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Assignee: Advanced Energy Industries


Location: Fort Collins, CO
No. of patents: 1

NumberTitleIssue Date
7468494Reaction enhancing gas feed for injecting gas into a plasma chamber
In one aspect of the invention is a gas feed for injecting gas into a plasma-processing chamber that reduces the speed at which the gas interacts with the plasma discharge, so enhancing the stability of the plasma and the production of reaction products. In one embo...
12/23/2008
 
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