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| Number | Title | Issue Date |
| 6214173 | On-site manufacture of ultra-high-purity nitric acid Provided is a novel on-site system and method for providing ultra-high-purity nitric acid to a point of use. The system includes a source of nitric acid at a concentration greater than 68 wt %; a reflux distillation column having an inlet in communication... | 04/10/2001 |
| 5846387 | On-site manufacture of ultra-high-purity hydrochloric acid for semiconductor processing Highly purified HCl for use in semiconductor manufacturing is prepared on-site by drawing HCl vapor from a liquid HCl reservoir, and scrubbing the filtered vapor in a low-pH aqueous scrubber.... | 12/08/1998 |
