Assignee: Entegris, Inc.

Location: Chaska, MN
No. of patents: 161

Number	Title	Issue Date
8082946	Liquid flow controller and precision dispense apparatus and system Fluid control apparatus including a proportional flow valve having a fluid inlet and a fluid outlet; a pneumatic proportional control valve in communication with the proportional flow valve for modulating the proportional flow valve; a frictional flow element having...	12/27/2011
7610117	System and method for flow monitoring and control One embodiment of the present invention can include a flow control device comprising an inlet, an outlet, a pressure loss element between the inlet and outlet, a pressure sensor located upstream from the constriction configured to measure a first pressure of a fluid...	10/27/2009
7607543	Reticle pod with isolation system The present invention provides a reticle container that is equipped with a secondary container which houses the reticle and is housed in the primary container. The secondary container is held within the primary container with shock and vibration isolation members so...	10/27/2009
7578407	Wafer container with sealable door A wafer container including an enclosure portion with a door frame defining an opening for insertion and removal of wafers and a door fittable in the door frame to seal the enclosure portion. A continuous elastomeric seal extends around the door inward of the periph...	08/25/2009
7575616	Low-profile surface mount filter Embodiments of the present invention provide low-profile surface mount filters. One embodiment of the present invention includes a filter housing adapted to mount on a substrate block having a plurality of flow paths and a filter cavity defined therein. The filter c...	08/18/2009
7572367	Liquid filtration device The present invention provides a liquid filtration device with internal flow paths that facilitate the purging of air bubbles from the device. The device includes internal channels that collect bubbles from fluid entering the filtration device and more efficiently d...	08/11/2009
7547049	O-ring-less low profile fittings and fitting assemblies Embodiments of the invention provide new fittings and fitting assemblies for tight, leak-proof filter and fluid connections in a pump useful in dispensing fluid onto wafers during a semiconductor manufacturing process. One embodiment of a fitting assembly comprises ...	06/16/2009
7543596	Liquid flow controller and precision dispense apparatus and system Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid mea...	06/09/2009
7540901	Filters employing both acidic polymers and physical-adsorption media A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in...	06/02/2009
7534287	Porous sintered composite materials The present invention is directed to porous composite materials comprised of a porous base material and a powdered nanoparticle material. The porous base material has the powdered nanoparticle material penetrating a portion of the porous base material; the powdered ...	05/19/2009
7528936	Substrate container with pressure equalization The present invention is a pod for containing a particulate sensitive substrate and for providing pressure equalization between the exterior and an interior environment of the pod and for minimizing gaseous fluid flow inside adjacent to the particulate sensitive sub...	05/05/2009
7523830	Wafer container with secondary wafer restraint system A wafer container providing improved wafer restraint during physical shock events. In embodiments of the invention, a secondary wafer restraint structure defining a plurality of notches is interposed between opposing wafer restraint members on the door of the contai...	04/28/2009
7520984	Filter cartridge construction A filtration module (10) is provided which includes a manifold (12), a filter cartridge (16) and a bowl (14) which houses the filter cartridge (16). The filter cartridge (16) and bowl (14) are connected to each other ...	04/21/2009
7510692	Hydride gas purification for the semiconductor industry A method for hydride gas purification uses materials having at least one lanthanide metal or lanthanide metal oxide. The method reduces contaminants to less than 100 parts per billion (ppb), preferably 10 ppb, more preferably 1 ppb. The material can also include tra...	03/31/2009
7494265	System and method for controlled mixing of fluids via temperature Embodiments of the present invention provide a system and method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. In gene...	02/24/2009
7476087	Pump controller for precision pumping apparatus A pump controller and pump controlling method for dispensing a precise amount of low viscosity fluid are provided in which the problems of double dispenses and stuttered dispenses are avoided. In particular, the timing of the valves and motors in the pumping apparat...	01/13/2009
7469932	Receptor for a separation module A stationary receptor for a separation module is positioned between a pump housing and the separation module. The stationary receptor has a pivot line and two shelves on its outer surface which permit fitting the separation module into the stationary receptor adjace...	12/30/2008
7462283	System and method for liquid filtration based on a neutral filter material The present invention teaches, that the removal of particles of any charge from liquid stream is possible by mechanisms other than sieving with good flow and low pressure drop. The use of a weakly charged or neutral surface on the one or more filters within a pre-se...	12/09/2008
7447600	Fluid flow measuring and proportional fluid flow control device Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a valve can ...	11/04/2008
7445710	Filtration module including unitary filter cartridge-bowl construction A filtration module is provided which includes a manifold (100), a filtration cartridge (104) and a bowl (102) that houses the filter cartridge. The filtration cartridge and bowl are connected to each other to form a unitary construction. The fi...	11/04/2008
7443483	Systems and methods for fluid flow control in an immersion lithography system Systems and methods for controlling fluid flow in an immersion lithography system. The system includes a fluid flow path that allows fluid to flow from a source through a fluid retention hood and then a fluid control valve. The system includes a pressure sensing sys...	10/28/2008
