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Assignee: Suzuki; Soubei


Location: Sendai, JP
No. of patents: 1

NumberTitleIssue Date
5693139Growth of doped semiconductor monolayers
A cycle of alternately or cyclically introducing external gases containing molecules of component elements of a compound semiconductor to be formed on a substrate is repeated while appropriately controlling the pressure, substrate temperature and gas intr...
12/02/1997
 
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