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| Number | Title | Issue Date |
| 8008639 | System for processing an object A processing system comprises a gas supply apparatus with which process gas is supplied to an object. An activation beam activates the gas thereby inducing a chemical reaction between material at the surface of the object and the process gas causing ablation of mate... | 08/30/2011 |
| 7910887 | Electron-beam device and detector system An electron-beam device having a beam generator for generating an electron beam, an objective lens for focusing the electron beam on an object, and at least one detector for detecting electrons scattered on the object or emitted by the object. Furthermore, a detecto... | 03/22/2011 |
| 7521677 | Method and device for distance measurement A method and a device for determining the distance from the sample to be examined to at least one reference point which function independently of the type of sample. A signal is modulated to a first potential of a sample and a primary particle beam is directed at th... | 04/21/2009 |
| 7507962 | Electron-beam device and detector system An electron-beam device having a beam generator for generating an electron beam, an objective lens for focusing the electron beam on an object, and at least one detector for detecting electrons scattered on the object or emitted by the object. Furthermore, a detecto... | 03/24/2009 |
| 7435973 | Material processing system and method A material processing system for processing a work piece is provided. The material processing is effected by supplying a reactive gas and energetic radiation for activation of the reactive gas to a surrounding of a location of the work piece to be processed. The rad... | 10/14/2008 |
| 7425701 | Electron-beam device and detector system An electron-beam device having a beam generator for generating an electron beam, an objective lens for focusing the electron beam on an object, and at least one detector for detecting electrons scattered on the object or emitted by the object. Furthermore, a detecto... | 09/16/2008 |
| 7084406 | Detector arrangement and detection method A detector arrangement for detecting position information contained in a beam (5) of charged particles is provided, comprising a plurality of position-sensitive detectors (17), each for supplying an image containing the position information of a positi... | 08/01/2006 |
| 7022987 | Particle-optical arrangements and particle-optical systems There are disclosed particle-optical beam splitters providing at least three beam-manipulating regions having magnetic fields of different field strengths provided therein for at least one particle beam passing the beam splitter. The beam splitter is, in first order... | 04/04/2006 |
| 6891168 | Particle-optical apparatus and method for operating the same An apparatus and a method to manipulate at least one beam of charged particles are provided. The apparatus comprises two rows of field source members 13 which are disposed periodically at a distance from each other such that there exist planes of symmetry S, ... | 05/10/2005 |
| 6878936 | Applications operating with beams of charged particles A particle-optical apparatus is proposed which comprises a particle-optical lens for deflecting a plurality of separate beam-charged particles which is provided by a plurality of finger electrodes provided along an opening of the lens. ... | 04/12/2005 |
