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An armor with rollers is provided that enables a user to move in all positions by rolling on a hard and smooth surface while constantly varying his bearing points on the ground.
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| Number | Title | Issue Date |
| 6214524 | Controlled amine poisoning for reduced shrinkage of features formed in photoresist A semiconductor device preparing according to a process comprising the step of photolithographic features formed in a photoresist including exposing the photoresist to at least one material selected from the group consisting of at least one amine, at leas... | 04/10/2001 |
| 6117622 | Controlled shrinkage of photoresist A process for controlled shrinkage of photolithographic features formed in photoresist. A shrinkage profile is determined for the photoresist and sizes of the photolithographic features. The photoresist is then exposed to ultraviolet radiation and elevate... | 09/12/2000 |
| 6057084 | Controlled amine poisoning for reduced shrinkage of features formed in photoresist A process for reducing shrinkage of photolithographic features formed in a photoresist including exposing the photoresist to at least one material selected from the group consisting of at least one amine, at least one amide, at least one aldehyde, and nit... | 05/02/2000 |
| 5980638 | Double window exhaust arrangement for wafer plasma processor A plasma ashing chamber that uses an external radiant power source to uniformly heat the wafer is provided with a double plate window through which radiant heat and exhaust gases flow without interfering with each other.... | 11/09/1999 |
| 5961851 | Microwave plasma discharge device A method of removing material from a substrate, and a plasma discharge device wherein a plasma is excited by microwave energy having an electric field which is azimuthally and axially uniform in relation to the plasma tube. The microwave cavity is divided... | 10/05/1999 |
| 5838114 | Plural ferro-resonant power supplies for powering a magnetron where the aray lies in these power supplies being independent from each other and not utilizing any common components A power supply quickly restarts an electrodeless lamp which is temporarily turned off in an application using microwave radiation generated by a magnetron. When the electrodeless lamp operates in a full power mode, the power supply provides full power to ... | 11/17/1998 |
| 5791782 | Contact temperature probe with unrestrained orientation A combination contact temperature probe/wafer support includes a thermocouple enclosing probe head of low thermal mass and large contact area supported by a support means such that 1) there is a high thermal resistivity connection between the support mean... | 08/11/1998 |
| 5767626 | Electrodeless lamp starting/operation with sources at different frequencies An electrodeless lamp is started by coupling microwave power of a first frequency to a lamp cavity, while the discharge is maintained by coupling microwave power of a second frequency, wherein the first frequency is lower than the second frequency. A cool... | 06/16/1998 |
| 5674039 | System for transferring articles between controlled environments A SMIF system for transferring semiconductor wafers between two controlled environments, one being within a wafer cassette carrier and the other being within an enclosure around a wafer processing apparatus. In a carrier loading position, a carrier door r... | 10/07/1997 |
| 5606220 | Visible lamp including selenium or sulfur A lamp for providing visible light which utilizes a fill containing selenium and/or sulfur, or compounds of these substances. The lamp is excited such that the excited fill emits radiation from elemental selenium and/or elemental sulfur which is in a cont... | 02/25/1997 |
| 5571439 | Magnetron variable power supply with moding prevention A power supply for a magnetron varies a power output level and prevents moding of the magnetron. To provide a variable power output, a microprocessor senses an anode current and voltage of the magnetron. Based on the sensed signals, the microprocessor adj... | 11/05/1996 |
| 5504391 | Excimer lamp with high pressure fill An excimer lamp utilizing a high pressure fill. The fill includes a halogen at an operating pressure of greater than about 350 torr or the combination of a halogen and a rare gas at a total operating pressure of greater than about 2.5 atmospheres.... | 04/02/1996 |
