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Assignee: Silex Microsystems AB


Location: Jarfalla, SE
No. of applications: 7

Application No.Application TitleIssue Date
20120126392Methods for Making Micro Needles and Applications Thereof
The invention relates in a general aspect to a method of making vertically protruding elements on a substrate, said elements having a tip comprising at least one inclined surface and an elongated body portion extending between said substrate and said tip. The method com...
05/24/2012
20120019886VIA STRUCTURE AND METHOD THEREOF
A layered micro-electronic and/or micro-mechanic structure comprises at least three alternating electrically conductive layers with insulating layers between the conductive layers. There is also provided a via in a first outer layer, said via comprising an insulated con...
01/26/2012
20120018852VIA STRUCTURE AND METHOD THEREOF
A vent hole precursor structure (26) in an intermediate product for a semi-conductor device has delicate structures (27, 28), and said intermediate product has a cavity (21) with a pressure therein differing from the pressure of the surroundings. Th...
01/26/2012
20100053922MICROPACKAGING METHOD AND DEVICES
A method of micro-packaging a component wherein at least a first and a second semi-conductor substrate are provided, one of which has electrical through connections (vias). A depression in either one of the substrates or in both is etched. A component is provided above ...
03/04/2010
20100052107VIAS AND METHOD OF MAKING
The invention relates to a method of providing a planar substrate with electrical through connections (vias). The method comprises providing a hole in said substrate and a treatment to render the substrate surface exhibiting a lower wettability than the walls inside the...
03/04/2010
20080308884Fabrication of Inlet and Outlet Connections for Microfluidic Chips
A method of making a fluid communication channel between a micro mechanical structure provided on a front side of a device and the back side of said device is described. It includes making the required structural components by lithographic and etching processes on said ...
12/18/2008
20060032039PRESSURE SENSOR
In manufacturing a pressure sensor a recess that will form part of the sensor cavity is formed in a lower silicon substrate. An SOI-wafer having a monocrystalline silicon layer on top of a substrate is bonded to the lower silicon substrate closing the recess and forming...
02/16/2006
 
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