7430893	Systems and methods for detecting contaminants The present invention relates to a system and method for sampling a gas flow to measure one or more contaminants within a semiconductor processing tool. The system includes a portable unit containing one or more dry traps, Tenax traps and, if desired, wet impingers....	10/07/2008
RE40513	Cushion system for wafer carriers In a preferred embodiment of the invention, a transport module suitable for 300 mm wafers has a cushioning system that attaches to the interior of an enclosure door. The system comprises a pair of upright parallel cushions, each comprising an elongate base portion w...	09/23/2008
7422107	Kinematic coupling with textured contact surfaces A substrate kinematic coupling or guide plate for a substrate carrier having textured or patterned surfaces at the points of contact to reduce frictional forces generated between automated processing equipment and the kinematic coupling. The textured surface reduces...	09/09/2008
7407708	High-strength, chemically resistant laminar film with limited extractables A chemically resistant, extractable free, composite laminar film including polyimide, PFA and m-PTFE layers. ...	08/05/2008
7407594	Liquid filtration device The present invention provides a liquid filtration device with internal flow paths that facilitate the purging of air bubbles from the device. The device includes internal channels that collect bubbles from fluid entering the filtration device and more efficiently d...	08/05/2008
7404493	Filter device including pleated filter incorporated in a housing The present invention provides a filter that can minimize the amount of residual liquid within the housing or container with a simplified construction. The article includes a cylinder portion having a cylindrical internal space with both ends open, a cylindrically f...	07/29/2008
7400383	Environmental control in a reticle SMIF pod The present invention provides a standardized mechanical interface (SMIF) reticle pod that is configured to provide a controlled environment for supporting a reticle wherein the controlled environment is maintained substantially free of crystal growth causing contam...	07/15/2008
7389689	Non-porous adherent inert coatings and methods of making The present invention include non-porous adherent coatings of chemically inert high purity poly-oligomers deposited on substrates. The coatings are applied and cured on the substrates at relatively low temperatures which permits the coating process to be performed w...	06/24/2008
7387661	Pleated construction for effecting gas transfer membrane A contactor for effecting passage through a membrane from a first fluid a second fluid is provided. A cylindrical pleated membrane cartridge is positioned within a housing having a first inlet and a first outlet from a first fluid and at lest a second outlet for a s...	06/17/2008
7383967	Apparatus and methods for pumping high viscosity fluids A system for dispensing and filtering fluid is disclosed, in which the fluid flow path is substantially vertical from the fluid inlet through fluid dispense. Substantially all wetted surfaces are Teflon® or some similar non-contaminating fluid, for applications suc...	06/10/2008
7384149	Lithographic projection apparatus, gas purging method and device manufacturing method and purge gas supply system A lithographic projection apparatus includes a support configured to support a patterning device, the patterning device configure to pattern the projection beam according to a desired patter. The apparatus has a substrate table configure to hold a substrate, a proje...	06/10/2008
7381243	Method for purifying carbon dioxide The invention is a method for the decontamination of CO2 to a sufficient level of purity to allow it to be used in the semiconductor industry. The invention comprises the exposure of fluid CO2 to a combination metallic states of at least one me...	06/03/2008
7377982	Method for the removal of airborne molecular contaminants using water gas mixtures The present invention discloses a method for the removal of a number of molecular contaminants from surfaces within a device. A purge gas containing oxygen and/or water is introduced into the interior of the device, contacting at least a portion of the interior surf...	05/27/2008
7378017	Disposable fluid separation device and manifold assembly design with easy change-out feature Fluid separation assembly that allows easy and fast change-out even in confined spaces, and also minimizes or eliminates leakage during change-out. A fluid separation unit having a housing containing separation means, the housing having an inlet and an outlet spaced...	05/27/2008
7376489	Method of identifying fluid purification equipment which is optimized for individual fluid purification systems An interactive method and apparatus are disclosed through which a fluid purification system operator inputs the system's parameters and the method then identifies one or more fluid purification equipment packages which will be optimized at the component level to the...	05/20/2008
7350821	Method and system for purging a dispensed fluid within a fluid dispensing system including a filter-free connector apparatus A connector apparatus is provided which is configured to replace a separation module in a system for dispensing a fluid. When it is desired to purge the system of a dispensed fluid, the connector apparatus, having the same configuration of an inlet and an outlet as ...	04/01/2008
7347329	Substrate carrier A carrier for transporting silicon semiconductor wafers during semiconductor wafer processing operations including an enclosure, a door and a flange structured to interface with a machine so that the carrier can be lifted by the machine. A lift saddle connects the f...	03/25/2008
7347937	Perfluorinated thermoplastic filter cartridge A filtration cartridge having a housing with an inlet and an outlet and a filtration membrane contained within the housing and located between the inlet and the outlet is described. The membrane is sealed in such a manner that all fluid must flow through the membran...	03/25/2008
7344030	Wafer carrier with apertured door for cleaning A wafer carrier door having an inner door portion and an outer door portion. The inner door portion has a substantially continuous inner surface. The outer door portion extends over at least a portion of the inner door portion. The outer door portion has a plurality...	03/18/2008

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Assignee: Entegris, Inc.