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Assignee: GSI Lumonics Corporation


Location: Billerica, MA
No. of patents: 20

NumberTitleIssue Date
7666759Method and system for high-speed, precise micromachining an array of devices
A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. The number of resistance measurements are limited by using non-measuremen...
02/23/2010
7382389Methods and systems for thermal-based laser processing a multi-material device
A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includ...
06/03/2008
7027155Methods and systems for precisely relatively positioning a waist of a pulsed laser beam and method and system for controlling energy delivered to a target structure
A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includ...
04/11/2006
6972268Methods and systems for processing a device, methods and systems for modeling same and the device
A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includ...
12/06/2005
6973104Pulse control in laser systems
A pulsed laser system includes a laser pump, a laser rod, a reflector interposed between the laser pump and the laser rod, through which energy from the laser pump enters the laser rod, an output reflector through which energy is emitted from the laser rod, a switch...
12/06/2005
6956491Monitoring bearing performance
Techniques for qualifying and monitoring bearing performance and condition in a rotary servo systems (e.g., galvanometer scanner) are disclosed. A position error signal is analyzed for signal anomalies that can signify bearing damage. A DC offset ramp is applied to ...
10/18/2005
6831936Pulse control in laser systems
A pulsed laser system includes a laser pump, a laser rod, a reflector interposed between the laser pump and the laser rod, through which energy from the laser pump enters the laser rod, an output reflector through which energy is emitted from the laser rod, a switch...
12/14/2004
6822187Robotically operated laser head
A laser cutting or welding device, the device having a laser head (10) and a robot (35), wherein the laser head is attached to the robot (35). The laser head (10) has a housing (12), a focal lens (26) disposed within the hou...
11/23/2004
6819438Technique for fabricating high quality optical components
To determine the uniformity of an optical component, a light beam is directed to impinge on a surface of an optical component at each of multiple points. A characteristic of the light beam impinging on the optical component surface at each of the multiple points is ...
11/16/2004
6809451Galvanometer motor with composite rotor assembly
A limited rotation torque motor is disclosed that includes a rotor and a stator. The rotor includes a plurality of pairs of magnetic poles and the stator includes a plurality of pairs of stator coils. Each stator coils extends along a longitudinal length of the moto...
10/26/2004
6777645High-speed, precision, laser-based method and system for processing material of one or more targets within a field
A precision, laser-based method and system for high-speed, sequential processing of material of targets within a field are disclosed that control the irradiation distribution pattern of imaged spots. For each spot, a laser beam is incident on a first anamorphic opti...
08/17/2004
6749309Optical element for scanning system and method of manufacture thereof
An optical element is disclosed for use in a scanning system. The optical element comprises a carbon-based substrate having a first specific stiffness, and a titanium carbide coating having a second specific stiffness. The carbon-based substrate and the titanium car...
06/15/2004
6710487Rotary device with matched expansion ceramic bearings
A high precision torque motor, including a partial rotation drive suitable for use in a galvanometer scanner, where the rotor is supported within the stator and housing assembly on all ceramic ball bearings, including inner and outer races and bearing balls. The cer...
03/23/2004
6639177Method and system for processing one or more microstructures of a multi-material device
A method and system for processing at least one microstructure which is part of a multi-material device containing a plurality of microstructures is provided. The at least one microstructure has a designated region for target material removal. The method ...
10/28/2003
6612015Method for making a galvanometer with axial symmetry
A method of fabricating a limited-rotation motor that is characterized by axial stability of a rotor that includes a permanent-magnet armature and further characterized by a relatively small inherent axial force on the rotor. The rotor is supported by a p...
09/02/2003
6593854System of monitoring bearing performance
A system for qualifying and monitoring bearing performance and condition in a rotary servo system. A position error signal is analyzed for signal anomalies that can signify bearing damage. A DC offset ramp is applied to the position error signal to test w...
07/15/2003
6448673Controlled high speed reciprocating angular motion actuator
A reciprocating rotary action actuator consisting of a rotor and stator that can be added to a bi-directional rotary motor or galvanometer scanner, where the stator has a ring magnet and a pair of soft iron pole pieces that concentrate the flux of the rin...
09/10/2002
6433449Galvanometer unit
A galvanometer unit includes a limited-rotation motor with a load element such as a mirror attached to a shaft extending from the motor. In a servo loop that controls the angular position of the mirror, a position-sensor attached to the shaft provides pos...
08/13/2002
6390684Method and apparatus for reducing stress on rotating shaft bearings
In a reciprocating rotor device such as a scanning galvanometer, a bearing assembly consisting of a rheological bearing coupler interposed between the rotor shaft and the bearing support structure or housing, where the rheological bearing coupler is relat...
05/21/2002
6380649Galvanometer unit
A galvanometer unit comprises a limited-rotation motor with a load element such as a mirror attached to a shaft extending from the motor. In a servo loop that controls the angular position of the mirror, a position-sensor attached to the shaft provides po...
04/30/2002
 
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