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| Number | Title | Issue Date |
| 5970382 | Process for forming coatings on semiconductor devices A process for forming coatings and films from a gaseous reactant onto a semiconductor device is disclosed. The process includes preheating a gas to a temperature so that the gas will immediately react with the semiconductor wafer. After being preheated, t... | 10/19/1999 |
| 5970214 | Heating device for semiconductor wafers An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly of light energy sources for emitting light energy onto a wafer. In particular, the light energy sources are positioned suc... | 10/19/1999 |
| 5960158 | Apparatus and method for filtering light in a thermal processing chamber The present invention is directed to an apparatus and process for filtering light in a thermal processing chamber. In particular, the apparatus of the present invention includes a first spectral filter spaced apart from a second spectral filter. The first... | 09/28/1999 |
| 5930456 | Heating device for semiconductor wafers An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly of light energy sources for emitting light energy onto a wafer. In particular, the light energy sources are positioned suc... | 07/27/1999 |
| 5874711 | Apparatus and method for determining the temperature of a radiating surface The present invention is generally directed to a system and process for accurately determining the temperature of an object, such as a semiconductive wafer, by sampling from the object radiation being emitted at a particular wavelength. In particular, a r... | 02/23/1999 |
| 5820942 | Process for depositing a material on a substrate using light energy The present invention is generally directed to a process and a system for transforming a liquid into a solid material using light energy. In particular, a solution containing a parent material in a liquid form is atomized in a reaction vessel and directed... | 10/13/1998 |
