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Assignee: Asm Nutool, Inc.

Location: Fremont, CA
No. of patents: 1

Number	Title	Issue Date
7029567	Electrochemical edge and bevel cleaning process and system An edge cleaning system and method is disclosed in which a directed stream of a mild etching solution is supplied to an edge area of a rotating workpiece, including the front surface edge and bevel, while a potential difference between the workpiece and the directed...	04/18/2006