Did You Know...
...that the video game, Pong, was invented by a guy who graduated at the bottom of his engineering class? Nolan Bushnell spent more time running the games at a local amusement park than he did on his studies at the University of Utah. His dreams of working for Disney's amusement empire were dashed when the company wouldn't hire him. Taking a boring job, Nolan daydreamed about electronic versions of popular games. He invented Pong, the first video game, and went on to found Atari Co.
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| Application No. | Application Title | Issue Date |
| 20120081132 | Measuring Minority Carrier Lifetime An apparatus includes a member including a ferromagnetic material, an inductance-capacitance resonant circuit, a substrate disposed relative to the member, and a plurality of radiation sources. The member includes a post disposed at its center and a surface extending to... | 04/05/2012 |
| 20120035755 | PROCESS CONTROL USING PROCESS DATA AND YIELD DATA A method for monitoring a manufacturing tool features acquiring metrology data (“Step a”). Data is acquired for process variables for a first process step performed by the manufacturing tool (“Step b”). A mathematical model of the first process step based on the... | 02/09/2012 |
| 20120031190 | CAPACITIVE PRESSURE SENSOR An improved capacitive manometer, the manometer comprises: a diaphragm including (a) a common electrode and (b) an electrode structure including a center electrode and ring electrode, wherein the diaphragm is movable between (i) a zero position when the pressure on each... | 02/09/2012 |
| 20120013352 | Multipoint Voltage And Current Probe System A metrology system monitors radio frequency (RF) power at a plurality of locations in a circuit. The system includes a plurality of RF sensors that generate respective analog signals based on electrical properties of the RF power, a multiplexing module that generates an... | 01/19/2012 |
| 20120013253 | Phase And Frequency Control Of A Radio Frequency Generator From An External Source Controlling a phase and/or a frequency of a RF generator. The RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit contr... | 01/19/2012 |
| 20120003748 | Chemical Ionization Reaction or Proton Transfer Reaction Mass Spectrometry A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequen... | 01/05/2012 |
| 20110241781 | Variable Class Characteristic Amplifier A power amplifier (PA) adjustably operable between two classes of operation. The range of operation lies in a range of operation between a conventional, linear, conjugately matched Class AB characteristic amplifier and a higher efficiency switching Class E characteristi... | 10/06/2011 |
| 20110241773 | Multi-Channel Radio Frequency Generator A multi-channel radio frequency (RF) generator module includes N power amplifiers, M drivers, a power supply module, and a control module. The N power amplifiers generate N RF outputs, respectively. The M drivers drive the N power amplifiers based on M driver control si... | 10/06/2011 |
| 20110228274 | Ozone Concentration Sensor An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially sha... | 09/22/2011 |
| 20110169520 | APPARATUS FOR MEASURING MINORITY CARRIER LIFETIME AND METHOD FOR USING THE SAME An apparatus for measuring minority carrier lifetime is provided. The apparatus includes a resonant circuit having an inductor and a capacitor and configured to resonate at a measurement frequency. The apparatus also includes a ferromagnetic core having a first portion ... | 07/14/2011 |
| 20110012588 | Wide-Dynamic Range Electrometer with a Fast Response A method and apparatus for measuring current includes sensing a first voltage at the output of an amplifier and computing a current based on the first voltage and the resistance of a first resistive element, which is electrically coupled between an inverting input of th... | 01/20/2011 |
| 20110005922 | Methods and Apparatus for Protecting Plasma Chamber Surfaces A method for creating a protective layer over a surface of an object comprising aluminum and magnesium for use in a semiconductor processing system, which includes oxidizing the surface of the object using a plasma electrolytic oxidation process. The method also include... | 01/13/2011 |
| 20100327927 | METHOD AND SYSTEM FOR CONTROLLING RADIO FREQUENCY POWER A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimiz... | 12/30/2010 |
| 20100292812 | METHODS AND APPARATUS FOR AUTOMATED PREDICTIVE DESIGN SPACE ESTIMATION Described are computer-based methods and apparatuses, including computer program products, for automated predictive design space estimation. A design space of input factors and output responses is estimated for a physical process. Data is received for one or more input ... | 11/18/2010 |
| 20100235690 | BITMAP CLUSTER ANALYSIS OF DEFECTS IN INTEGRATED CIRCUITS A system and method for defect analysis are disclosed wherein a defect data set is input into the system. A radius value is selected by a user, which is the maximum number of bits that bit failures can be separated from one another to be considered a bit cluster. When a... | 09/16/2010 |
| 20100231296 | Radio Frequency Power Delivery System A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring vol... | 09/16/2010 |
| 20100223015 | METHOD AND APPARATUS FOR SILOXANE MEASUREMENTS IN A BIOGAS A method for monitoring of siloxane compounds in a biogas includes the step of generating a first absorption spectrum based on a ratio of a first spectral measurement and a second spectral measurement. The first spectral measurement is from a non-absorptive gas having s... | 09/02/2010 |
| 20100201371 | Harmonic Derived Arc Detector An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, ... | 08/12/2010 |
| 20100201370 | Arc Detection An arc detection system for a plasma generation system includes a radio frequency (RF) sensor that generates first and second signals based on a respective electrical properties of (RF) power that is in communication with a plasma chamber. A correlation module generates... | 08/12/2010 |
| 20100191361 | Controlling a Manufacturing Process with a Multivariate Model A method, controller, and system for controlling a manufacturing process (batch-type or continuous-type) with a multivariate model are described. Dependent variable data and manipulated variable data are received. Dependent variable data represents values of uncontrolle... | 07/29/2010 |
