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| Number | Title | Issue Date |
| 5734164 | Charged particle apparatus having a canted column A charged particle beam apparatus has a carrier for supporting a sample. A tilt mechanism is provided for tilting the wafer carrier through a range of attitudes including an attitude wherein a normal to the carrier defines a predetermined first angle on o... | 03/31/1998 |
| 5216235 | Opto-mechanical automatic focusing system and method The disclosed apparatus comprises a charged particle beam system and method including a particle beam generator for forming a beam of electrons, ions or other charged particles and for directing the beam along a predetermined axis to a focal point. Object... | 06/01/1993 |
| 5049745 | Phase-compensating vibration cancellation system for scanning electron microscopes A system for adjusting the scanning pattern of an electron beam in a scanning electron microscope to decrease image sensitivity to vibrations. In the system, a seismometer is connected to sense displacement velocity caused by vibrations, an integrator is ... | 09/17/1991 |
| 4922196 | Beam-blanking apparatus for stroboscopic electron beam instruments An electron-beam scanning device (10) includes two pairs of plates (22 and 24, 64 and 66) that are oriented at right angles to each other. The plates cause electric fields oriented at right angles in a deflection region (68) through which an electron beam... | 05/01/1990 |
