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Assignee: ASML Masktools Netherlands B.V.


Location: Veldhoven, NL
No. of patents: 9

NumberTitleIssue Date
7735052Method of identifying an extreme interaction pitch region, methods of designing mask patterns and manufacturing masks, device manufacturing methods and computer programs
Optical proximity effects (OPEs) are a well-known phenomenon in photolithography. OPEs result from the structural interaction between the main feature and neighboring features. It has been determined by the present inventors that such structural interactions not onl...
06/08/2010
RE40084Optical proximity correction
Method for utilizing halftoning structures to manipulate the relative magnitudes of diffraction orders to ultimately construct the desired projected-image. At the resolution limit of the mask maker, this is especially useful for converting strongly shifted, no-0
02/19/2008
6670081Optical proximity correction method utilizing serifs having variable dimensions
A method of forming a mask for optically transferring a lithographic pattern onto a substrate by use of an optical exposure tool, where the pattern comprises a plurality of features each of which has corresponding edges and vertices. The method includes t...
12/30/2003
6623895Hybrid phase-shift mask
A method of forming a hybrid mask for optically transferring a lithographic pattern corresponding to an integrated circuit from the mask onto a semiconductor substrate by use of an optical exposure tool. The method includes the steps of forming at least o...
09/23/2003
6541167Optical proximity correction
Method for utilizing halftoning structures to manipulate the relative magnitudes of diffraction orders to ultimately construct the desired projected-image. At the resolution limit of the mask maker, this is especially useful for converting strongly shifte...
04/01/2003
6482555Method of patterning sub-0.25λ line features with high transmission, "attenuated" phase shift masks
A method for making a mask for optically transferring a lithographic pattern corresponding to an integrated circuit from the mask onto a semiconductor substrate by use of an optical exposure tool. The method includes the steps of de-composing the existing...
11/19/2002
6335130System and method of providing optical proximity correction for features using phase-shifted halftone transparent/semi-transparent features
Method for utilizing halftoning structures to manipulate the relative magnitudes of diffraction orders to ultimately construct the desired projected-image. At the resolution limit of the mask maker, this is especially useful for converting strong shifted,...
01/01/2002
6312854Method of patterning sub-0.25 lambda line features with high transmission, "attenuated" phase shift masks
A method for making a mask for optically transferring a lithographic pattern corresponding to an integrated circuit from the mask onto a semiconductor substrate by use of an optical exposure tool. The method includes the steps of de-composing the existing...
11/06/2001
6114071Method of fine feature edge tuning with optically-halftoned mask
A photolithography mask for optically transferring a lithographic pattern corresponding to an integrated circuit from the mask onto a semiconductor substrate by use of an optical exposure tool. The mask comprises a plurality of features corresponding to e...
09/05/2000
 
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