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| Number | Title | Issue Date |
| 6030591 | Process for removing and recovering halocarbons from effluent process streams A process for recovery of fluorocompound gas from an effluent gas stream containing the fluorocompound gas and other gas components, in which at least one of the other gas components is removed, e.g., by oxidation or contacting of the effluent stream with... | 02/29/2000 |
| 5955037 | Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases An effluent gas stream treatment system for treatment of gaseous effluents such as waste gases from semiconductor manufacturing operations. The effluent gas stream treatment system comprises a pre-oxidation treatment unit, which may for example comprise a... | 09/21/1999 |
| 5935283 | Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system A clog-resistant inlet structure for introducing a particulate solids-containing and/or solids-Forming gas stream to a gas processing system. The structure is composed of a gas-permeable wall enclosing a gas flow path, and an outer annular jacket circumsc... | 08/10/1999 |
| 5882366 | Alternating wash/dry water scrubber entry An apparatus for conveying a process gas stream from an upstream source to a downstream treatment unit, including a manifold receiving gas from the upstream source, including first and second valved inlet lines which are alternatingly employed to flow gas... | 03/16/1999 |
| 5873388 | System for stabilization of pressure perturbations from oxidation systems for treatment of process gases from semiconductor manufacturing operations A pressure damping system for damping pressure perturbations incident to switching of switchable flow control means in a fluid flow circuit. The pressure surge damping system comprises a throttle valve in the circuit, with the throttle valve and switchabl... | 02/23/1999 |
| 5851293 | Flow-stabilized wet scrubber system for treatment of process gases from semiconductor manufacturing operations A flow stabilization system for damping pressure variations in a process discharging an effluent gas stream, in which the process is pressure-sensitive and downstream pressure variations can adversely affect the upstream process, said system comprising a ... | 12/22/1998 |
| 5846275 | Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system A clog-resistant inlet structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system, including: a gas-permeable wall enclosing a gas flow path, and an outer annular jacket circumscribing the gas-per... | 12/08/1998 |
| 5833888 | Weeping weir gas/liquid interface structure A gas/liquid interface structure for transport of a gas stream from an upstream source of same to a downstream processing unit, comprising first and second flow passage members defining an annular volume therebetween, with the second flow passage member e... | 11/10/1998 |
| 5777058 | Metallo-oxomeric scrubber compositions Scavengers for removing acidic or corrosive gaseous components from semiconductor process effluents comprising a metallic macromer comprising a coordinated complex of (i) metal coordination atoms linked to (ii) oxomeric moieties selected from the group co... | 07/07/1998 |
| 5622682 | Method for concentration and recovery of halocarbons from effluent gas streams A process for recovery of halocarbons from a gas mixture containing the halocarbon and acid gas components comprises the steps of contacting the gas mixture with a dry scrubber to remove the acid gas components from the gas mixture and yield a first efflu... | 04/22/1997 |
