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| Number | Title | Issue Date |
| 6665575 | Recipe editor for editing and creating process recipes with parameter-level security for various kinds of semiconductor-manufacturing equipment A universal recipe editor for editing of semiconductor-manufacturing recipes. The universal recipe editor can read recipes from a wide variety of semiconductor-manufacturing machines from different manufacturers using recipe distributed object model (R-DO... | 12/16/2003 |
| 6415193 | Recipe editor for editing and creating process recipes with parameter-level semiconductor-manufacturing equipment A universal recipe editor is for off-line viewing and editing of semiconductor-manufacturing recipes. The universal recipe editor can read recipes from a wide variety of semiconductor-manufacturing machines from different manufacturers using recipe distri... | 07/02/2002 |
