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...that Charles Goodyear performed some of his experiments on rubber while in debtor's prison? He was there so often he referred to it as his "hotel". Chronically in debt because of poor business sense and ill health, Goodyear depended on the generosity of friends and family. Even after he unlocked the secret to vulcanizing rubber, he was unable to improve his financial situation. When he died, his estate was $200,000 in debt.

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Assignee: ASML US, Inc.


Location: Wilton, CT
No. of patents: 3

NumberTitleIssue Date
6556281Flexible piezoelectric chuck and method of using the same
A flexible chuck for supporting a substrate during lithographic processing is described. This flexible chuck includes an electrode layer, a piezoelectric layer disposed on the electrode layer, and a substrate support layer disposed above the piezoelectric...
04/29/2003
6507390Method and apparatus for a reticle with purged pellicle-to-reticle gap
A method and apparatus for maintaining a purged optical gap between a pellicle and a reticle in a photolithography system is described. A porous frame between a reticle and a pellicle maintains the purged optical gap. A porous frame includes a first and a...
01/14/2003
6398373Pneumatic control system and method for shaping deformable mirrors in lithographic projection systems
A system for adjusting a deformable mirror including a reaction plate, a plurality of pneumatic actuators coupled to the reaction plate, and a plurality of push-pull flexures coupled on a first end to the pneumatic actuators, and coupled on a second end t...
06/04/2002
 
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