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Assignee: Cascade Microtech, Inc.


Location: Beaverton, OR
No. of patents: 208

1            
NumberTitleIssue Date
8167648Low noise connector with cables having a center, middle and outer conductors
An adapter conductively interconnects a chuck of a probe station and an instrument. The adapter includes a signal conductor conductively connected to the chuck and selectively connectable to a respective one of a ground potential, a bayonet connector output and a si...
05/01/2012
8094925Method for increasing the accuracy of the positioning of a first object relative to a second object
A method is provided for increasing the accuracy of the positioning of a first object relative to a second object. The method overcomes the disadvantageous influence of thermal drift between a first and a second object during a positioning of a first object on a sec...
01/10/2012
8072586Arrangement and method for focusing a multiplane image acquisition on a prober
A focused multi-planar image acquisition in real time even while a test object is moving, is achieved with a system and a method for a focused multi-planar image acquisition in a prober. When a surface of a test object is positioned laterally in relation to tips of ...
12/06/2011
8069491Probe testing structure
A calibration structure for probing devices. ...
11/29/2011
8013623Double sided probing structures
A test configuration for double sided probing of a device under test includes a holder to secure the device under test in a first orientation, a calibration substrate secured in a second orientation and a probe capable of calibration using the calibration substrate ...
09/06/2011
7969173Chuck for holding a device under test
A chuck for a probe station. ...
06/28/2011
7940069System for testing semiconductors
A testing system that includes an plural imaging devices capturing plural video sequences from a single optical path and concurrently displaying the video sequences for effectively positioning a probe for testing a semiconductor wafer. ...
05/10/2011
7932737Prober for testing devices in a repeat structure on a substrate
A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, ...
04/26/2011
7908107Line-reflect-reflect match calibration
A method of compensating a calibration for a vector network analyzer includes performing calibrations on at least a pair of ports to determine error terms associated with each port wherein at least one of the error terms is based upon selecting the reactance of the ...
03/15/2011
7900347Method of making a compliant interconnect assembly
An apparatus and method for making a compliant interconnect assembly adapted to electrically couple a first circuit member to a second circuit member. The first dielectric layer has a first major surface and a plurality of through openings. A plurality of electrical...
03/08/2011
7898273Probe for testing a device under test
A probe measurement system for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies. ...
03/01/2011
7893704Membrane probing structure with laterally scrubbing contacts
A membrane probing assembly includes a support element having an incompressible forward support tiltably coupled to a rearward base and a membrane assembly, formed of polyimide layers, with its central region interconnected to the support by an elastomeric layer. Fl...
02/22/2011
7888957Probing apparatus with impedance optimized interface
In a membrane probing apparatus, the impedance of the interface between coaxial cables connected to the test instrumentation and the membrane supported co-planar waveguide that conductively connects to the probe's contacts is optimized by eliminating a ground plane ...
02/15/2011
7876115Chuck for holding a device under test
A chuck includes a conductive element that contacts a device under test in a location on the chuck. The chuck includes an upper surface for supporting a device under test and a conductive element that extends through the chuck to the upper surface of the chuck. The ...
01/25/2011
7876114Differential waveguide probe
A wafer probe comprises a contact conductively interconnected with the wall of a waveguide channel and supported by a substrate that projects from an end of a waveguide channel. ...
01/25/2011
7857631Socket with a housing with contacts with beams of unequal lengths
A socket assembly includes a housing with a plurality of through openings that extend between opposite surfaces of the housing. First and second plurality of contact members are positioned in a plurality of the through openings. The contact members each include majo...
12/28/2010
7764072Differential signal probing system
A probe measurement system comprises a probe with a linear array of probe tips enabling a single probe to be used when probing a test structure with a differential signal. ...
07/27/2010
7761986Membrane probing method using improved contact
A method of probing an electrical device using a membrane probing system having an improved contact. A membrane probe forms a contact having a ridge with a pair of inclined surfaces defining an acute angle such that, when pressed into an electrical pad of a device t...
07/27/2010
7761983Method of assembling a wafer probe
The present invention relates to a method of assembling a probe for testing of integrated circuits or other microelectronic devices. ...
