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| Number | Title | Issue Date |
| 6409222 | Torque confirmation fitting The torque confirmation fitting is used for coupling one section of tubing to another and includes a fitting body, a fitting nut, and a torque confirmation portion. The fitting body has a nose section that supports an end of one of the sections of tubing.... | 06/25/2002 |
| 6354601 | Seal for wafer containers A wafer container comprising an enclosure portion with a door frame defining an opening for insertion and removal of wafers and a door for insertion into the door frame for closing the opening and sealing with the door frame has an improved elastomeric se... | 03/12/2002 |
| 6289912 | Pinch element plastic valve A valve has a contractible valve element formed of an inner laminae of PFA, an outer laminae of PTFE with the outer laminae having a boss to provide positive compression and positive distension of the valve element. The portion that constrict is welded to... | 09/18/2001 |
| 6267245 | Cushioned wafer container A wafer container comprising a receptacle and door provides for horizontal minimal contact support of wafers and provides for vertical support without one surface support intermediate the front edge support and rear edge support. The wafer carrier has for... | 07/31/2001 |
| 6248177 | Method of cleaning a wafer carrier A method of cleaning a wafer carrier utilizes two isolated fluidic circuits. The wafer carrier having an interior and an exterior. The carrier is sealingly attached to a cleaning apparatus having separate isolated areas, one isolated area including the in... | 06/19/2001 |
| 6216874 | Wafer carrier having a low tolerance build-up A low tolerance build-up wafer carrier and method for assembling the same for supporting semiconductor wafer disks and for interfacing with processing equipment. Press-fit fasteners are used to assemble composite carriers and attach equipment interface po... | 04/17/2001 |
| 6206196 | Door guide for a wafer container A semiconductor wafer carrier has an enclosure with a door frame defining an opening for insertion and removal of wafers, a door for closing and sealing said opening, and separately formed door guides for controlling the interface between said door and th... | 03/27/2001 |
| 6183021 | Pass-through dual containment fitting A pass-through dual containment fitting that protectively seals a portion of pass-through tubing has a fitting body that incorporates a first end, a second end and a collar, each having a longitudinal bore for receiving the pass-through tubing. The second... | 02/06/2001 |
| 6164530 | Disk carrier with transponder The present invention provides a method and apparatus for monitoring the progress of a plurality of batches of semiconductor wafer or memory disks through a multiplicity of processing operations at various locations within a plant facility and maintaining... | 12/26/2000 |
| 6135156 | Tubing closure The tube closure comprises a cap and a nut which work in concert with each other to effectively seal a nipple at the end of a threaded tube or pipe and which facilitate removal of the cap. The cap has a flared end portion, a narrowed neck portion, a head ... | 10/24/2000 |
| 6116547 | Modular tubing support and constrainment device A system and method for isolating the compressive and tensive forces created in a section of flexible tubing whose length expands and contracts in response to the fluid it conveys, while constraining the expansion of the tubing to a substantially horizont... | 09/12/2000 |
| 6082540 | Cushion system for wafer carriers In a preferred embodiment of the invention, a transport module suitable for 300 mm wafers has a cushioning system that attaches to the interior of an enclosure door. The system comprises a pair of upright parallel cushions, each comprising an elongate bas... | 07/04/2000 |
| 6082547 | Adapter jig A plastic jig which may be injection molded has a plurality of square pockets, each pocket having a pair of integral spring loaded fingers on two adjacent sides of square component trays for repeatedly and consistently positioning the component trays plac... | 07/04/2000 |
| 6079597 | Containment system A blow molded drum has a port including a neck with exterior buttress threads and a port opening having a sleeve fusion bonded in the neck. The sleeve having a inner cylindrical sealing surface, and a shoulder. A drop-in down tube assembly seats with the ... | 06/27/2000 |
| 6070730 | Disk container A container for disks has an improved latching mechanism. The container comprises a cassette with sidewalls with slots for holding disks in an axial arrangement, two opposite endwalls each have a U-shaped recess extending downwardly from the open top, a t... | 06/06/2000 |
| 6039186 | Composite transport carrier A composite wafer carrier for holding and restraining circular semiconductor wafer disks during their transport, storage, and processing. The composite wafer carrier generally comprising an open top and bottom for insertion and removal of wafer disk, an u... | 03/21/2000 |
| 6010008 | Transport module A module with an openable and closeable door has a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the module for supporting wafers. An advantage and... | 01/04/2000 |
| 6000550 | Wafer carrier box hinge A two part hinge for containers and boxes. The first part includes a pair parallel arms which include axially aligned opposing sockets which are configured to rotatingly receive pintle ends. The sockets are provided with radially disposed channels which e... | 12/14/1999 |
| 5957292 | Wafer enclosure with door A sealable enclosure for wafers has a door with an easily accessible and disassembleable latching mechanism which utilizes a minimal number of moving parts. The door includes an enclosure with a cammed member rotatable on a post and in engagement with a p... | 09/28/1999 |
| 5924441 | Diaphragm valve The invention comprises a three-way diaphragm valve. The valve has a housing having three flow ducts each leading into an open interior chamber. The open interior chamber is divided into a central chamber, an upper chamber and a lower chamber. A first val... | 07/20/1999 |
