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Assignee: Takahashi; Kiyoshi

Location: Tokyo, JP
No. of patents: 1

Number	Title	Issue Date
6176265	Valve unit having an insert molded inner valve block Pick-up tools and other devices for handling semiconductor wafers are require to be capable of withstanding corrosive chemical substances and extreme temperatures, and the valve unit for use in such devices must meet these requirements. The valve unit is ...	01/23/2001