| 5471109 | Method and apparatus for preventing reverse flow in air or gas cooled lamps A method and apparatus for preventing contaminated reverse flows in air or gas impingement cooled lamps. In an electrodeless lamp, a stream of clean air or gas is provided as a replacement for contaminated air.... | 11/28/1995 |
| 5446073 | Photopolymerization process employing a charge transfer complex without a photoinitiator Composition containing charge transfer complex from at least one unsaturated compound having an electron donor group and having an electron withdrawing group and being free of any photoinitiating compound is polymerized by being subjected to ultraviolet l... | 08/29/1995 |
| 5440137 | Screw mechanism for radiation-curing lamp having an adjustable irradiation area An apparatus and method for curing radiation curable material includes a lamp unit providing radiation in a converging beam directed toward a focal plane and forming a curing zone at a curing position for receiving the curable material. The lamp unit is m... | 08/08/1995 |
| 5438242 | Apparatus for controlling the brightness of a magnetron-excited lamp A power supply for providing a stable operating current to a magnetron-excited lamp. The power supply includes a DC to DC inverter for driving a primary winding of a high voltage transformer. The DC to DC inverter has a circuit including two pairs of swit... | 08/01/1995 |
| 5412684 | Microwave excited gas laser A metal vapor/inert gas laser comprises a laser tube containing an inert gas and a metallic material capable of vaporizing and lasing, a microwave energy source, and a slow wave structure proximate the laser tube for coupling microwave energy from the sou... | 05/02/1995 |
| 5404076 | Lamp including sulfur A high power lamp which utilzes a lamp fill containing sulfur or selenium, or compounds of these substances. An electrodeless lamp utilizing such a fill at a pressure at least as high as 1 atmosphere is excited at a power density in excess of 50 watts/cc.... | 04/04/1995 |
| 5334913 | Microwave powered lamp having a non-conductive reflector within the microwave cavity A microwave-powered discharge lamp having a microwave cavity, a discharge lamp mounted within the cavity, a reflector for light emitted by the lamp mounted outside the cavity, and a non-conductive reflector mounted within the cavity for outwardly reflecti... | 08/02/1994 |
| 5300331 | Method and apparatus for UV curing thick pigmented coatings A method and apparatus for the ultraviolet curing of pigmented coatings having a thickness from about 1 mm to about 10 mm at a high curing rate and a relatively low energy consumption per unit area of coating cured. A coated substrate is irradiated by a f... | 04/05/1994 |
| 5273723 | Resist oxidizer with catalytic reactor A catalytic reactor is used in the exhaust tract of a high pressure, high flow rate ozone asher to prevent resist deposit fouling of the exhaust tract.... | 12/28/1993 |
| 5247178 | Method and apparatus for treating fluids by focusing reflected light on a thin fluid layer Apparatus for treating a fluid by irradiating a thin film of the fluid with high intensity, concentrated light. The irradiation affects chemical physical or biological activity changes in the fluid.... | 09/21/1993 |
| 5227698 | Microwave lamp with rotating field A microwave powered lamp wherein microwave energy is coupled to a cavity in which an electrodeless bulb is disposed, such that a rotating field of constant ellipticity is established in the cavity.... | 07/13/1993 |
| 5118989 | Surface discharge radiation source A surface discharge excimer light source which employs a one sided cell wherein all electrodes and the dielectric are on one side of the discharge space. The light produced by the device is neither shadowed nor attenuated by an electrode, and the electrod... | 06/02/1992 |
| 5117312 | Apparatus including concave reflectors and a line of optical fibers An optical system comprising reflectors of elliptical and circular cross section for efficiently coupling radiation from a large scale radiation source such as a light bulb into an optical fiber bundle.... | 05/26/1992 |
| 5071485 | Method for photoresist stripping using reverse flow A method and apparatus for stripping a photoresist layer from a semiconductor wafer, wherein oxidizing gas is fed from the edge of the wafer to the center. The oxidizing gas may be directed so that it is incident on the heated wafer support platform befor... | 12/10/1991 |
| 5021704 | Method and apparatus for cooling electrodeless lamps Apparatus for cooling the lamp envelope of an electrodeless lamp which includes a conduit for carrying cooling gas into the vicinity of the lamp envelope and directing the cooling gas towards the lamp envelope through a slotted orifice in a wall of the co... | 06/04/1991 |
