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| Number | Title | Issue Date |
| 7661460 | Heat exchangers for fluid media A compact heat exchanger for interchanging thermal energy between at least two fluids, one of which fluids may be a refrigerant in hot or cold form or in a liquid/vapor phase, and another of which fluids is a thermal transfer fluid. The heat exchanger may incorporat... | 02/16/2010 |
| 7415835 | Thermal control system and method A system and method for controlling the temperature of a process tool uses the vaporizable characteristic of a refrigerant that is provided in direct heat exchange relation with the process tool. Pressurized refrigerant is provided as both condensed liquid and in ga... | 08/26/2008 |
| 7243500 | Heat exchanger and temperature control unit Systems and methods for heat exchange in accordance with the invention define adequately long-interchange distances for two fluids by wrapping a tube containing a first fluid about the wall of an inner cylindrical tank, within a gap formed with a second concentric t... | 07/17/2007 |
| 7178353 | Thermal control system and method A system and method for controlling the temperature of a process tool uses the vaporizable characteristic of a refrigerant that is provided in direct heat exchange relation with the process tool. Pressurized refrigerant is provided as both condensed liquid and in ga... | 02/20/2007 |
| 7152426 | Thermal control systems for process tools requiring operation over wide temperature ranges A system and method for maintaining the temperature of a thermal transfer fluid at a selectable level within a wide temperature range, so as to operate a process tool in a chosen mode employing at lease two cascaded stages, each operating with a different fluid in a... | 12/26/2006 |
| 6993918 | Thermal control systems for process tools requiring operation over wide temperature ranges A system and method for maintaining the temperature of a thermal transfer fluid at a selectable level within a wide temperature range, so as to operate a process tool in a chosen mode employing at least two cascaded stages, each operating with a different fluid in a... | 02/07/2006 |
| 6783080 | Systems and methods for controlling temperatures of process tools A system and method for controlling a critical process variable, such as the temperature of one or more temperature control units for cluster tools in a semiconductor fabrication facility, uses dual interrelated PID) algorithms for interrelated but at times separate... | 08/31/2004 |
| 6775996 | Systems and methods for temperature control The problem of controlling the temperature of the different units in a process tool system which have to be cooled or heated using thermal transfer fluid at selected setpoints and flow rates is resolved by a system having multiple modular units each with some operat... | 08/17/2004 |
| 6769882 | Pressure compensation for localized bearing heating in pumps driven by motors with fluid filled rotors A motor/pump system which uses an enclosed rotor shell, and also interior hydrodynamic bearings which are lubricated by the liquid being pumped, is arranged to minimize localized heating at the bearings to vaporization levels under high load conditions. To this end ... | 08/03/2004 |
| 6626649 | Pump system employing liquid filled rotor A long life rotor pump combination of the type having a liquid filled rotor that uses the liquid being pumped to establish hydrodynamic bearings within the rotor incorporates a pump which can be expanded to include more than one impeller, providing an opt... | 09/30/2003 |
| 6446446 | Efficient cooling system and method A system and method for controlling the temperature of thermal loads which might be controlled by refrigeration at any temperature within a wide range from -40° C. to +120° C. employs a refrigeration loop with pressure and temperature sensitive shunt pa... | 09/10/2002 |
