor's housing. The compressor is further cooled by a heat exchanger which cools oil in an oil ...
05/23/1989
4819439Linear drive motor with improved dynamic absorber
A linear drive motor of cryogenic refrigerator in which a reciprocating armature alternately compresses and expands a gaseous fluid in a thermodynamic cycle. An isolator system comprising a countermass, having an antiphase movement with respect to the arm...
04/11/1989
4799359Cryogenic refrigerator compressor with externally adjustable by-pass/relief valve
This invention is comprised of an improved cryogenic refrigeration compressor which contains an externally adjustable relief valve positioned between the helium supply line and the helium return line whereby if the pressure within the helium supply line e...
01/24/1989
4798054Linear drive motor with flexure bearing support
A linear drive motor of a cryogenic refrigerator, where a reciprocating armature which alternately compresses and expands a gaseous fluid in a thermodynamic cycle, is supported at both ends by flexure supports. The armature has a clearance seal with a sta...
01/17/1989
4796433Remote recondenser with intermediate temperature heat sink
A recondenser with a primary heat exchanging surface for recondensing boil-off within a cryostat provides a second heat exchanging surface for removing heat leak into the cryostat. The second surface is cooled by the same working fluid that cools the prim...
01/10/1989
4783968Vibration isolation system for a linear reciprocating machine
A two mass vibration isolator particularly suited to a linear reciprocating machine. Vibration into and out of the machine is attenuated by an isolator placed between the machine and its mounting frame. The isolator is an elastomer with a damping ratio of...
11/15/1988
4766741Cryogenic recondenser with remote cold box
A recondenser cycles a working volume of cryogen gas through a remote cold box and a coaxial recondensing, heat exchanger transfer line which is inserted into a cryostat. The working volume of gas is compressed to a high pressure and cooled through coolin...
08/30/1988
4763483Cryopump and method of starting the cryopump
The refrigerator of a cryopump is positioned within an insulating vacuum and the two stages of the refrigerator are selectively thermally coupled to first and second stage cryopanels. After initial rough pumping by an air ejector, rough pumping is complet...
08/16/1988
4761960Cryogenic refrigeration system having an involute laminated stator for its linear drive motor
In a cryogenic split Stirling refrigerator, the compressor is driven by linear drive motors. Each linear drive motor has an armature hermetically sealed by a housing 20. Surrounding the housing is a stator formed from two bodies each housing a drive coil ...
08/09/1988
4719938Self-cleaning valve and cryopump utilizing the same
The pressure relief valve is debris resistant, self-cleaning, and self-actuating in a cryopump. It includes an o-ring carried by a valve member within a valve cylinder. In opening, the valve member moves away from an end port to open vent ports in the sid...
01/19/1988
4718442Cryogenic refrigerator compressor with externally adjustable by-pass/relief valve
This invention is comprised of an improved cryogenic refrigeration compressor which contains an externally adjustable relief valve positioned between the helium supply line and the helium return line whereby if the pressure within the helium supply line e...
01/12/1988
4718240Cryopump regeneration method and apparatus
A cryopump is regenerated by means of an ejector pump which draws gas from the cryopump as the pump is warmed. The ejector is actuated by an inert gas. The same inert gas may also be used to purge the pump during evacuation....
01/12/1988
4718241Cryopump with quicker adsorption
A cryopump with quicker adsorption of non-condensible gases is disclosed. The second stage cryopanel of this cryopump is comprised of an array of discs spaced along an axis perpendicular to the frontal cryopanel, and in close thermal contact with the seco...
01/12/1988
4708165High pressure stepped clearance seal valve in a cryogenic refrigeration system
In an expansion engine used in cryogenic refrigeration, a stepped inlet valve 10 and a stepped exhaust valve 11 are fluid activated to control high pressure gas such as helium into and out of the engine. Clearance seals in the stepped valve are achieved b...
11/24/1987
4697617Pressure relief filter and valve and cryopump utilizing the same
A pressure relief valve in a cryopump is preceded by a filter element in a filter housing. The filter element is springloaded so that the filter element itself provides pressure relief with clogging of the filter. The housing may have a removable end cap....
10/06/1987
4697113Magnetically balanced and centered electromagnetic machine and cryogenic refrigerator employing same
A cryogenic refrigerator includes opposing pistons driven by linear electromagnetic machines. Magnetic elements on armatures reciprocate adjacent to first and second flux paths and a transfer of flux between the flux paths with movement of either armature...
09/29/1987
4693736Oil cooled hermetic compressor used for helium service
In a cryogenic refrigeration system, a hermetic refrigerant compressor pump is used to compress helium. The compressor pump 10 is oil cooled by a heat exchange jacket 46 surrounding a compressor housing 28. Oil from an oil sump 30 within the compressor ho...
09/15/1987
4679402Cooling heat exchanger
A cooling heat exchanger such as a cold trap for removing contaminants from a vapor stream. Vapor flows through a conduit having angled baffles therein. The baffles are aligned within the conduit so as to form an optically dense trap. A cold region is cre...
07/14/1987
4679401Temperature control of cryogenic systems
To control the temperature of one or more heat sinks of a cryogenic refrigerator in a cryopump, refrigerant gas to the refrigerator is diverted through heat exchangers associated with the refrigerator heat sinks. The diverted refrigerant gas may be used t...
07/14/1987
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