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"That’s an amazing invention, but who would ever want to use one of them?"
President Rutherford B. Hayes ; Said in 1876, after Alexander Graham Bell demonstrated the telephone to him at the White House
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| Number | Title | Issue Date |
| 7273289 | Vacuum compatible, high-speed, 2-D mirror tilt stage A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchabl... | 09/25/2007 |
| 6253464 | Method for protection of lithographic components from particle contamination A system that employs thermophoresis to protect lithographic surfaces from particle deposition and operates in an environment where the pressure is substantially constant and can be sub-atmospheric. The system (thermophoretic pellicle) comprises an enclos... | 07/03/2001 |
| 6031598 | Extreme ultraviolet lithography machine An extreme ultraviolet lithography (EUVL) machine or system for producing integrated circuit (IC) components, such as transistors, formed on a substrate. The EUVL machine utilizes a laser plasma point source directed via an optical arrangement onto a mask... | 02/29/2000 |