| 5005519 | Reaction chamber having non-clouded window A reaction chamber for performing a chemical vapor deposition process wherein the window through which the light must pass is prevented from becoming clouded. The chamber is divided by baffles into a reactant zone, a buffer zone, and a window zone, and th... | 04/09/1991 |
| 4978891 | Electrodeless lamp system with controllable spectral output An electrodeless lamp system and method for providing light output having a controlled spectral distribution. A lamp having a fill which is not fully vaporized at the lamp operating temperature and which emits in a characteristic region of the spectrum is... | 12/18/1990 |
| 4975625 | Electrodeless lamp which couples to small bulb An electrodeless lamp which couples strong microwave fields to a very small bulb of diameter about 1/2' or smaller. The lamp is operated in a mode which is independent of the height of the cavity and which provides electric field lines parallel to such he... | 12/04/1990 |
| 4970056 | Ozone generator with improved dielectric and method of manufacture An ozone generating cell which utilizes a quartz dielectric for providing high purity ozone. The quarts dielectric is cemented to one of the electrodes of the cell, and is then ground to a desired dimension.... | 11/13/1990 |
| 4954756 | Method and apparatus for changing the emission characteristics of an electrodeless lamp A method of modifying light and heat emission patterns from an electrodeless lamp which includes an envelope containing a plasma-forming medium and a source of electromagnetic energy coupled to the plasma-forming medium. The method consists of rotating th... | 09/04/1990 |
| 4954755 | Electrodeless lamp having hybrid cavity A microwave powered electrodeless lamp which employs a hybrid cylindrical cavity which is part mesh and part solid. The cylindrical mesh portion permits the lamp to be used with an external reflector while the cylindrical solid portion enables a plurality... | 09/04/1990 |
| 4947080 | Apparatus for rotating an electrodeless light source A microwave generated light source including a lamp envelope having apparatus for rotating the envelope about an axis which includes an electric motor with a hollow shaft, an elongated stem attached to the envelope and extending within the hollow shaft an... | 08/07/1990 |
| 4902935 | Method and apparatus for evening out the temperature distribution of electrodeless lamp bulbs An electrodeless lamp bulb is rotated about an axis which is at a designated angle to the predominant direction of the electrical field. This has the effect of evening out the temperature distribution about the bulb and reducing the formation of hot and c... | 02/20/1990 |
| 4894592 | Electrodeless lamp energized by microwave energy Apparatus for inactivating the source of microwaves for an electrodeless lamp to prevent accidental release of microwaves into the environment as a result of failure to assemble the lamp with a conductive mesh. An electrodeless lamp which is provided with... | 01/16/1990 |
| 4887192 | Electrodeless lamp having compound resonant structure An electrodeless lamp which couples to a small bulb and obtains a relatively high light output therefrom. A cavity which comprises a compound resonant structure including vestibule and reflector portions is provided. The combination of vestibule and refle... | 12/12/1989 |
| 4887008 | Electrodeless lamp bulb of modified shape for providing uniform emission of radiation An electrodeless lamp bulb of modified shape for providing more uniform emission of radiation. In the preferred embodiment the bulb is primarily in the shape of a sphere, but has at least a non-spherical portion comprised of diametrically opposed relative... | 12/12/1989 |
| 4885047 | Apparatus for photoresist stripping An apparatus for rapidly stripping a photoresist which utilizes an oxidizing fluid such as ozone. A very thin layer of oxidizing fluid of four millimeters or less is flowed over the photoresist. The fluid flows at high velocity over the resist, while the ... | 12/05/1989 |
| 4868509 | Method and apparatus for detecting magnetron power supply failure A method and apparatus for detecting system failure in a magnetron power supply circuit. The apparatus is capable of providing an indication as to whether it is the power supply or the magnetron which has failed. A dual half wave doubler power supply circ... | 09/19/1989 |
