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Henry Morton, president of the Stevens Institute of Technology ; Said in 1880 about the light bulb
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| Number | Title | Issue Date |
| 7442275 | Lateral temperature equalizing system for large area surfaces during processing In many processes used in fabricating semiconductors the wafer is seated on the top surface of a pedestal and heated in a high energy process step, such as plasma etching. The pedestal, chuck or platen may be cooling but the wafer gradually heats until the process c... | 10/28/2008 |
| 7337625 | Thermal control systems for process tools requiring operation over wide temperature ranges A system and method for maintaining the temperature of a thermal transfer fluid at a selectable level within a wide temperature range, so as to operate a process tool in a chosen mode employing at lease two cascaded stages, each operating with a different fluid in a... | 03/04/2008 |
| 7195693 | Lateral temperature equalizing system for large area surfaces during processing In many processes used in fabricating semiconductors the wafer is seated on the top surface of a pedestal and heated in a high energy process step, such as plasma etching. The pedestal, chuck or platen may be cooling but the wafer gradually heats until the process c... | 03/27/2007 |
