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Assignee: Balzers und Leybold Deutschland Holding AG


Location: DE
No. of patents: 6

NumberTitleIssue Date
6010569Device for handling heavy components of a crystal puller according to the Czochralski method which is supported in a supporting frame
In a device for handling heavy components of a crystal puller according to the Czochralski method, a supporting beam that can be pivoted about one vertical leg of a supporting frame and vertically adjusted includes holding claws for accommodating componen...
01/04/2000
6004109Apparatus for the rapid evacuation of a vacuum chamber
A first vacuum pump (14) is connected to a vacuum chamber (5) by a primary intake line (13) having a first vacuum valve (4) therein. A second vacuum pump (15) is connected to the output of the first vacuum pump (14) by a connecting line (20) having a seco...
12/21/1999
5993622Apparatus for coating a web on a rotating drum by plasma assisted vapor deposition
A crucible (4) in a vacuum chamber (3) holds material to be evaporated, such as a metal or metal oxide or a mixture of a metal and a metal oxide, and a coating roll (6) guides a film web (8) a certain distance away from the material to be evaporated. A ch...
11/30/1999
5944967Dual target cathode assembly with shielding
A dual magnetron cathode assembly includes a pair of elongate, parallel targets in coplanar relationship fixed to respective magnetic yokes with associated rows of permanent magnets for producing a magnetic field over the targets. A common back plate is p...
08/31/1999
5879138Two-stage rotary vane vacuum pump
The invention pertains to a rotary vane vacuum pump (1) with a high vacuum stage (9, 22), with a fore-vacuum stage (8, 21), with a substantially cylindrical rotor (3) which has bearing and anchor segments (11 and 21, 22), a bearing segment (11) being situ...
03/09/1999
5821404Test gas leak indicator
The invention relates to a process for operating a test gas leak indicator (1) with a gas inlet (2) and a test gas-sensitive detector (4), in which all or part of a stream of gas containing the test gas reaching the inlet (2) is taken to the detector (4) ...
10/13/1998
 
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