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Assignee: ASML US, Inc.

Location: NL
No. of patents: 1

Number	Title	Issue Date
7306114	Non-dripping nozzle apparatus According to one aspect of the invention, a dispense head for a wafer processing apparatus is provided. The dispense head may include an inlet, at least one outlet, a drain, and a passageway therethrough interconnecting the inlet, the outlet, and the drain. The inle...	12/11/2007