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| Application No. | Application Title | Issue Date |
| 20100034970 | APPARATUS AND METHOD FOR CHEMICAL VAPOR DEPOSITION A chemical vapor deposition apparatus includes a charging section 10 for charging a feedstock material for vapor deposition, a decomposition oven 2 for decomposing a feedstock material for vapor deposition, an opening/closing valve 4 for interconnec... | 02/11/2010 |
