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| Number | Title | Issue Date |
| 6529270 | Apparatus and method for detecting defects in the surface of a workpiece The present invention provides apparatus and methods for scanning a workpiece for defects with increased resolution and sensitivity relative to conventional workpiece inspection systems. Specifically, the apparatus and methods of the present invention rep... | 03/04/2003 |
| 6509965 | Wafer inspection system for distinguishing pits and particles A surface inspection system and method is provided which detects defects such as particles or pits on the surface of a workpiece, such as a silicon wafer, and also distinguishes between pit defects and particle defects. The surface inspection system compr... | 01/21/2003 |
| 6292259 | Wafer inspection system for distinguishing pits and particles A surface inspection system and method is provided which detects defects such as particles or pits on the surface of a workpiece, such as a silicon wafer, and also distinguishes between pit defects and particle defects. The surface inspection system compr... | 09/18/2001 |
| 6122047 | Methods and apparatus for identifying the material of a particle occurring on the surface of a substrate The composition of a particle occurring on the surface of a smooth substrate is identified by impinging the surface with a light beam having a strong P-polarized component at an oblique angle of incidence to the surface, and collecting light scattered fro... | 09/19/2000 |
| 6118525 | Wafer inspection system for distinguishing pits and particles A surface inspection system and method is provided which detects defects such as particles or pits on the surface of a workpiece, such as a silicon wafer, and also distinguishes between pit defects and particle defects. The surface inspection system compr... | 09/12/2000 |
| 5988971 | Wafer transfer robot In one aspect, the present invention provides an apparatus for transferring wafers to or from a wafer cassette having a plurality of wafer-receiving slots, wherein the apparatus comprises a wafer paddle which is adapted to be inserted into a wafer cassett... | 11/23/1999 |
| 5712701 | Surface inspection system and method of inspecting surface of workpiece A surface inspection system and methods of inspecting a surface of a workpiece are provided for detecting particles, defects, or other surface characteristics in or on a surface of the workpiece. The surface inspection system preferably has a transporter ... | 01/27/1998 |
| 5691812 | Calibration standard for calibrating a defect inspection system and a method of forming same The calibration standard has artificial defects of a predetermined uniform size disposed on selected areas of a substrate. The artificial defects are randomly spaced within the selected area and of a sufficient density as to be visually discernable throug... | 11/25/1997 |