| 20100176858 | Signal oversampling for improved S:N in reflector movement system Eight or more transition points are generated during a given period, and are used in tracking movement of an interferometer reflector. Duty cycles of generated square waves are used to establish precise intervals between the transition points, and precise wave-phase rel... | 07/15/2010 |
| 20100148874 | METHODS AND SYSTEMS FOR STABILIZING AN AMPLIFIER The invention generally relates to stabilizing an MRI power delivery system. In one aspect, a stabilization module that is in electrical communication with the MRI power delivery system is provided. The stabilization module includes a closed loop control system. The clo... | 06/17/2010 |
| 20100125424 | Dual-Mode Mass Flow Verification and Mass Flow Delivery System and Method A system performs mass flow delivery of a fluid, and also performs mass flow verification of the fluid. The system includes an inlet valve that controls flow of the fluid into a chamber, an outlet valve that controls flow of the fluid out of the chamber, a pressure tran... | 05/20/2010 |
| 20100100223 | PROCESS CONTROL USING PROCESS DATA AND YIELD DATA A method for monitoring a manufacturing process features acquiring metrology data for semiconductor wafers at the conclusion of a final process step for the manufacturing process (“Step a”). Data is acquired for a plurality of process variables for a first process s... | 04/22/2010 |
| 20100079764 | Multigas Monitoring and Detection System A spectroscopic detection system is described for monitoring ambient air for toxic chemical substances. The system can be a compact, portable multiple gas analyzer capable of detecting and discriminating a broad range of chemical constituents including various nerve and... | 04/01/2010 |
| 20100063614 | VERSATILE SEMICONDUCTOR MANUFACTURING CONTROLLER WITH STATISTICALLY REPEATABLE RESPONSE TIMES The present invention relates to process I/O controllers for semiconductor manufacturing to which a tool host can delegate data collection, monitoring and control tasks. In particular, it relates to process I/O controllers that can perform more than one of data collecti... | 03/11/2010 |
| 20100057237 | AUTOMATED MODEL BUILDING AND BATCH MODEL BUILDING FOR A MANUFACTURING PROCESS, PROCESS MONITORING, AND FAULT DETECTION A method for creating a new model of a manufacturing process according to a multivariate analysis including selecting a set of data representative of multidimensional data measured during a step or phase of a manufacturing process. The method also includes determining a... | 03/04/2010 |
| 20100027017 | Ozone Concentration Sensor An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially sha... | 02/04/2010 |
| 20090320677 | PARTICLE TRAP FOR A PLASMA SOURCE A particle trap for a remote plasma source includes a body structure having an inlet for coupling to a chamber of a remote plasma source and an outlet for coupling to a process chamber inlet. The particle trap for a remote plasma source also includes a gas channel forme... | 12/31/2009 |
| 20090315463 | Phase And Frequency Control Of A Radio Frequency Generator From An External Source Controlling a phase and/or a frequency of a RF generator. The RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit contr... | 12/24/2009 |
| 20090288772 | Method and Apparatus for Processing Metal Bearing Gases A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal be... | 11/26/2009 |
| 20090256580 | ORTHOGONAL RADIO FREQUENCY VOLTAGE/CURRENT SENSOR WITH HIGH DYNAMIC RANGE A radio frequency (RF) sensor that measures RF current includes a substrate that has an inner perimeter that defines an aperture. A conductor extends through the aperture. Sensor pads are arranged on the aperture and are connected to form two sensor loops. The loops gen... | 10/15/2009 |
| 20090255342 | Capacitance Manometers and Methods of Making Same A capacitance manometer comprises: a flexible diaphragm including a first electrode structure; an electrode structure including second and third spaced-apart electrode structures secured relative to the diaphragm so as to establish a capacitance between the first electr... | 10/15/2009 |
| 20090228247 | Process Control Using Process Data and Yield Data A method for monitoring a manufacturing process features acquiring metrology data for semiconductor wafers at the conclusion of a final process step for the manufacturing process (“Step a”). Data is acquired for a plurality of process variables for a first process s... | 09/10/2009 |
| 20090210086 | SYSTEMS AND METHODS FOR SORTING IRREGULAR OBJECTS A system and method is provided for computerized sorting irregular objects. The method includes receiving a representative set of irregular objects comprising at least two types of user-specified qualities. The method also includes receiving at least two types of measur... | 08/20/2009 |
| 20090095902 | CHEMICAL IONIZATION REACTION OR PROTON TRANSFER REACTION MASS SPECTROMETRY WITH A TIME-OF-FLIGHT MASS SPECTROMETER A system, components thereof, and methods are described for time-of-flight mass spectrometry. A microwave or high-frequency RF energy source is used to ionize a reagent vapor to form reagent ions. The reagent ions enter a chamber and interact with a fluid sample to form... | 04/16/2009 |
| 20090095901 | CHEMICAL IONIZATION REACTION OR PROTON TRANSFER REACTION MASS SPECTROMETRY WITH A QUADRUPOLE MASS SPECTROMETER A system and methods are described for generating reagent ions and product ions for use in a quadrupole mass spectrometry system. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, ... | 04/16/2009 |
| 20090039934 | Signal Oversampling for Improved S:N in Reflector Movement System Eight or more transition points are generated during a given period, and are used in tracking movement of an interferometer reflector. Duty cycles of generated square waves are used to establish precise intervals between the transition points, and precise wave-phase rel... | 02/12/2009 |
| 20090037013 | Automated Model Building and Model Updating A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated wit... | 02/05/2009 |
