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| Number | Title | Issue Date |
| 7715941 | Method and apparatus for scheduling a plurality of processing tools The present invention provides a method and apparatus for scheduling a plurality of processing tools. The method comprises providing a first processing tool and a plurality of second processing tools, selecting one of the plurality of second processing tools, and de... | 05/11/2010 |
| 7369905 | Method and apparatus for pressure and plasma control during transitions used to create graded interfaces by multi-step PECVD deposition A method and apparatus are provided for a graded PECVD process that continuously modulates a set of flow and pressure conditions while the plasma power is turned on and a film is being deposited. A feedback mechanism specific to a give deposition recipe is used to g... | 05/06/2008 |
| 7369550 | Method and apparatus for locking a table in a network switch An apparatus and method are disclosed for locking a table within a network switch. The table is used to store entries that contain addresses of network stations connected to the network switch. A scheduler regulates access to the address table by allocating prescrib... | 05/06/2008 |