07/27/2010
7759953Active wafer probe
A probe suitable for probing a semiconductor wafer that includes an active circuit. The probe may include a flexible interconnection between the active circuit and a support structure. The probe may impose a relatively low capacitance on the device under test. ...
07/20/2010
7750652Test structure and probe for differential signals
A test structure including a differential gain cell and a differential signal probe include compensation for the Miller effect reducing the frequency dependent variability of the input impedance of the test structure. ...
07/06/2010
7723999Calibration structures for differential signal probing
A plurality of calibration structures facilitate calibration of a probing system that includes a differential signal probe having a linear array of probe tips. ...
05/25/2010
7688097Wafer probe
The present invention relates to a probe tip assembly for testing of integrated circuits or other microelectronic devices. The probe tip assembly may include a plurality of independently flexible contact fingers extending from a support, each contact finger spaced a...
03/30/2010
7688091Chuck with integrated wafer support
An improved chuck with lift pins within a probe station. The chuck assembly may have an outer periphery and an upper surface. The lift pins may be positioned within the periphery of the chuck assembly and may be capable of relative vertical movement with respect to ...
03/30/2010
7688062Probe station
A probe station for testing a wafer. ...
03/30/2010
7681312Membrane probing system
A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is ha...
03/23/2010
7656172System for testing semiconductors
A semiconductor testing system that includes an plural imaging devices for capturing plural video sequences from a single optical path and concurrently displaying the video sequences for effectively positioning a probe for testing a semiconductor wafer. ...
02/02/2010
7639003Guarded tub enclosure
A probe station with an improved guarding structure. ...
12/29/2009
7626379Probe station having multiple enclosures
A probe station for probing a test device has a chuck element for supporting the test device. An electrically conductive outer shield enclosure at least partially encloses such chuck element to provide EMI shielding therefor. An electrically conductive inner shield ...
12/01/2009
7619419Wideband active-passive differential signal probe
A wideband differential signal probe includes separate paths to convert a lower frequency component and a higher frequency component of a differential signal to a lower frequency single ended signal and a higher frequency single ended signal which are combined for t...
11/17/2009
7618590Fluid dispensing system
A fluid dispensing apparatus and system for facilitating dispensing small volume, fluid samples to microfluidic devices. ...
11/17/2009
7616017Probe station thermal chuck with shielding for capacitive current
To reduce the time to make measurements and the noise in measurements obtained by probing a device supported on surface of a thermal chuck in a probe station, a conductive member is arranged to intercept current coupling the thermal unit of the chuck to the surface ...
11/10/2009
7609077Differential signal probe with integral balun
A probe with integral balun enables connecting a device utilizing differential signals to a source or a sink of single ended signals. ...
10/27/2009
7595632Wafer probe station having environment control enclosure
A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably...
09/29/2009
7589518Wafer probe station having a skirting component
A probe station includes a fully guarded chuck assembly and connector mechanism for increasing sensitivity to low-level currents while reducing settling times. The chuck assembly includes a wafer-supporting first chuck element surrounded by a second chuck element ha...
09/15/2009
7554322Probe station
A probe station for testing a wafer. ...
06/30/2009
7550984Probe station with low noise characteristics
A cable includes an inner conductor, an inner dielectric, and a guard conductor, where the inner dielectric is between the inner conductor and the guard conductor. The cable also includes an outer dielectric, and a shield conductor, where the outer dielectric is bet...
06/23/2009
7550983Membrane probing system with local contact scrub
A membrane probing assembly includes a support element having an incompressible forward support tiltably coupled to a rearward base and a membrane assembly, formed of polyimide layers, with its central region interconnected to the support by an elastomeric layer. Fl...
06/23/2009
7541821Membrane probing system with local contact scrub
A membrane probing assembly includes a support element having an incompressible forward support tiltably coupled to a rearward base and a membrane assembly, formed of polyimide layers, with its central region interconnected to the support by an elastomeric layer. Fl...
06/02/2009
7535247Interface for testing semiconductors
A system includes an imaging device suitable for effectively positioning a probe for testing a semiconductor wafer. The system includes an objective lens for sensing the device under test and an imaging device sensing a first video sequence including multiple frames...
05/19/2009
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