| 5915562 | Transport module with latching door A wafer container has an open front defined by a door receiving frame and a door sized for the door receiving frame. The door receiving frame has slots on opposite sides and the door utilizes latching linkages and lifting linkages cooperate to extend, lif... | 06/29/1999 |
| 5871182 | Modular tubing support and constrainment device A modular tubing support and constrainment device for supporting and constraining tubing comprising a plurality of modular support trays, a module connector portion and a clamping portion. The modular support trays each incorporate a bottom portion for su... | 02/16/1999 |
| 5837180 | Composite plastic sanitary fitting A composite sanitary fitting in which an inner body portion is secured within a overmolded stiffening sleeve which provides strength and rigidity to the fitting. The main body is comprised of a plastic such as PFA and the outer stiffening sleeve is compri... | 11/17/1998 |
| 5833073 | Tacky film frame for electronic device A device for storing and transporting electronic devices such as semiconductor chips, comprising: a frame having a top side, a bottom side, a periphery, and a window within the periphery, a thin film covering the window, the thin film having on its top su... | 11/10/1998 |
| 5816410 | Wafer cushions for wafer shipper The present invention is a shipping container for safely storing articles such as semiconductor wafers. The shipping container has two sidewalls sealingly connected to two end walls to form a generally rectangular interior wafer confinement area. A top co... | 10/06/1998 |
| 5791486 | Integrated circuit tray with self aligning pocket A tray for storing an integrated circuit component has an upper side and an array of terminals on a bottom side, four side walls, and four corners. The tray has a substantially planar base having a top surface and a bottom surface and a periphery. A plura... | 08/11/1998 |
| 5788082 | Wafer carrier A wafer container for transporting or holding wafers in a horizontal axially aligned arrangement has minimal four point regions of wafer support at the edge portion of the wafers. A preferred embodiment has a first container portion and a closeable door. ... | 08/04/1998 |
| 5749469 | Wafer carrier A container for semiconductor wafers is disclosed which has a multiplicity of C-shaped wafer holders for individually securing each wafer. Each wafer holder has an open side for receiving and releasing wafers, a closed side with a support portion for supp... | 05/12/1998 |
| 5711427 | Wafer carrier with door A wafer container has an open front defined by a door frame and a door sized for the door frame. The door receiving frame has slots on opposite sides and the door utilizes latching portions that extend and retract from the edge portion of the door into an... | 01/27/1998 |
| 5642813 | Wafer shipper and package A plastic container for storing and shipping semiconductor wafers comprising a wafer carrier of substantially rigid and transparent material supporting the wafers and maintaining the wafers in spaced relation to each other, top and bottom covers for the w... | 07/01/1997 |
| 5597085 | Composite, pressure-resistant drum type container A composite, drum type container for storing and dispensing corrosive fluids comprises an inner plastic liner of polyethylene and an outer plastic shell. The end walls of the outer shell are substantially dome-shaped to add strength to the container, and ... | 01/28/1997 |
| 5586658 | Wafer cushions for wafer shipper A plastic container for handling, storing and shipping semiconductor wafers comprising a wafer carrier supporting the wafers and maintaining the wafers in spaced relation to each other, a plurality of rows of resiliently flexible tabs of progressively inc... | 12/24/1996 |
| 5575394 | Wafer shipper and package A plastic container for storing and shipping semiconductor wafers comprising a wafer carrier of substantially rigid and transparent material supporting the wafers and maintaining the wafers in spaced relation to each other, top and bottom covers for the w... | 11/19/1996 |
| 5482161 | Mechanical interface wafer container A standardized mechanical interface (SMIF) pod for use in conjunction with SMIF systems is disclosed. The pod is utilized for transporting article, such as semiconductor wafers or the like, between locations such as SMIF processing stations. The pod inclu... | 01/09/1996 |
| 5472244 | Plastic coupling for plastic tubing A plastic coupling for plastic tubing having a groove annulus formed between a first circumferential groove on the outer periphery of the enlarged diameter portion of a connection tube and a second circumferential groove on the inner periphery of a cap nu... | 12/05/1995 |
| 5449017 | Proximity sensing probe A capacitive proximity monitoring device for corrosive atmosphere environments comprising a capacitance field element or sensing element disposed in such a corrosive atmosphere environment and being made of conductive plastic resistant for such a corrosiv... | 09/12/1995 |
| 5339074 | Very low frequency tracking system Apparatus identifying an instrumentality such as a person's hand or an article of merchandise, wherein the instrumentality carries a tag incorporating a transponder generating and transmitting a radio frequency identification signal in response to a radio... | 08/16/1994 |
| 5335696 | Three-way weir style valve The invention disclosed is a three-way weir valve. The valve housing has a common flow duct and two additional flow ducts, all connectable to external flow lines. A weir with two valve seats on opposite sides of the weir separates the common flow duct fro... | 08/09/1994 |
| 5316035 | Capacitive proximity monitoring device for corrosive atmosphere environment A capacitive proximity monitoring device for corrosive atmosphere environments comprising a capacitance field element or sensing element disposed in such a corrosive atmosphere environment and being made of conductive plastic resistant for such a corrosiv... | 05/31/1994 |
| 5297773 | Plastic valve with flexible tube and tube squeezing apparatus A plastic valve comprising a valve body, integral plastic valving duct means with rigid tubular plastic end portions for attachment to flow ducts carrying liquids to be valved, and a collapsible and distensible tubular plastic valving portion welded to th... | 03/29/1994 |
