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| Number | Title | Issue Date |
| 6321780 | Valve for controlling flow rate of gas A valve has a valve body having a passage including a hole in which gas flows, a valve seat surrounding a port of the hole. A valve disc is provided for closing the port of the hole, and an actuator is provided for operating the valve disc in a sine curve... | 11/27/2001 |
| 6216739 | Integrated gas control device A plurality of connecting blocks are mounted on a base plate. Each block has a base body and a vertical cylindrical portion formed on the base body, and has a vertical hole. The base body has a horizontal hole opened at both sides thereof and communicated... | 04/17/2001 |
| 6073646 | Gas controlling device for integration The present invention relates to a gas controlling device for integration such that it can be simply removed or mounted without disassembling a gas line in a high purity gas supply system for a semiconductor. The gas controlling device for integration com... | 06/13/2000 |
| 6012479 | Integrated gas control device The present invention relates to an integrated gas control device in a high purity gas supply system for a semiconductor manufacturing apparatus in which a gas control line is made compact and gas control units are easily mounted or removed and a flow pas... | 01/11/2000 |
| 5755255 | Gate valve for regulating gas flow in semiconductor manufacturing A friction-free gate valve for regulating gas flow in semiconductor manufacturing comprises a gate which, prior to being lifted up for the valve-opening position, is horizontally flitted away from the passage wall surface against which it was pressed agai... | 05/26/1998 |
| 5752548 | Coupling for drainage pipings A coupling for vertical connection in sewage plumbing used in tall and high-rise buildings, is disclosed. The coupling is equipped in its inside walls with a pair of vortical blades for descending sewage streams from the upper floors into the coupling to ... | 05/19/1998 |
| 5678595 | Vacuum exhaust valve An improved vacuum exhaust valve is disclosed for vacuum-operated exhaust lines of chemical vapor deposition equipment, which includes a sheathed heater made of hollow metal tube spirally formed into a coil and heating wire inserted into the spiral tube, ... | 10/21/1997 |
| 5658021 | Pipe joint A pipe joint for connecting water supply pipe together and which utilizes compression seals between the pipe and the joint, and is comprised of a holding housing having a band body that surround a seal ring and a holding ring. A locking bolt is threadably... | 08/19/1997 |
| 5390895 | Slow vent valve A slow vent valve for semiconductor wafer manufacturing equipment is disclosed, which generates a gentle flow of nitrogen gas to the vacuum chamber enough to maintain an undisturbed ambient environment for the wafer being processed in the chamber, protect... | 02/21/1995 |
| 5295660 | Metal diaphragm valve with lock mechanism A metal diaphragm valve is disclosed, which has an improved locking mechanism capable of locking the valve in closed position. The mechanism comprises a roller that is snugly disposed in a cutout formed in the bonnet made integral with the knob which driv... | 03/22/1994 |
| 5112027 | Metal diaphragm valve A metal diaphragm valve includes a valve casing and an inverted bowl-shaped metal diaphragm made of an elastic material and having a downwardly projecting collar disk made integral with the metal diaphragm in its center. The metal diaphragm defines within... | 05/12/1992 |
| 5108069 | Metal diaphragm valve A metal diaphragm valve includes a valve casing, a diaphragm made of an elastic material and having an upward bulge in the center and a valve system in which the diaphragm is operated to close or establish a fluid-flow relationship between an inlet passag... | 04/28/1992 |
