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Assignee: Advanced NuMicro Systems, Inc.


Location: San Jose, CA
No. of patents: 18

NumberTitleIssue Date
8082788MEMS load cell and strain sensor
A sensor includes at least one stationary pad with comb teeth, a hub, at least one actuator spoke coupled to a location on the hub, and at least one sensing spoke extending from the hub. The sensing spokes have comb teeth generally interdigitated with the comb teeth...
12/27/2011
8035874MEMS device with off-axis actuator
A micro-electro-mechanical system (MEMS) mirror device has a mirror, a frame rotatively coupled to the mirror, and a uniaxial actuator rotatively coupled to the frame where the rotational axis of the actuator is offset from the rotational axes of the mirror and the ...
10/11/2011
7969637MEMS mirror driven by one motion with oscillations of different frequency for bidirectional rotation
A micro-electro-mechanical system (MEMS) mirror system has an actuator that imparts a motion with a first periodic movement of high frequency superimposed a second periodic movement of low frequency to a frame and a mirror coupled to the frame so that the mirror rot...
06/28/2011
7821693MEMS mirror with rotation amplification and electromagnetic drive
A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to an actuator by a first torsional hinge along a rotational axis. The actuator has a body and a group of coils extending from the body. An anchor is coupled another end of the actuator...
10/26/2010
7796315MEMS mirror made from topside and backside etching of wafer
A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a silicon wafer to form a first support layer having asymmetric pads. The backside of the silicon wafer is etched to form a top layer with a mirror, beam struc...
09/14/2010
7616371Trimming a MEMS device to fine tune natural frequency
A mirror device includes a mirror, an anchor, and a spring coupling the mirror to the anchor. The anchor and/or mirror can define one or more rows of holes adjacent to the coupling location of the spring. The natural frequency of the device can be adjusted by removi...
11/10/2009
7538928MEMS mirror with parallel springs and arched support for beams
A micro-electro-mechanical system (MEMS) mirror device includes (1) a mirror, (2) spring elements coupled to the mirror, (3) a beam coupled to the group of spring elements, (4) a spring coupled to the beam, and (5) a stationary pad coupled to the spring. The spring ...
05/26/2009
7538927MEMS mirror with short vertical comb teeth and long in-plane comb teeth
A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a wafer to form a first support layer having short stationary comb teeth extending from one or more support pads. The backside of the wafer is etched to form a...
05/26/2009
7459093MEMS mirror made from topside and backside etching of wafer
A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a silicon wafer to form a first support layer having asymmetric pads. The backside of the silicon wafer is etched to form a top layer with a mirror, beam struc...
12/02/2008
7426066MEMS scanning mirror with tunable natural frequency
In one embodiment of the invention, a MEMS structure includes a first electrode, a second electrode, and a mobile element. The first electrode is coupled to a first voltage source. The second electrode is coupled to a second voltage source. The mobile element includ...
09/16/2008
7402255MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation
A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bot...
07/22/2008
7334475MEMS actuator having supporting substrate asserting physical influence on oscillating body
A micro-electro-mechanical system (MEMS) device includes an oscillating body and a beam connected to the oscillating body. The beam has a proximal end connected to the oscillating body, a distal end spaced from the oscillating body, and rotational comb teeth extendi...
02/26/2008
7301689MEMS mirror with parallel springs and arched support for beams
A micro-electro-mechanical system (MEMS) mirror device includes (1) a mirror, (2) a first group of spring elements coupled to one half of the mirror, (3) a first beam coupled to the first group of spring elements, (4) a first spring coupled to the first beam, and (5...
11/27/2007
7282775MEMS scanning mirror with trenched surface and tapered comb teeth for reducing intertia and deformation
A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bot...
10/16/2007
7252394Laser projection display and illumination device with MEMS scanning mirror for indoor and outdoor applications
A projection display system includes a light source emitting a light beam, and a reflecting mirror system for scanning the light beam over an image to illuminate the image. The light source can be solid state such as a laser diode. The reflecting mirror system can b...
08/07/2007
7217587MEMS scanning mirror with trenched surface and tapered comb teeth for reducing inertia and deformation
A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bot...
05/15/2007
7187488Trimming a MEMS device to fine tune natural frequency
A mirror device includes a mirror, an anchor, and a spring coupling the mirror to the anchor. The anchor and/or mirror can define one or more rows of holes adjacent to the coupling location of the spring. The natural frequency of the device can be adjusted by removi...
03/06/2007
7187100Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth
A micro-electro-mechanical system (MEMS) mirror device includes an mirror, bonding pads, springs, and beams connected to the mirror. The mirror has a width greater than 1000 and less than 1200 microns, a length greater than 4000 and less than 5500 microns, and a thi...
03/06/2007
 
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