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| Number | Title | Issue Date |
| 6183720 | Process and apparatus for producing high-purity chemicals for the microelectronics industry A process for producing a high-purity liquid chemical is provided. A chemical gas is successively purified over first and second purification columns by passing, countercurrently, a scrubbing solution of initially deionized high-purity water through the f... | 02/06/2001 |
