US Classes248/371, Tilting support surface294/81.51, Pivotal about horizontal axis464/137Coupling transmits torque via axially directed pin radially spaced from rotational axis
International ClassesH01L 21/677
A holding apparatus, a conveying apparatus, and a rotation-transmitting apparatus are provided that are capable of holding an object in a tiltable manner. A conveying apparatus according to one form of the present invention includes a pad supported by a supporting member on a hand. A concave portion is formed on the pad, and by the concave portion engaging with the supporting member fixed to the hand, a pad is supported in a tiltable manner. A conveying object is held by an adhesive layer of the pad adhering thereto. By tilting with respect to the hand , the pad follows the shape or vibration of the conveying object, with the result that the conveying object can be conveyed stably.